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2.  A Review of III-Nitride Research at the Center for Quantum Devices
M. Razeghi and R. McClintock
Journal of Crystal Growth, Vol. 311, No. 10-- May 1, 2009 ...[Visit Journal]
In this paper, we review the history of the Center for Quantum Devices’ (CQD) III-nitride research covering the past 15 years. We review early work developing III-nitride material growth. We then present a review of laser and light-emitting diode (LED) results covering everything from blue lasers to deep UV LEDs emitting at 250 nm. This is followed by a discussion of our UV photodetector research from early photoconductors all the way to current state of the art Geiger-mode UV single photon detectors. [reprint (PDF)]
 
2.  Quantum Devices Based on Modern Band Structure Engineering and Epitaxial Technology
M. Razeghi
Modern Physics Letters B, Vol. 22, No. 24, p. 2343-2371-- September 20, 2008 ...[Visit Journal]
Modern band structure engineering is based both on the important discoveries of the past century and modern epitaxial technology. The general goal is to control the behavior of charge carriers on an atomic scale, which affects how they interact with each other and their environment. Starting from the basic semiconductor heterostructure, band structure engineering has evolved into a powerful discipline, employing lower dimensionality to demonstrate new material properties. Several modern technologies under development are used as examples of how this discipline is enabling new types of devices and new functionality in areas with immediate application.
 
2.  High-Average-Power, High-Duty-Cycle (~6 μm) Quantum Cascade Lasers
S. Slivken, A. Evans, J. David, and M. Razeghi
Applied Physics Letters, 81 (23)-- December 2, 2002 ...[Visit Journal]
High-power quantum cascade lasers emitting at λ = 6.1  μm are demonstrated. Accurate control of growth parameters and strain balancing results in a near-perfect lattice match, which leads to excellent material quality. Excellent peak power for uncoated lasers, up to 1.5 W per facet for a 21 μm emitter width, is obtained at 300 K for 30 period structures. The threshold current density at 300 K is only 2.4 kA/cm². From 300 to 425 K, the laser exhibits a characteristic temperature T0 of 167 K. Next, Y2O3/Ti/Au mirror coatings were deposited on 1.5 mm cavities and mounted epilayer down. These lasers show an average output power of up to 225 mW at 17% duty cycle, and still show 8 mW average power at 45% duty cycle. [reprint (PDF)]
 
2.  Modeling Type-II InAs/GaSb Superlattices Using Empirical Tight-Binding Method: New Aspects
Y. Wei, M. Razeghi, G.J. Brown, and M.Z. Tidrow
SPIE Conference, Jose, CA, Vol. 5359, pp. 301-- January 25, 2004 ...[Visit Journal]
The recent advances in the experimental work on the Type-II InAs/GaSb superlattices necessitate a modeling that can handle arbitrary layer thickness as well as different types of interfaces in order to guide the superlattice design. The empirical tight-binding method (ETBM) is a very good candidate since it builds up the Hamiltonian atom by atom. There has been a lot of research work on the modeling of Type-II InAs/GaSb superlattices using the ETBM. However, different groups generate very different accuracy comparing with experimental results. We have recently identified two major aspects in the modeling: the antimony segregation and the interface effects. These two aspects turned out to be of crucial importance governing the superlattice properties, especially the bandgap. We build the superlattice Hamiltonian using antimony segregated atomic profile taking into account the interface. Our calculations agree with our experimental results within growth uncertainties. In addition we introduced the concept of GaxIn1-x type interface engineering, which will add another design freedom especially in the mid-wavelength infrared range (3~7 µm) in orderto reduce the lattice mismatch. [reprint (PDF)]
 
2.  A lifetime of contributions to the world of semiconductors using the Czochralski invention
M. Razeghi
Vacuum Vol. 9934, 993406-1-- February 8, 2017 ...[Visit Journal]
Over the course of my career, I have made numerous contributions related to semiconductor crystal growth and high performance optoelectronics over a vast region of the electromagnetic spectrum (ultraviolet to terahertz). In 2016 this cumulated in my receiving the Jan Czochralski Gold Medal award from the European Materials Research Society. This article is designed to provide a historical perspective and general overview of these scientific achievements, on the occasion of being honored by this award. These achievements would not have been possible without high quality crystalline substrates, and this article is written in honor of Jan Czochralski on the 100th anniversary of his important discovery. [reprint (PDF)]
 
2.  Investigation of Enhanced Heteroepitaxy and Electrical Properties in k-Ga2O3 due to Interfacing with β-Ga2O3 Template Layers
Junhee Lee, Lakshay Gautam, Ferechteh H. Teherani, Eric V. Sandana, P. Bove, David J. Rogers and Manijeh Razeghi
J. Lee, M. Razeghi, Physica Status Solidi A 2023,220, 2200559, https://doi.org/10.1002/pssa.202200559 ...[Visit Journal]
Heteroepitaxial k-Ga2O3 films grown by metal-organic chemical vapor deposition (MOCVD) were found to have superior materials and electrical properties thanks to the interfacing with a b-Ga2O3 template layer. k-Ga2O3grown on sapphire has not been able to demonstrate its full potential due to materials imperfections created by strain induced by the lattice mismatch at the interface between the epilayer and the substrate. By adopting a b-Ga2O3 template on a c-sapphire substrate, higher quality k-Ga2O3thin films were obtained, as evidenced by a smoother surface morphology, narrower XRD peaks, and superior electrical performance. The implications of this phenomenon, caused by b-Ga2O3 buffer layer, are already very encouraging for both boosting current device performance and opening up the perspective of novel applications for Ga2O3. [reprint (PDF)]
 
2.  Recent advances in IR semiconductor laser diodes and future trends
M. Razeghi; Y. Bai; N. Bandyopadhyay; B. Gokden; Q.Y. Lu; S. Slivken
Photonics Society Summer Topical Meeting Series, IEEE [6000041], pp. 55-56 (2011)-- July 18, 2011 ...[Visit Journal]
The wall plug efficiency of the mid-infrared quantum cascade laser in room temperature continuous wave (cw) operation is brought to 21%, with a maximum output power of 5.1 W. Using a surface grating distributed feedback (DFB) approach, we demonstrated 2.4 W single mode output in room temperature cw operation. With a photonic crystal distributed feedback (PCDFB) design, we achieved single mode spectrum and close to diffraction limited far field with a room temperature high peak power of 34 W. [reprint (PDF)]
 
2.  Future of AlxGa1-xN Materials and Device Technology for Ultraviolet Photodetectors
P. Kung, A. Yasan, R. McClintock, S. Darvish, K. Mi, and M. Razeghi
SPIE Conference, San Jose, CA, Vol. 4650, pp. 199-- May 1, 2002 ...[Visit Journal]
Design of the photodetector structure is one of the key issues in obtaining high performance devices; especially the thickness of the intrinsic region for p-i-n photodiodes is a crucial value and needs to be optimized. We compare the performance of the p-i-n photodiodes with different widths for the depletion region, which shows a trade-off between speed and responsivity of the devices. [reprint (PDF)]
 
2.  Investigation of impurities in type-II InAs/GaSb superlattices via capacitance-voltage measurement
G. Chen, A. M. Hoang, S. Bogdanov, A. Haddadi, P. R. Bijjam, B.-M. Nguyen, and M. Razeghi
Applied Physics Letters 103, 033512 (2013)-- July 17, 2013 ...[Visit Journal]
Capacitance-voltage measurement was utilized to characterize impurities in the non-intentionally doped region of Type-II InAs/GaSb superlattice p-i-n photodiodes. Ionized carrier concentration versus temperature dependence revealed the presence of a kind of defects with activation energy below 6 meV and a total concentration of low 1015 cm−3. Correlation between defect characteristics and superlattice designs was studied. The defects exhibited a p-type behavior with decreasing activation energy as the InAs thickness increased from 7 to 11 monolayers, while maintaining the GaSb thickness of 7 monolayers. With 13 monolayers of InAs, the superlattice became n-type and the activation energy deviated from the p-type trend. [reprint (PDF)]
 
2.  High Detectivity InGaAs/InGaP Quantum-Dot Infrared Photodetectors Grown by Low Pressure Metalorganic Chemical Vapor Deposition
J. Jiang, S. Tsao, T. O'Sullivan, W. Zhang, H. Lim, T. Sills, K. Mi, M. Razeghi, G.J. Brown, and M.Z. Tidrow
Applied Physics Letters, 84 (12)-- April 22, 2004 ...[Visit Journal]
We report a high detectivity middle-wavelength infrared quantum dot infrared photodetector (QDIP). The InGaAs quantum dots were grown by self-assembly on an InGaP matrix via low pressure metalorganic chemical vapor deposition. Photoresponse was observed at temperatures above 200 K with a peak wavelength of 4.7 µm and cutoff wavelength of 5.2 µm. The background limited performance temperature was 140 K, and this was attributed to the super low dark current observed in this QDIP. A detectivity of 3.6×1010 cm·Hz½/W, which is comparable to the state-of-the-art quantum well infrared photodetectors in a similar wavelength range, was obtained for this InGaAs/InGaP QDIP at both T = 77 K and T = 95 K at biases of –1.6 and –1.4 V, [reprint (PDF)]
 
2.  Background limited performance of long wavelength infrared focal plane arrays fabricated from M-structure InAs/GaSb superlattices
P.Y. Delaunay, B.M. Nguyen, D. Hoffman, E.K. Huang, P. Manurkar, S. Bogdanov and M. Razeghi
SPIE Proceedings, San Jose, CA Volume 7222-0W-- January 26, 2009 ...[Visit Journal]
Recent advances in the design and fabrication of Type-II InAs/GaSb superlattices allowed the realization of high performance long wavelength infrared focal plane arrays. The introduction of an Mstructure barrier between the n-type contact and the pi active region reduced the tunneling component of the dark current. The M-structure design improved the noise performance and the dynamic range of FPAs at low temperatures. At 81K, the NEDT of the focal plane array was 23 mK. The noise of the camera was dominated by the noise component due to the read out integrated circuit. At 8 µm, the median quantum efficiency of the detectors was 71%, mainly limited by the reflections on the backside of the array. [reprint (PDF)]
 
2.  High quantum efficiency two color type-II InAs/GaSb n-i-p-p-i-n photodiodes
P.Y. Delaunay, B.M. Nguyen, D. Hoffman, A. Hood, E.K. Huang, M. Razeghi, and M.Z. Tidrow
Applied Physics Letters, Vol. 92, No. 11, p. 111112-1-- March 17, 2008 ...[Visit Journal]
A n-i-p-p-i-n photodiode based on type-II InAs/GaSb superlattice was grown on a GaSb substrate. The two channels, with respective 50% of responsivity cutoff wavelengths at 7.7 and 10 µm, presented quantum efficiencies (QEs) of 47% and 39% at 77 K. The devices can be operated as two diodes for simultaneous detection or as a single n-i-p-p-i-n detector for sequential detection. In the latter configuration, the QEs at 5.3 and 8.5 µm were measured as high as 40% and 39% at 77 K. The optical cross-talk between the two channels could be reduced from 0.36 to 0.08 by applying a 50 mV bias. [reprint (PDF)]
 
2.  High-Power Distributed-Feedback Quantum Cascade Lasers
W.W. Bewley, I. Vurgaftman, C.S. Kim, J.R. Meyer, J. Nguyen, A.J. Evans, J.S. Yu, S.R. Darvish, S. Slivken and M. Razeghi
SPIE Conference, San Jose, CA, Vol. 6127, pp. 612704-- January 23, 2006 ...[Visit Journal]
Recently, a distributed-feedback quantum cascade laser operating in a single spectral mode at 4.8 µm and at temperatures up to 333 K has been reported. In the present work, we provide detailed measurements and modeling of its performance characteristics. The sidemode suppression ratio exceeds 25 dB, and the emission remains robustly single-mode at all currents and temperatures tested. Cw output powers of 99 mW at 298 K and 357 mW at 200 K are obtained at currents well below the thermal rollover point. [reprint (PDF)]
 
2.  Intermixing of GaInP/GaAs Multiple Quantum Wells
C. Francis, M.A. Bradley, P. Boucaud, F.H. Julien and M. Razeghi
Applied Physics Letters 62 (2)-- January 11, 1993 ...[Visit Journal]
The intermixing of GaInP‐GaAs superlattices induced by a heat treatment is investigated as a function of the annealing temperature and duration. Photoluminescence experiments reveal a large red shift of the effective band gap of the annealed quantum wells thus indicating a dominant self‐diffusion of the group III atoms which is confirmed by secondary ion mass spectroscopic measurements. For long enough annealing durations, the red shift saturates and even decreases due to the competing slower self‐diffusion of the group V atoms. Experiments are well understood based on a simple diffusion model. [reprint (PDF)]
 
2.  First room‐temperature cw operation of a GaInAsP/InP light‐emitting diode on a silicon substrate
M. Razeghi; R. Blondeau; M. Defour; F. Omnes; P. Maurel; F. Brillouet
Appl. Phys. Lett. 53, 854–855 (1988)-- July 4, 1988 ...[Visit Journal]
We report in this letter the first successful fabrication of an InP-GalnAsP light-emitting diode, emitting at 1.15 pm grown by low-pressure metalorganic chemical vapor deposition on a silicon substrate. The device has been operated under continuous wave operation at room temperature for 24 h (with an injection current of 200 rnA), and showed no degradation. [reprint (PDF)]
 
2.  Near bulk-limited R0A of long-wavelength infrared type-II InAs/GaSb superlattice photodiodes with polyimide surface passivation
Andrew Hood, Pierre-Yves Delaunay, Darin Hoffman, Binh-Minh Nguyen, Yajun Wei, Manijeh Razeghi, and Vaidya Nathan
Applied Physics Letters 90, 233513-- June 4, 2007 ...[Visit Journal]
Effective surface passivation of Type-II InAs/GaSb superlattice photodiodes with cutoff wavelengths in the long-wavelength infrared is presented. A stable passivation layer, the electrical properties of which do not change as a function of the ambient environment nor time, has been prepared by a solvent-based surface preparation, vacuum desorption, and the application of an insulating polyimide layer. Passivated photodiodes, with dimensions ranging from 400×400 to 25×25 µm2, with a cutoff wavelength of ~11 µm, exhibited near bulk-limited R0A values of ~12 Ω·cm2, surface resistivities in excess of 104 Ω·cm, and very uniform current-voltage behavior at 77 K. [reprint (PDF)]
 
2.  Solar-blind photodetectors and focal plane arrays based on AlGaN
R. McClintock, M. Razeghi
Proc. SPIE 9555, Optical Sensing, Imaging, and Photon Counting: Nanostructured Devices and Applications, 955502-- August 25, 2015 ...[Visit Journal]
III-Nitride material system (AlGaInN) possesses unique optical, electrical and structural properties such as a wide tunable direct bandgap, inherent fast carrier dynamics; good carrier transport properties, high breakdown fields; and high robustness and chemical stability. Recent technological advances in the wide bandgap AlGaN portion of this material system have led to a renewed interest in ultraviolet (UV) photodetectors. These detectors find use in numerous applications in the defense, commercial and scientific arenas such as covert space-to-space communications, early missile threat detection, chemical and biological threat detection and spectroscopy, flame detection and monitoring, UV environmental monitoring, and UV astronomy.1,2,3 Back illuminated detectors operating in the solar blind region are of special interest. Back illumination allows the detector to be hybridized to a silicon read-out integrated circuit, epi-side down, and still collect light through the back of the transparent sapphire substrate. This allows the realization of solar blind focal plane arrays (FPAs) for imaging applications. Solar-blind FPAs are especially important because of the near total absence of any background radiation in this region. In this talk, we will present our recent back-illuminated solar-blind photodetector, mini-array, and FPA results. By systematically optimizing the design of the structure we have realized external quantum efficiencies (EQE) of in excess of 89% for pixel-sized detectors. Based on the absence of any anti-reflection coating, this corresponds to nearly 100% internal quantum efficiency. At the same time, the dark current remains below ~2 × 10-9 A/cm² even at 10 volts of reverse bias. The detector has a very sharp falloff starting at 275 with the UV-solar rejection of better than three orders of magnitude, and a visible rejection ratio is more than 6 orders of magnitude. This high performance photodetector design was then used as the basis of the realization of solar-blind FPA. We demonstrated a 320×256 FPA with a peak detection wavelength of 278nm. The operability of the FPA was better than 92%, and excellent corrected imaging was obtained. [reprint (PDF)]
 
2.  Ammonium Sulfide Passivation of Type-II InAs/GaSb Superlattice Photodiodes
A. Gin, Y. Wei, A. Hood, A. Bajowala, V. Yazdanpanah, M. Razeghi and M.Z. Tidrow
Applied Physics Letters, 84 (12)-- March 22, 2004 ...[Visit Journal]
We report on the surface passivation of Type-II InAs/GaSb superlattice photodetectors using various ammonium sulfide solutions. Compared to unpassivated detectors, zero-bias resistance of treated 400 µm×400 µm devices with 8 µm cutoff wavelength was improved by over an order of magnitude to ~20 kΩ at 80 K. Reverse-bias dark current density was reduced by approximately two orders of magnitude to less than 10 mA/cm2 at –2 V. Dark current modeling, which takes into account trap-assisted tunneling, indicates greater than 70 times reduction in bulk trap density for passivated detectors. [reprint (PDF)]
 
2.  High brightness angled cavity quantum cascade lasers
D. Heydari, Y. Bai, N. Bandyopadhyay, S. Slivken, and M. Razeghi
Applied Physics Letters 106, 091105-- March 6, 2015 ...[Visit Journal]
A quantum cascade laser (QCL) with an output power of 203 W is demonstrated in pulsed mode at 283 K with an angled cavity. The device has a ridge width of 300 μm, a cavity length of 5.8 mm, and a tilt angle of 12°. The back facet is high reflection coated, and the front facet is anti-reflection coated. The emitting wavelength is around 4.8 μm. In distinct contrast to a straight cavity broad area QCL, the lateral far field is single lobed with a divergence angle of only 3°. An ultrahigh brightness value of 156 MW cm²·sr-1 is obtained, which marks the brightest QCL to date. [reprint (PDF)]
 
2.  Two-dimensional magnetophonon resonance in GaInAs-InP and GaInAs-AlInAs heterojunctions and superlattices
J.C. Portal, G. Gregoris a b , M.A. Brummell , R.J. Nicholas, M. Razeghi, M.A. Di Forte-Poisson, K.Y. Cheng, A.Y. Cho
J.C. Portal, G. Gregoris, M.A. Brummell, R.J. Nicholas, M. Razeghi, M.A. Di Forte-Poisson, K.Y. Cheng, A.Y. Cho, Two-dimensional magnetophonon resonance in GaInAs-InP and GaInAs-AlInAs heterojunctions and superlattices, Surface Science, Volume 142, Issues 1–3, 1984, Pages 368-374,-- July 1, 1984 ...[Visit Journal]
We report the observation of magnetophonon resonance in GaInAs-InP heterojunctions and measurements of the temperature dependence of the oscillations. A single series of oscillations due to scattering by the “GaAs-like” mode of GaInAs is seen, in contrast to GaInAs-InP superlattices, where scattering from InP phonons is also observed, and GaInAs-AlInAs heterojunctions, where coupling to “InAs-like” modes only is seen. This behaviour is discussed in terms of long-range phonon interactions and interface phonons. [reprint (PDF)]
 
2.  Type-II superlattice photodetectors for MWIR to VLWIR focal plane arrays
M. Razeghi, Y. Wei, A. Hood, D. Hoffman, B.M. Nguyen, P.Y. Delaunay, E. Michel and R. McClintock
SPIE Infrared Technology and Applications Conference, April 17-21, 2006, Orlando, FL Proceedings – Infrared Technology and Applications XXXII, Vol. 6206, p. 62060N-1-- April 21, 2006 ...[Visit Journal]
Results obtained on GaSb/InAs Type-II superlattices have shown performance comparable to HgCdTe detectors, with the promise of higher performance due to reduced Auger recombination and dark current through improvements in device design and material quality. In this paper, we discuss advancements in Type-II IR sensors that cover the 3 to > 30 µm wavelength range. Specific topics covered will be device design and modeling using the Empirical Tight Binding Method (ETBM), material growth and characterization, device fabrication and testing, as well as focal plane array processing and imaging. Imaging has been demonstrated at room temperature for the first time with a 5 µm cutoff wavelength 256×256 focal plane array. [reprint (PDF)]
 
2.  High Performance Quantum Cascade Lasers at λ ~ 6 μm
M. Razeghi, S. Slivken, J. Yu, A. Evans, and J. David
Microelectronics Journal, 34 (5-8)-- May 1, 2003 ...[Visit Journal]
This talk will focus on the recent efforts at the Center for Quantum Devices to deliver a high average power quantum cascade laser source at λ ~6 μm. Strain-balancing is used to reduce leakage for these shorter wavelength quantum cascade lasers. Further, the effect of reducing the doping in the injector is explored relative to the threshold current density and maximum average output power. Lastly, to demonstrate more of the potential of these devices, epilayer down bonding is explored as a technique to significantly enhance device performance. [reprint (PDF)]
 
2.  High operability 1024 x 1024 long wavelength infrared focal plane array base on Type-II InAs/GaSb superlattice
A. Haddadi, S.R. Darvish, G. Chen, A.M. Hoang, B.M. Nguyen and M. Razeghi
AIP Conference Proceedings, Vol. 1416, p. 56-58_NGS15 Conf_Blacksburg, VA_Aug 1-5, 2011-- December 31, 2011 ...[Visit Journal]
Fabrication and characterization of a high performance 1024×1024 long wavelength infrared type‐II superlattice focal plane array are described. The FPA performs imaging at a continous rate of 15.00 frames/sec. Each pixel has pitch of 18μm with a fill factor of 71.31%. It demonstrates excellent operability of 95.8% and 97.4% at 81 and 68K operation temperature. The external quantum efficiency is ∼81% without any antireflective coating. Using F∕2 optics and an integration time of 0.13ms, the FPA exhibits an NEDT as low as 27 and 19mK at operating temperatures of 81 and 68K respectively. [reprint (PDF)]
 
2.  Fabrication of GaN Nanotubular Material using MOCVD with an Aluminium Oxide Membrane
W.G. Jung, S.H. Jung, P. Kung, and M. Razeghi
Nanotechnology 17-- January 1, 2006 ...[Visit Journal]
GaN nanotubular material is fabricated with an aluminium oxide membrane in MOCVD. SEM, XRD, TEM and PL are employed to characterize the fabricated GaN nanotubular material. An aluminium oxide membrane with ordered nanoholes is used as a template. Gallium nitride is deposited at the inner wall of the nanoholes in the aluminium oxide template, and the nanotubular material with high aspect ratio is synthesized using the precursors of TMG and ammonia gas. Optimal synthesis conditions in MOCVD are obtained successfully for the gallium nitride nanotubular material in this research. The diameter of the GaN nanotube fabricated is approximately 200–250 nm and the wall thickness is about 40–50 nm. [reprint (PDF)]
 
2.  World's first demonstration of type-II superlattice dual band 640 x 512 LWIR focal plane array
E.K. Huang and M. Razeghi
SPIE Proceedings, Vol. 8268, p. 82680Z-- January 22, 2012 ...[Visit Journal]
High resolution multi-band infrared detection of terrestrial objects is useful in applications such as long range and high altitude surveillance. In this paper, we present a 640 x 512 type-II superlattice focal plane array (FPA) in the long-wave infrared (LWIR) suitable for such purposes, featuring 100% cutoff wavelengths at 9.5 μm (blue channel) and 13 μm (red). The dual band camera is single-bump hybridized to an Indigo 30 μm pitch ISC0905 read-out integrated circuit. Test pixels revealed background limited behavior with specific detectivities as high as ~5x1011 Jones at 7.9 μm (blue) and ~1x1011 Jones at 10.2 μm (red) at 77K. [reprint (PDF)]
 

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