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| 2. | Reliability of Aluminum-Free 808 nm High-Power Laser Diodes with Uncoated Mirrors I. Eliashevich, J. Diaz, H. Yi, L. Wang, and M. Razeghi Applied Physics Letters 66 (23)-- June 5, 1995 ...[Visit Journal] The reliability of uncoated InGaAsP/GaAs high‐power diode lasers emitting at 808 nm wavelength has been studied. 47 W of quasicontinuous wave output power (pulse width 200 μs, frequency 20 Hz) have been obtained from a 1 cm wide laser bar. A single‐stripe diode without mirror coating has been life tested at 40 °C for emitting power of 800 mW continuous wave (cw) and showed no noticeable degradation and no change of the lasing wavelength after 6000 h of operation. [reprint (PDF)] |
| 2. | Buried heterostructure quantum cascade lasers with high continuous-wave wall plug efficiency A. Evans, S.R. Darvish, S. Slivken, J. Nguyen, Y. Bai and M. Razeghi Applied Physics Letters, Vol. 91, No. 7, p. 071101-1-- August 13, 2007 ...[Visit Journal] The authors report on the development of ~4.7 µm strain-balanced InP-based quantum cascade lasers with high wall plug efficiency and room temperature continuous-wave operation. The use of narrow-ridge buried heterostructure waveguides and thermally optimized packaging is presented. Over 9.3% wall plug efficiency is reported at room temperature from a single device producing over 0.675 W of continuous-wave output power. Wall plug efficiencies greater than 18% are also reported for devices at a temperature of 150 K, with continuous-wave output powers of more than 1 W. [reprint (PDF)] |
| 2. | Fabrication of GaN Nanotubular Material using MOCVD with an Aluminium Oxide Membrane W.G. Jung, S.H. Jung, P. Kung, and M. Razeghi Nanotechnology 17-- January 1, 2006 ...[Visit Journal] GaN nanotubular material is fabricated with an aluminium oxide membrane in MOCVD. SEM, XRD, TEM and PL are employed to characterize the fabricated GaN nanotubular material. An aluminium oxide membrane with ordered nanoholes is used as a template. Gallium nitride is deposited at the inner wall of the nanoholes in the aluminium oxide template, and the nanotubular material with high aspect ratio is synthesized using the precursors of TMG and ammonia gas. Optimal synthesis conditions in MOCVD are obtained successfully for the gallium nitride nanotubular material in this research. The diameter of the GaN nanotube fabricated is approximately 200–250 nm and the wall thickness is about 40–50 nm. [reprint (PDF)] |
| 2. | High performance InGaAs/InGaP quantum dot infrared photodetector achieved through doping level optimization S. Tsao, K. Mi, J. Szafraniec, W. Zhang, H. Lim, B. Movaghar, and M. Razeghi SPIE Conference, Jose, CA, Vol. 5732, pp. 334-- January 22, 2005 ...[Visit Journal] We report an InGaAs/InGaP/GaAs quantum dot infrared photodetector grown by metalorganic chemical vapor deposition with detectivity of 1.3x1011 cm·Hz½/W at 77K and 1.2x1010 ccm·Hz½/W at 120K. Modeling of the Quantum dot energy levels showed us that increased photoresponse could be obtained by doping the quantum dots to 4 electrons per dot instead of the usual 2 electrons per dot. This happens because the primary photocurrent transition is from the first excited state to a higher excited state. Increasing the quantum doping in our device yielded significant responsivity improvement and much higher detectivity as a result. This paper discusses the performance of this higher doping device and compares it to our previously reported device with lower doping. [reprint (PDF)] |
| 2. | Photonic crystal distributed feedback quantum cascade lasers with 12 W output power Y. Bai, B. Gokden, S.R. Darvish, S. Slivken, and M. Razeghi Applied Physics Letters, Vol. 95, No. 3-- July 20, 2009 ...[Visit Journal] We demonstrate room temperature, high power, and diffraction limited operation of photonic crystal distributed feedback (PCDFB) quantum cascade lasers emitting around 4.7 µm. PCDFB gratings with three distinctive periods are fabricated on the same wafer. Peak output power up to 12 W is demonstrated. Lasers with different periods show expected wavelength shifts according to the design. Dual mode spectra are attributed to a purer index coupling by putting the grating layer 100 nm away from the laser core. Single lobed diffraction limited far field profiles are observed. [reprint (PDF)] |
| 2. | QEPAS based ppb-level detection of CO and N2O using a high power CW DFB-QCL Y. Ma, R. Lewicki, M. Razeghi and F. Tittel Optics Express, Vol. 21, No. 1, p. 1008-- January 14, 2013 ...[Visit Journal] An ultra-sensitive and selective quartz-enhanced photoacoustic spectroscopy (QEPAS) sensor platform was demonstrated for detection of carbon monoxide (CO) and nitrous oxide (N2O). This sensor used a stateof-the art 4.61 μm high power, continuous wave (CW), distributed feedback quantum cascade laser (DFB-QCL) operating at 10°C as the excitation source. For the R(6) CO absorption line, located at 2169.2 cm−1, a minimum detection limit (MDL) of 1.5 parts per billion by volume (ppbv) at atmospheric pressure was achieved with a 1 sec acquisition time and the addition of 2.6% water vapor concentration in the analyzed gas mixture. For the N2O detection, a MDL of 23 ppbv was obtained at an optimum gas pressure of 100 Torr and with the same water vapor content of 2.6%. In both cases the presence of water vapor increases the detected CO and N2O QEPAS signal levels as a result of enhancing the vibrational-translational relaxation rate of both target gases. Allan deviation analyses were performed to investigate the long term performance of the CO and N2O QEPAS sensor systems. For the optimum data acquisition time of 500 sec a MDL of 340 pptv and 4 ppbv was obtained for CO and N2O detection,respectively. To demonstrate reliable and robust operation of the QEPAS sensor a continuous monitoring of atmospheric CO and N2O concentration levels for a period of 5 hours were performed. [reprint (PDF)] |
| 2. | Bias-selectable three-color short-, extended-short-, and mid-wavelength infrared photodetectors based on type-II InAs/GaSb/AlSb superlattices Abbas Haddadi, and Manijeh Razeghi Optics Letters Vol. 42, Iss. 21, pp. 4275-4278-- October 16, 2017 ...[Visit Journal] A bias-selectable, high operating temperature, three-color short-, extended-short-, and mid-wavelength infrared photodetector based on InAs/GaSb/AlSb type-II superlattices on GaSb substrate has been demonstrated. The short-, extended-short-, and mid-wavelength channels’ 50% cutoff wavelengths were 2.3, 2.9, and 4.4μm, respectively, at 150K. The mid-wavelength channel exhibited a saturated quantum efficiency of 34% at 4μm under +200 mV bias voltage in a front-side illumination configuration and without any antireflection coating. At 200mV, the device exhibited a dark current density of 8.7×10−5 A/cm2 providing a specific detectivity of ∼2×1011 cm·Hz1/2/W at 150K. The short-wavelength channel achieved a saturated quantum efficiency of 20% at 1.8μm. At −10 mV, the device’s dark current density was 5.5×10−8 A/cm2. At zero bias, its specific detectivity was 1×1011 cm·Hz1/2/W at 150K. The extended short-wavelength channel achieved a saturated quantum efficiency of 22% at 2.75 μm. Under −2 V bias voltage, the device exhibited a dark current density of 1.8×10−6 A/cm2 providing a specific detectivity of 6.3×1011 cm·Hz1/2/W at 150K. [reprint (PDF)] |
| 2. | Fabrication of 12 µm pixel-pitch 1280 × 1024 extended short wavelength infrared focal plane array using heterojunction type-II superlattice-based photodetector Arash Dehzangi , Abbas Haddadi, Romain Chevallier, Yiyun Zhang and Manijeh Razegh Semicond. Sci. Technol. 34, 03LT01-- February 4, 2019 ...[Visit Journal] We present an initial demonstration of a 1280 × 1024 extended short-wavelength infrared focal plane array (FPA) imager with 12μm pixel-pitch based on type–II InAs/AlSb/GaSb superlattice heterojunction photodetectors, with a novel bandstructure-engineered photo-generated carrier extractor as the window layer in the hetero structure to efficiently extract the photo-generated carriers. This heterostructure with a larger bandgap top window/contact layer leads to the device having lower dark current density compared to conventional pn junction devices. The large format FPA was fabricated with 12 μm pixel-pitch using a developed fabrication process. Test pixels fabricated separately exhibit 100% cut–off wavelengths of ∼2.22, ∼2.34μm, and ∼2.45μm at 150, 200K, and 300K. The test devices achieve saturated quantum efficiency values under zero bias of 54.3% and 68.4% at 150 and 300K, under back-side illumination and without any anti-reflection coating. At 150K, these photodetectors exhibit dark current density of 1.63 × 10−7 A·cm−2 under −20mV applied bias providing a specific detectivity of 1.01 × 1011 cm ·Hz½/W at 1.9μm. [reprint (PDF)] |
| 2. | Roadmap of Semiconductor Infrared Lasers and Detectors for the 21st Century M. Razeghi SPIE Conference, San Jose, CA, -- January 27, 1999 ...[Visit Journal] Since the first discovery, semiconductor infrared lasers and detectors have found many various applications in military, communications, medical, and industry sections. In this paper, the current status of semiconductor infrared lasers and detectors will be reviewed. Advantages and disadvantages of different methods and techniques is discussed later. Some basic physical limitations of current technology are studied and the direction to overcome these problems will be suggested. [reprint (PDF)] |
| 2. | Dark current suppression in Type-II InAs/GaSb superlattice long wavelength infrared photodiodes with M-structure barrier B.M. Nguyen, D. Hoffman, P.Y. Delaunay, and M. Razeghi Applied Physics Letters, Vol. 91, No. 16, p. 163511-1-- October 15, 2007 ...[Visit Journal] We presented an alternative design of Type-II superlattice photodiodes with the insertion of a mid-wavelength infrared M-structure AlSb/GaSb/InAs/GaSb/AlSb superlattice for the reduction of dark current. The M-structure superlattice has a larger carrier effective mass and a greater band discontinuity as compared to the standard Type-II superlattices at the valence band. It acts as an effective medium that weakens the diffusion and tunneling transport at the depletion region. As a result, a 10.5 µm cutoff Type-II superlattice with 500 nm M-superlattice barrier exhibited a R0A of 200 cm2 at 77 K, approximately one order of magnitude higher than the design without the barrier. The quantum efficiency of such structures does not show dependence on either barrier thickness or applied bias. [reprint (PDF)] |
| 2. | Continuous wave, room temperature operation of λ ~ 3μm quantum cascade laser N. Bandyopadhyay, Y. Bai, S. Tsao, S. Nida, S. Slivken and M. Razeghi SPIE Proceedings, Vol. 8631, p. 86310M-1, Photonics West, San Francisco, CA-- February 3, 2013 ...[Visit Journal] Quantum Cascade Lasers (QCLs), operating in continuous wave (CW) at room temperature(RT) in 3-3.5 μm spectral range, which overlaps the spectral fingerprint region of many hydrocarbons, is essential in spectroscopic trace gas detection, environment monitoring, and pollution control. A
3 μm QCL, operating in CW at RT is demonstrated. This initial result makes it possible, for the most
popular material system (AlInAs/GaInAs on InP) used in QCLs in mid-infrared and long-infrared, to cover the entire spectral range of mid-infrared atmospheric window (3-5 μm).
In0.79Ga0.21As/In0.11Al0.89As strain balanced superlattice, which has a large conduction band offset, was grown. The strain was balanced with composite barriers (In0.11Al0.89As /In0.4Al0.6As) in the injector region, to eliminate the need of extremely high compressively strained GaInAs, whose pseudomorphic growth is very difficult. [reprint (PDF)] |
| 2. | High Carrier Lifetime InSb Grown on GaAs Substrates E. Michel, H. Mohseni, J.D. Kim, J. Wojkowski, J. Sandven, J. Xu, M. Razeghi, R. Bredthauer, P. Vu, W. Mitchel, and M. Ahoujja Applied Physics Letters 71 (8-- August 25, 1997 ...[Visit Journal] We report on the growth of near bulklike InSb on GaAs substrates by molecular beam epitaxy despite the 14% lattice mismatch between the epilayer and the substrate. Structural, electrical, and optical properties were measured to assess material quality. X-ray full widths at half-maximum were as low as 55 arcsec for a 10 µm epilayer, peak mobilities as high as ~ 125 000 cm2/V s, and carrier lifetimes up to 240 ns at 80 K. [reprint (PDF)] |
| 2. | High-Performance Focal Plane Arrays Based on InAs-GaSb Superlattices with a 10-micron Cutoff Wavelegth P.Y. Delaunay, B.M. Nguyen, D. Hoffman and M. Razeghi IEEE Journal of Quantum Electronics, Vol. 44, No. 5, p. 462-467-- May 1, 2008 ...[Visit Journal] We report on the demonstration of a focal plane array based on Type-II InAs/GaSb superlattices grown on N-type GaSb substrate with a 50%-cutoff wavelength at 10 μm. The surface leakage occurring after flip-chip bonding and underfill in the Type-II devices was suppressed using a double heterostructure design. The R0A of diodes passivated with SiO2 was 23 Ω·cm2 after underfill. A focal plane array hybridized to an Indigo readout integrated circuit demonstrated a noise equivalent temperature difference of 33 mK at 81 K, with an integration time of 0.23 ms. [reprint (PDF)] |
| 2. | High Quality Type-II InAs/GaSb Superlattices with Cutoff Wavelength ~3.7 µm Using Interface Engineering Y. Wei, J. Bae, A. Gin, A. Hood, M. Razeghi, G.J. Brown, and M. Tidrow Journal of Applied Physics, 94 (7)-- October 1, 2003 ...[Visit Journal] We report the most recent advance in the area of Type-II InAs/GaSb superlattices that have cutoff wavelength of ~3.7 µm. With GaxIn1–x type interface engineering techniques, the mismatch between the superlattices and the GaSb (001) substrate has been reduced to <0.1%. There is no evidence of dislocations using the best examination tools of x-ray, atomic force microscopy, and transmission electron microscopy. The full width half maximum of the photoluminescence peak at 11 K was ~4.5 meV using an Ar+ ion laser (514 nm) at fluent power of 140 mW. The integrated photoluminescence intensity was linearly dependent on the fluent laser power from 2.2 to 140 mW at 11 K. The temperature-dependent photoluminescence measurement revealed a characteristic temperature of one T1 = 245 K at sample temperatures below 160 K with fluent power of 70 mW, and T1 = 203 K for sample temperatures above 180 K with fluent power of 70 and 420 mW. [reprint (PDF)] |
| 2. | Room temperature continuous wave operation of λ ~ 3-3.2 μm quantum cascade lasers N. Bandyopadhyay, Y. Bai, S. Tsao, S. Nida, S. Slivken and M. Razeghi Applied Physics Letters, Vol. 101, No. 24, p. 241110-1-- December 10, 2012 ...[Visit Journal] We demonstrate quantum cascade lasers emitting at wavelengths of 3–3.2 μm in the InP-based material system. The laser core consists of GaInAs/AlInAs using strain balancing technique. In room temperature pulsed mode operation, threshold current densities of 1.66 kA∕cm² and 1.97 kA∕cm², and characteristic temperatures (T0) of 108 K and 102 K, are obtained for the devices emitting at 3.2 μm and 3 μm, respectively. Room temperature continuous wave operation is achieved at both wavelengths. [reprint (PDF)] |
| 2. | Room temperature single-mode terahertz sources based on intracavity difference-frequency generation in quantum cascade lasers Q.Y. Lu, N. Bandyopadhyay, S. Slivken, Y. Bai and M. Razeghi Applied Physics Letters, Vol. 99, Issue 13, p. 131106-1-- September 26, 2011 ...[Visit Journal] We demonstrate room temperature single-mode THz emission at 4 THz based on intracavity difference-frequency generation from mid-infrared dual-wavelength quantum cascade lasers. An integrated dual-period distributed feedback grating is defined on the cap layer to purify both mid-infrared pumping wavelengths and in turn the THz spectra. Single mode operation of the pumping wavelengths results in a single-mode THz operation with a narrow linewidth of 6.6 GHz. A maximum THz power of 8.5 μW with a power conversion efficiency of 10 μW/W² is obtained at room temperature. [reprint (PDF)] |
| 2. | High-speed free-space optical communications based on quantum cascade lasers and type-II superlattice detectors Stephen M. Johnson; Emily Dial; M. Razeghi Proc. SPIE 11288, Quantum Sensing and Nano Electronics and Photonics XVII, 1128814-- January 31, 2020 ...[Visit Journal] Free-space optical communications (FSOC) is a promising avenue for point-to-point, high-bandwidth, and high-security communication links. It has the potential to solve the “last mile” problem modern communication systems face, allowing for high-speed communication links without the expensive and expansive infrastructure required by fiber optic and
wireless technologies 1 . Although commercial FSOC systems currently exist, due to their operation in the near infrared and short infrared ranges, they are necessarily limited by atmospheric absorption and scattering losses 2 . Mid-infrared (MWIR) wavelengths are desirable for free space communications systems because they have lower atmospheric scattering losses compared to near-infrared communication links. This leads to increased range and link uptimes. Since this portion of the EM spectrum is unlicensed, link establishment can be implemented quickly. Quantum cascade lasers
(QCL) are ideal FSOC transmitters because their emission wavelength is adjustable to MWIR 3 . Compared to the typical VCSEL and laser diodes used in commercial NIR and SWIR FSOC systems, however, they require increased threshold and modulation currents 4 . Receivers based on type-II superlattice (T2SL) detectors are desired in FSOC for their low
dark current, high temperature operation, and band gap tunable to MWIR 5. In this paper, we demonstrate the implementation of a high-speed FSOC system using a QCL and a T2SL detector. [reprint (PDF)] |
| 2. | InAs/InAs1-xSbx type-II superlattices for high performance long wavelength infrared detection M. Razeghi, A. Haddadi, A. M. Hoang, R. Chevallier, S. Adhikary, A. Dehzangi Proc. SPIE 9819, Infrared Technology and Applications XLII, 981909-- May 20, 2016 ...[Visit Journal] We report InAs/InAs1-xSbx type-II superlattice base photodetector as high performance long-wavelength infrared nBn device grown on GaSb substrate. The device has 6 μm-thick absorption region, and shows optical performance with a peak responsivity of 4.47 A/W at 7.9 μm, which is corresponding to the quantum efficiency of 54% at a bias voltage of negative 90 mV, where no anti-reflection coating was used for front-side illumination. At 77K, the photodetector’s 50% cut-off wavelength was ~10 μm. The device shows the detectivity of 2.8x1011 cm•Hz½/W at 77 K, where RxA and dark current density were 119 Ω•cm² and 4.4x10-4 A/cm² , respectively, under -90 mV applied bias voltage [reprint (PDF)] |
| 2. | Highly selective two-color mid-wave and long-wave infrared detector hybrid based on Type-II superlattices E.K. Huang, M.A. Hoang, G. Chen, S.R. Darvish, A. Haddadi, and M. Razeghi Optics Letters, Vol. 37, No. 22, p. 4744-4746-- November 15, 2012 ...[Visit Journal] We report a two-color mid-wave infrared (MWIR) and long-wave infrared (LWIR) co-located detector with 3 μm active region thickness per channel that is highly selective and can perform under high operating temperatures for the MWIR band. Under back-side illumination, a temperature evolution study of the MWIR detector’s electro-optical performance found the 300 K background-limit with 2π field-of-view to be achieved below operating temperatures of 160 K, at which the temperature’s 50% cutoff wavelength was 5.2 μm. The measured current reached the system limit of 0.1 pA at 110 K for 30 μm pixel-sized diodes. At 77 K, where the LWIR channel operated with a 50% cutoff wavelength at 11.2 μm, an LWIR selectivity of ∼17% was achieved in the MWIR wave band between 3 and 4.7 μm, making the detector highly selective. [reprint (PDF)] |
| 2. | InSb Infrared Photodetectors on Si Substrates Grown by Molecular Beam Epitaxy E. Michel, J. Xu, J.D. Kim, I. Ferguson, and M. Razeghi IEEE Photonics Technology Letters 8 (5) pp. 673-- May 1, 1996 ...[Visit Journal] The InSb infrared photodetectors grown heteroepitaxially on Si substrates by molecular beam epitaxy (MBE) are reported. Excellent InSb material quality is obtained on 3-in Si substrates (with a GaAs predeposition) as confirmed by structural, optical, and electrical analysis. InSb infrared photodetectors on Si substrates that can operate from 77 K to room temperature have been demonstrated. The peak voltage-responsitivity at 4 μm is about 1.0×103 V/W and the corresponding Johnson-noise-limited detectivity is calculated to be 2.8×1010 cm·Hz½/W. This is the first important stage in developing InSb detector arrays or monolithic focal plane arrays (FPAs) on silicon. The development of this technology could provide a challenge to traditional hybrid FPA's in the future. [reprint (PDF)] |
| 2. | High Power Quantum Cascade Lasers (QCLs) Grown by GasMBE M. Razeghi and S. Slivken SPIE Proceedings, International Conference on Solid State Crystals (ICSSC), Zakopane, Poland, -- October 14, 2002 ...[Visit Journal] This paper is a brief summary of the technological development and state-of-the-art performance of quantum cascade lasers produced at the Centre for Quantum Devices. Laser design will be discussed, as well as experimental details of device fabrication. Recent work has focused on the development of high peak and average power QCLs emitting at room temperature and above. Scaling of the output is demonstrated by increasing the number of emitting regions in the waveguide core. At λ = 9 µm, over 7 W of peak power has been demonstrated at room temperature for a single diode, with an average power of 300 mW at 6% duty cycle. At shorter wavelengths, laser development includes the use of highly strain-balanced heterostructures in order to maintain a high conduction band offset and minimize leakage current. At λ = 6 µm, utilizing a high reflective coating and epilayer-down mounting of the laser, we have demonstrated 225 mW of average power from a single facet at room temperature. Lastly, these results are put in perspective of other reported results and possible future directions are discussed.
[reprint (PDF)] |
| 2. | Interface roughness scattering in thin, undoped GaInP/GaAs quantum wells W. C. Mitchel, G.J. Brown, I. Lo, S. Elhamri, M. Aboujja, K. Ravindran, R.S. Newrock, M. Razeghi, and X. He Applied Physics Letters 65 (12)-- September 19, 1994 ...[Visit Journal] Electronic transport properties of very thin undoped GaInP/GaAs quantum wells have been measured by temperature dependent low field Hall effect and by Shubnikov–de Haas effect. Strong Shubnikov–de Haas oscillations were observed after increasing the electron concentration via the persistent photocurrent effect. Low temperature mobilities of up to 70 ,000 cm²/V· s at carrier concentrations of 6.5×1011 cm−2 were observed in a 20 Å quantum well. The results are compared with the theory of interface roughness scattering which indicates extremely smooth interfaces; however, discrepancies between experiment and theory are observed. [reprint (PDF)] |
| 2. | Anomalous Hall Effect in InSb Layers Grown by MOCVD on GaAs Substrates C. Besikci, Y.H. Choi, R. Sudharsanan, and M. Razeghi Journal of Applied Physics 73 (10)-- May 15, 1993 ...[Visit Journal] InSb epitaxial layers have been grown on GaAs substrates by low‐pressure metalorganic chemical vapor deposition. A 3.15 μm thick film yielded an x‐ray full width at half maximum of 171 arcsec. A Hall mobility of 76 200 cm²/V· s at 240 K and a full width at half maximum of 174 arcsec have been measured for a 4.85 μm thick epilayer. Measured Hall data have shown anomalous behavior. A decrease in Hall mobility with decreasing temperature has been observed and room‐temperature Hall mobility has increased with thickness. In order to explain the anomalous Hall data, and the thickness dependence of the measured parameters, the Hall coefficient and Hall mobility have been simulated using a three‐layer model including a surface layer, a bulklike layer, and an interface layer with a high density of defects. Theoretical analysis has shown that anomalous behavior can be attributed to donor-like defects caused by the large lattice mismatch and to a surface layer which dominates the transport in the material at low temperatures. [reprint (PDF)] |
| 2. | High Power, Continuous-Wave, Quantum Cascade Lasers for MWIR and LWIR Applications S. Slivken, A. Evans, J.S. Yu, S.R. Darvish and M. Razeghi SPIE Conference, San Jose, CA, Vol. 6127, pp. 612703-- January 23, 2006 ...[Visit Journal] Over the past several years, our group has endeavored to develop high power quantum cascade lasers for a variety of remote and high sensitivity infrared applications. The systematic optimization of laser performance has allowed for demonstration of high power, continuous-wave quantum cascade lasers operating above room temperature. Since 2002, the power levels for individual devices have jumped from 20 mW to 600 mW. Expanding on this development, we have able to demonstrate continuous wave operation at many wavelengths throughout the mid- and far-infrared spectral range, and have now achieved >100 mW output in the 4.0 to 9.5 µm range. [reprint (PDF)] |
| 2. | Near milliwatt power AlGaN-based ultraviolet light emitting diodes based on lateral epitaxial overgrowth of AlN on Si(111) Y. Zhang, S. Gautier, C. Cho, E. Cicek, Z, Vashaei, R. McClintock, C. Bayram, Y. Bai and M. Razeghi Applied Physics Letters, Vol. 102, No. 1, p. 011106-1-- January 7, 2013 ...[Visit Journal] We report on the growth, fabrication, and device characterization of AlGaN-based thin-film ultraviolet (UV) (λ ∼ 359 nm) light emitting diodes (LEDs). First, AlN/Si(111) template is patterned. Then, a fully coalesced 7-μm-thick lateral epitaxial overgrowth (LEO) of AlN layer is realized on patterned AlN/Si(111) template followed by UV LED epi-regrowth. Metalorganic chemical vapor deposition is employed to optimize LEO AlN and UV LED epitaxy. Back-emission UV LEDs are fabricated and flip-chip bonded to AlN heat sinks followed by Si(111) substrate removal. A peak pulsed power and slope efficiency of ∼0.6 mW and ∼1.3 μW/mA are demonstrated from these thin-film UV LEDs, respectively. For comparison, top-emission UV LEDs are fabricated and back-emission LEDs are shown to extract 50% more light than top-emission ones. [reprint (PDF)] |
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