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17.  Type-II superlattice dual-band LWIR imager with M-barrier and Fabry-Perot resonance
E.K. Huang, A. Haddadi, G. Chen, B.M. Nguyen, M.A. Hoang, R. McClintock, M. Stegall, and M. Razeghi
OSA Optics Letters, Vol. 36, No. 13, p. 2560-2562-- July 1, 2011 ...[Visit Journal]
We report a high performance long-wavelength IR dual-band imager based on type-II superlattices with 100% cutoff wavelengths at 9.5 μm (blue channel) and 13 μm (red channel). Test pixels reveal background-limited behavior with specific detectivities as high as ∼5×1011 Jones at 7.9 μm in the blue channel and ∼1×1011 Jones at 10.2 μm in the red channel at 77 K. These performances were attributed to low dark currents thanks to the M-barrier and Fabry–Perot enhanced quantum efficiencies despite using thin 2 μm absorbing regions. In the imager, the high signal-to-noise ratio contributed to median noise equivalent temperature differences of ∼20 mK for both channels with integration times on the order of 0.5 ms, making it suitable for high speed applications. [reprint (PDF)]
 
17.  High operating temperature MWIR photon detectors based on Type-II InAs/GaSb superlattice
M. Razeghi, B.M. Nguyen, P.Y. Delaunay, S. Abdollahi Pour, E.K.W. Huang, P. Manukar, S. Bogdanov, and G. Chen
SPIE Proceedings, San Francisco, CA (January 22-28, 2010), Vol. 7608, p. 76081Q-1-- January 22, 2010 ...[Visit Journal]
Recent efforts have been paid to elevate the operating temperature of Type-II InAs/GaSb superlattice Mid Infrared photon detectors. Optimized growth parameters and interface engineering technique enable high quality material with a quantum efficiency above 50%. Intensive study on device architecture and doping profile has resulted in almost one order of magnitude of improvement to the electrical performance and lifted up the 300 K-background BLIP operation temperature to 166 K. At 77 K, the ~4.2 µm cut-off devices exhibit a differential resistance area product in excess of the measurement system limit (106 Ω·cm²) and a detectivity of 3x1013 cm·Hz½·W−1. High quality focal plane arrays were demonstrated with a noise equivalent temperature of 10 mK at 77 K. Uncooled camera is capable to capture hot objects such as soldering iron. [reprint (PDF)]
 
17.  Top-emission ultraviolet light-emitting diodes with peak emission at 280 nm
A. Yasan, R. McClintock, K. Mayes, S.R. Darvish, P. Kung, and M. Razeghi
Applied Physics Letters 81 (5)-- July 29, 2002 ...[Visit Journal]
We demonstrate light emission at 280 nm from UV light-emitting diodes consisting of AlInGaN/AlInGaN multiple quantum wells. Turn-on voltage of the devices is ~5 V with a differential resistance of ~40 Ω. The peak emission wavelength redshifts ~1 nm at high injection currents. [reprint (PDF)]
 
16.  Growth of AlxGa1-xN:Ge on sapphire and silicon substrates
X. Zhang, P. Kung, A. Saxler, D. Walker, T.C. Wang, and M. Razeghi
Applied Physics Letters 67 (12)-- September 18, 1995 ...[Visit Journal]
AlxGa1–xN were grown on (00.1) sapphire and (111) silicon substrates in the whole composition range (0 <= x <= 1). The high optical quality of the epilayers was assessed by room-temperature optical absorption and photoluminescence measurements. Layers with higher Al composition are more resistive. Resistive AlxGa1–xN epilayers were successfully doped with Ge and free-electron concentration as high as 3 × 1019 cm–3 was achieved. [reprint (PDF)]
 
16.  High-performance InAs quantum-dot infrared photodetectors grown on InP substrate operating at room temperature
H. Lim, S. Tsao, W. Zhang, and M. Razeghi
Applied Physics Letters, Vol. 90, No. 13, p. 131112-1-- March 26, 2007 ...[Visit Journal]
The authors report a room temperature operating InAs quantum-dot infrared photodetector grown on InP substrate. The self-assembled InAs quantum dots and the device structure were grown by low-pressure metal-organic chemical vapor deposition. The detectivity was 2.8×1011 cm·Hz1/2/W at 120 K and a bias of −5 V with a peak detection wavelength around 4.1 μm and a quantum efficiency of 35%. Due to the low dark current and high responsivity, a clear photoresponse has been observed at room temperature, which gives a detectivity of 6.7×107 cm·Hz1/2/W. [reprint (PDF)]
 
16.  Characterization of ZnO thin films grown on c-sapphire by pulsed laser deposition as templates for regrowth of zno by metal organic chemical vapor deposition
D. J. Rogers ; F. Hosseini Teherani ; C. Sartel ; V. Sallet ; F. Jomard ; P. Galtier ; M. Razeghi
Proc. SPIE 7217, Zinc Oxide Materials and Devices IV, 72170F (February 17, 2009)-- February 17, 2009 ...[Visit Journal]
The use of ZnO template layers grown Pulsed Laser Deposition (PLD) has been seen to produce dramatic improvements in the surface morphology, crystallographic quality and optical properties of ZnO layers grown on c-sapphire substrates by Metal Organic Chemical Vapor Deposition. This paper provides complementary details on the PLD-grown ZnO template properties. [reprint (PDF)]
 
16.  Quantum hall effect and hopping conduction in InxGa1−xAs-InP heterojunctions at low temperature
Y. Guldner, J.P. Hirtz, A. Briggs, J.P. Vieren, M. Voos, M. Razeghi
Y. Guldner, J.P. Hirtz, A. Briggs, J.P. Vieren, M. Voos, M. Razeghi, Quantum hall effect and hopping conduction in InxGa1−xAs-InP heterojunctions at low temperature, Surface Science, Volume 142, Issues 1–3, 1984, Pages 179-181,-- July 1, 1984 ...[Visit Journal]
We report investigations of the temperature dependence of the quantum Hall effect in modulation doped InxGa1−xAs-InP heterojunctions. The diagonal conductivity σxx is studied at several minima of the magneto-resistance ϱxx between 50 mK and 2 K. A hopping conduction mechanism is observed when the Fermi level is in the tail of the Landau levels. [reprint (PDF)]
 
16.  High-Power (~9 μm) Quantum Cascade Lasers
S. Slivken, Z. Huang, A. Evans, and M. Razeghi
Virtual Journal of Nanoscale Science and Technology 5 (22)-- June 3, 2002 ...[Visit Journal][reprint (PDF)]
 
16.  AlxGa1-xN p-i-n Photodiodes on Sapphire Substrates
D. Walker, P. Kung, P. Sandvik, J. Wu, M. Hamilton, I.H. Lee, J. Diaz, and M. Razeghi
SPIE Conference, San Jose, CA, -- January 27, 1999 ...[Visit Journal]
We report the fabrication and characterization of AlxGa1-xN p-i-n photodiodes (0.05 ≤ to X ≤ 0.30) grown on sapphire by low-pressure metalorganic chemical vapor deposition. The devices present a visible-rejection of about four orders of magnitude with a cutoff wavelength that shifts from 350 nm to 291 nm. They also exhibit a constant responsivity for five decades (30 mW/m² to 1 kW/m²) of optical power density. Using capacitance measurements, the values for the acceptor concentration in the p-AlxGa1-xN region and the unintentional donor concentration in the intrinsic region are found. Photocurrent decays are exponential for high load resistances, with a time constant that corresponds to the RC product of the system. For low load resistances the transient response becomes non-exponential, with a decay time longer than the RC constant. [reprint (PDF)]
 
16.  Recent advances in high performance antimonide-based superlattice FPAs
E.K. Huang, B.M. Nguyen, S.R. Darvish, S. Abdollahi Pour, G. Chen, A. Haddadi, and M.A. Hoang
SPIE Proceedings, Infrared technology and Applications XXXVII, Orlando, FL, Vol. 8012, p. 80120T-1-- April 25, 2011 ...[Visit Journal]
Infrared detection technologies entering the third generation demand performances for higher detectivity, higher operating temperature, higher resolution and multi-color detection, all accomplished with better yield and lower manufacturing/operating costs. Type-II antimonide based superlattices (T2SL) are making firm steps toward the new era of focal plane array imaging as witnessed in the unique advantages and significant progress achieved in recent years. In this talk, we will present the four research themes towards third generation imagers based on T2SL at the Center for Quantum Devices. High performance LWIR megapixel focal plane arrays (FPAs) are demonstrated at 80K with an NEDT of 23.6 mK using f/2 optics, an integration time of 0.13 ms and a 300 K background. MWIR and LWIR FPAs on non-native GaAs substrates are demonstrated as a proof of concept for the cost reduction and mass production of this technology. In the MWIR regime, progress has been made to elevate the operating temperature of the device, in order to avoid the burden of liquid nitrogen cooling. We have demonstrated a quantum efficiency above 50%, and a specific detectivity of 1.05x1012 cm·Hz1/2/W at 150 K for 4.2 μm cut-off single element devices. Progress on LWIR/LWIR dual color FPAs as well as novel approaches for FPA fabrication will also be discussed. [reprint (PDF)]
 
16.  High Power 3-12 μm Infrared Lasers: Recent Improvements and Future Trends
M. Razeghi, S. Slivken, A. Tahraoui, A. Matlis, and Y.S. Park
Advanced Research Workshop on Semiconductor Nanostructures, Queenstown, New Zealand; Proceedings -- February 5, 2003 ...[Visit Journal]
In this paper, we discuss the progress of quantum cascade lasers (QCLs) grown by gas-source molecular beam epitaxy. Room temperature QCL operation has been reported for lasers emitting between 5-11 μm, with 9-11 μm lasers operating up to 425 K. Laser technology for the 3-5 μm range takes advantage of a strain-balanced active layer design. We also demonstrate record room temperature peak output powers at 9 and 11 μm (2.5 and 1 W, respectively) as well as record low 80K threshold current densities (250 A/cm²) for some laser designs. Preliminary distributed feedback (DFB) results are also presented and exhibit single mode operation for 9 μm lasers at room temperature. [reprint (PDF)]
 
16.  Elimination of surface leakage in gate controlled Type-II InAs/GaSb mid-infrared photodetectors
G. Chen, B.-M. Nguyen, A.M. Hoang, E.K. Huang, S.R. Darvish, and M. Razeghi
Applied Physics Letters, Vol. 99, No. 18, p. 183503-1-- October 31, 2011 ...[Visit Journal]
The electrical performance of mid-infrared type-II superlattice M-barrier photodetectors is shown to be limited by surface leakage. By applying gate bias on the mesa sidewall surface, leakage current is significantly reduced. Qualitatively IV modeling shows diffusion-dominated behavior of dark current at temperatures greater than 120 K. At 110 K, the dark current of gated device is reduced by more than 2 orders of magnitude, reaching the measurement system noise floor. With a quantum efficiency of 48% in front side illumination configuration, a 4.7μm cut-off gated device attains a specific detectivity of 2.5 × 1014 cm·Hz½·W-1 at 110 K, which is 3.6 times higher than in ungated devices. [reprint (PDF)]
 
16.  Quantum cascade lasers: from tool to product
M. Razeghi, Q. Y. Lu, N. Bandyopadhyay, W. Zhou, D. Heydari, Y. Bai, and S. Slivken
Optics Express Vol. 23, Issue 7, pp. 8462-8475-- March 25, 2015 ...[Visit Journal]
The quantum cascade laser (QCL) is an important laser source in the mid-infrared and terahertz frequency range. The past twenty years have witnessed its tremendous development in power, wall plug efficiency, frequency coverage and tunability, beam quality, as well as various applications based on QCL technology. Nowadays, QCLs can deliver high continuous wave power output up to 5.1 W at room temperature, and cover a wide frequency range from 3 to 300 μm by simply varying the material components. Broadband heterogeneous QCLs with a broad spectral range from 3 to 12 μm, wavelength agile QCLs based on monolithic sampled grating design, and on-chip beam QCL combiner are being developed for the next generation tunable mid-infrared source for spectroscopy and sensing. Terahertz sources based on nonlinear generation in QCLs further extend the accessible wavelength into the terahertz range. Room temperature continuous wave operation, high terahertz power up to 1.9 mW, and wide frequency tunability form 1 to 5 THz makes this type of device suitable for many applications in terahertz spectroscopy, imaging, and communication. [reprint (PDF)]
 
16.  Long-Wavelength Infrared Photodetectors Based on InSbBi Grown on GaAs Substrates
J.J. Lee, J.D. Kim, and M. Razeghi
Applied Physics Letters 71 (16)-- October 20, 1997 ...[Visit Journal]
We demonstrate the operation of InSbBi infrared photoconductive detectors grown by low-pressure metalorganic chemical vapor deposition on semi-insulating GaAs substrates. The fabricated photodetector showed a cutoff wavelength of 7.7 μm at 77 K. The responsivity of the InSbBi photodetector at 7 μm was about 3.2 V/W at 77 K. The corresponding Johnson-noise limited detectivity was 4.7×108  cm· Hz½/W. The carrier lifetime was estimated to be about 86 ns from the voltage-dependent responsivity measurements. [reprint (PDF)]
 
16.  Very Long Wavelength GaAs/GaInP Quantum Well Infrared Photodetectors
C. Jelen, S. Slivken, G.J. Brown, and M. Razeghi
SPIE Conference, San Jose, CA, -- February 12, 1997 ...[Visit Journal]
We demonstrate long wavelength quantum well infrared photodetectors with GaAs quantum wells and GaInP barriers grown using gas-source molecular beam epitaxy. Wafers were grown with varying well widths. The optimum well width was 75 angstrom, which resulted in a detection peak at 13 μm and a cutoff wavelength of 15 μm. Dark current measurements of the samples with 15 μm cutoff wavelength show low dark current densities. The dark current characteristics have been investigated as a function of temperature and electron density in the well and compared to a model which takes into account thermionic emission and thermally assisted tunneling. The model is used to extract a saturation velocity of 1.5 x 105 cm/s for electrons. The photoelectron lifetime before recapture has been deduced from this carrier velocity and photoconductive gain measurements. The lifetime is found to be approximately 5 ps. Preliminary focal plane array imaging is demonstrated. [reprint (PDF)]
 
16.  Injector doping level dependent continuous-wave operation of InP-based QCLs at λ~ 7.3 µm above room temperature
J.S. Yu, S. Slivken, and M. Razeghi
Semiconductor Science and Technology (SST), Vol. 25, No. 12, p. 125015-- December 1, 2010 ...[Visit Journal]
We report the continuous-wave (CW) operation of InGaAs/InAlAs quantum cascade lasers (QCLs) operating at λ ~ 7.3 µm above room temperature. The injector doping level–dependent CW characteristics above room temperature are investigated for doping densities between 7 × 1016 cm−3 and 2 × 1017 cm−3. The device performance, i.e. threshold current density, output power, operating temperature and characteristic temperature, depends strongly on the injector doping density. For a relatively low injector doping density of 7 × 1016 cm−3, a high-reflectivity-coated 10 µm wide and 4 mm long laser exhibits an improved device performance with an output power of 152 mW and a threshold current density of 1.37 kA cm−2 at 298 K under CW mode, operating up to 343 K. The thermal characteristics are also analyzed by the estimation from the experimentally measured data for the QCLs with different injector doping densities. [reprint (PDF)]
 
16.  High performance quantum dot-quantum well infrared focal plane arrays
S. Tsao, A. Myzaferi, and M. Razeghi
SPIE Proceedings, San Francisco, CA (January 22-28, 2010), Vol. 7605, p. 76050J-1-- January 27, 2010 ...[Visit Journal]
Quantum dot (QD) devices are a promising technology for high operating temperature detectors. We have studied InAs QDs embedded in an InGaAs/InAlAs quantum well structure on InP substrate for middle wavelength infrared detectors and focal plane arrays (FPAs). This combined dot-well structure has weak dot confinement of carriers, and as a result, the device behavior differs significantly from that in more common dot systems with stronger confinement. We report on our studies of the energy levels in the QDWIP devices and on QD-based detectors operating at high temperature with D* over 1010 cm·Hz½/W at 150 K operating temperature and high quantum efficiency over 50%. FPAs have been demonstrated operating at up to 200 K. We also studied two methods of adapting the QDWIP device to better accommodate FPA readout circuit limitations. [reprint (PDF)]
 
16.  Fabrication of GaN Nanotubular Material using MOCVD with an Aluminium Oxide Membrane
W.G. Jung, S.H. Jung, P. Kung, and M. Razeghi
Nanotechnology 17-- January 1, 2006 ...[Visit Journal]
GaN nanotubular material is fabricated with an aluminium oxide membrane in MOCVD. SEM, XRD, TEM and PL are employed to characterize the fabricated GaN nanotubular material. An aluminium oxide membrane with ordered nanoholes is used as a template. Gallium nitride is deposited at the inner wall of the nanoholes in the aluminium oxide template, and the nanotubular material with high aspect ratio is synthesized using the precursors of TMG and ammonia gas. Optimal synthesis conditions in MOCVD are obtained successfully for the gallium nitride nanotubular material in this research. The diameter of the GaN nanotube fabricated is approximately 200–250 nm and the wall thickness is about 40–50 nm. [reprint (PDF)]
 
16.  Room temperature neagtive differential resistance characteristics of polar III-nitride resonant tunneling diodes
C. Bayram, Z. Vashaei, and M. Razeghi
Applied Physics Letters, Vol. 97, No. 9, p. 092104-1-- August 30, 2010 ...[Visit Journal]
III-nitride resonant tunneling diodes (RTDs), consisting Al0.2Ga0.8N/GaN double-barrier (DB) active layers, were grown on c-plane lateral epitaxial overgrowth (LEO) GaN/sapphire and c-plane freestanding (FS) GaN. RTDs on both templates, fabricated into mesa diameters ranging from 5 to 35 μm, showed negative differential resistance (NDR) at room temperature. NDR characteristics (voltage and current density at NDR onset and current-peak-to-valley ratio) were analyzed and reported as a function of device size and substrate choice. Our results show that LEO RTDs perform as well as FS ones and DB active layer design and quality have been the bottlenecks in III-nitride RTDs. [reprint (PDF)]
 
16.  Recent advances in antimonide-based gap-engineered Type-II superlattices material system for 2 and 3 colors infrared imagers
Manijeh. Razeghi, Abbas Haddadi, Arash Dehzangi, Romain Chevallier, and Thomas Yang
Proceedings of SPIE 10177, Infrared Technology and Applications XLIII, 1017705-- May 9, 2017 ...[Visit Journal]
InAs/InAs1-xSbx/AlAs1-xSbx type-II superlattices (T2SLs) is a system of multi-interacting quantum wells. Since its introduction, this material system has drawn a lot of attention especially for infrared detection. In recent years, InAs/InAs1- xSbx/AlAs1-xSbx T2SL material system has experienced incredible improvements in material quality, device structure designs and device fabrication process which elevated the performances of T2SL-based photodetectors to a comparable level to the state-of-the-art material systems for infrared detection such as Mercury Cadmium Telluride (MCT). In this paper, we will present the current status of InAs/InAs1-xSbx/AlAs1-xSbx T2SL-based photodetectors for detection in different infrared regions, from short-wavelength (SWIR) to long-wavelength (LWIR) infrared, and the future outlook of this material system. [reprint (PDF)]
 
16.  A Crystallographic Model of (00*1) Aluminum Nitride Epitaxial Thin Film Growth on (00*1) Sapphire Substrate
C.J. Sun, P. Kung, A. Saxler, H. Ohsato, M. Razeghi, and K. Haritos
Journal of Applied Physics 75 (8)-- April 15, 1994 ...[Visit Journal]
A direct comparison of the physical properties of GaN thin films is made as a function of the choice of substrate orientations. Gallium nitride single crystals were grown on (0001) and (011-bar 2) sapphire substrates by metalorganic chemical vapor deposition. Better crystallinity with fine ridgelike facets is obtained on the (011-bar 2) sapphire. Also lower carrier concentration and higher mobilities indicate both lower nitrogen vacancies and less oxygen incorporation on the (011-bar 2) sapphire. The results of this study show better physical properties of GaN thin films achieved on (011-bar 2) sapphire. [reprint (PDF)]
 
16.  Mid-wavelength infrared heterojunction phototransistors based on type-II InAs/AlSb/GaSb superlattices
A. Haddadi, S. Adhikary, A. Dehzangi, and M. Razeghi
Applied Physics Letters 109, 021107-- July 12, 2016 ...[Visit Journal]
A mid-wavelength infrared heterojunction phototransistor based on type-II InAs/AlSb/GaSb superlattices on GaSb substrate has been demonstrated. Near a wavelength of 4 μm saturated optical gains of 668 and 639 at 77 and 150 K, respectively, are demonstrated over a wide dynamic range. At 150 K, the unity optical gain collector dark current density and DC current gain are 1 × 10−3 A/cm² and 3710, respectively. This demonstrates the potential for use in high-speed applications. In addition, the phototransistor exhibits a specific detectivity value that is four times higher compared with a state-of-the-art type-II superlattice-based photodiode with a similar cut-off wavelength at 150 K. [reprint (PDF)]
 
16.  High-speed free-space optical communications based on quantum cascade lasers and type-II superlattice detectors
Stephen M. Johnson; Emily Dial; M. Razeghi
Proc. SPIE 11288, Quantum Sensing and Nano Electronics and Photonics XVII, 1128814-- January 31, 2020 ...[Visit Journal]
Free-space optical communications (FSOC) is a promising avenue for point-to-point, high-bandwidth, and high-security communication links. It has the potential to solve the “last mile” problem modern communication systems face, allowing for high-speed communication links without the expensive and expansive infrastructure required by fiber optic and wireless technologies 1 . Although commercial FSOC systems currently exist, due to their operation in the near infrared and short infrared ranges, they are necessarily limited by atmospheric absorption and scattering losses 2 . Mid-infrared (MWIR) wavelengths are desirable for free space communications systems because they have lower atmospheric scattering losses compared to near-infrared communication links. This leads to increased range and link uptimes. Since this portion of the EM spectrum is unlicensed, link establishment can be implemented quickly. Quantum cascade lasers (QCL) are ideal FSOC transmitters because their emission wavelength is adjustable to MWIR 3 . Compared to the typical VCSEL and laser diodes used in commercial NIR and SWIR FSOC systems, however, they require increased threshold and modulation currents 4 . Receivers based on type-II superlattice (T2SL) detectors are desired in FSOC for their low dark current, high temperature operation, and band gap tunable to MWIR 5. In this paper, we demonstrate the implementation of a high-speed FSOC system using a QCL and a T2SL detector. [reprint (PDF)]
 
16.  High-Average-Power, High-Duty-Cycle (~6 μm) Quantum Cascade Lasers
S. Slivken, A. Evans, J. David, and M. Razeghi
Virtual Journal of Nanoscience & Technology 9-- December 9, 2002 ...[Visit Journal][reprint (PDF)]
 
16.  Thermal characteristics and analysis of quantum cascade lasers for biochemical sensing applications
J.S. Yu, H.K. Lee, S. Slivken, and M. Razeghi
SPIE Proceedings, Biosensing II, San Diego, CA (August 2-6, 2009), Vol. 7397, p. 739705-1-- August 2, 2009 ...[Visit Journal]
We studied the thermal characteristics and analysis of InGaAs/InAlAs quantum cascade lasers (QCLs) in terms of internal temperature distribution, heat flux, and thermal conductance from the heat transfer simulation. The heat source densities were obtained from threshold power densities measured experimentally for QCLs under room-temperature continuous-wave operation. The use of a thick electroplated Au around the laser ridges helps increase the heat removal from devices. The two-dimensional anisotropic heat dissipation model was used to analyze the thermal behaviors inside the device. The simulation results were also compared with those estimated from experimental data. [reprint (PDF)]
 

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