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11.  High quality LEO growth and characterization of GaN films on Al2O3 and Si substrates
M. Razeghi, P. Kung, D. Walker, M. Hamilton, and J. Diaz
SPIE International Conference on Solid State Crystals, Zakopane, Poland; Proceedings 3725-- October 12, 1998 ...[Visit Journal]
We report the lateral epitaxial overgrowth (LEO) of GaN films on (00.1) Al2O3 and (111) Si substrates by metalorganic chemical vapor deposition. The LEO on Si substrates was possible after achieving quasi monocrystalline GaN template films on (111) Si substrates. X-ray diffraction, photoluminescence, scanning electron microscopy and atomic force microscopy were used to assess the quality of the LEO films. Lateral growth rates more than 5 times as high as vertical growth rates were achieved for both LEO growths of GaN on sapphire and silicon substrates. [reprint (PDF)]
 
11.  Extended electrical tuning of quantum cascade lasers with digital concatenated gratings
S. Slivken, N. Bandyopadhyay, Y. Bai, Q. Y. Lu, and M. Razeghi
Appl. Phys. Lett. 103, 231110 (2013)-- December 6, 2013 ...[Visit Journal]
In this report, the sampled grating distributed feedback laser architecture is modified with digital concatenated gratings to partially compensate for the wavelength dependence of optical gain in a standard high efficiency quantum cascade laser core. This allows equalization of laser threshold over a wide wavelength range and demonstration of wide electrical tuning. With only two control currents, a full tuning range of 500 nm (236 cm−1) has been demonstrated. Emission is single mode, with a side mode suppression of >20 dB. [reprint (PDF)]
 
11.  Reliability of Aluminum-Free 808 nm High-Power Laser Diodes with Uncoated Mirrors
I. Eliashevich, J. Diaz, H. Yi, L. Wang, and M. Razeghi
Applied Physics Letters 66 (23)-- June 5, 1995 ...[Visit Journal]
The reliability of uncoated InGaAsP/GaAs high‐power diode lasers emitting at 808 nm wavelength has been studied. 47 W of quasicontinuous wave output power (pulse width 200 μs, frequency 20 Hz) have been obtained from a 1 cm wide laser bar. A single‐stripe diode without mirror coating has been life tested at 40 °C for emitting power of 800 mW continuous wave (cw) and showed no noticeable degradation and no change of the lasing wavelength after 6000 h of operation. [reprint (PDF)]
 
11.  MOCVD Growth of ZnO Nanostructures Using Au Droplets as Catalysts
V.E. Sandana, D.J. Rogers, F.H. Teherani, R. McClintock, M. Razeghi, H.J. Drouhin, M.C. Clochard, V. Sallett, G. Garry and F. Fayoud
SPIE Conference, January 20-25, 2008, San Jose, CA Proceedings – Zinc Oxide Materials and Devices III, Vol. 6895, p. 68950Z-1-6.-- February 1, 2008 ...[Visit Journal]
ZnO nanostructures were synthesised by Metal Organic Chemical Vapor Deposition growth on Si (100) and c-Al2O3 substrates coated with a 5nm thick layer of Au. The Au coated substrates were annealed in air prior to deposition of ZnO so as to promote formation of Au nanodroplets. The development of the nanodroplets was studied as a function of annealing duration and temperature. Under optimised conditions, a relatively homogeneous distribution of regular Au nanodroplets was obtained. Using the Au nanodroplets as a catalyst, MOCVD growth of ZnO nanostructures was studied. Scanning electron microscopy revealed nanostructures with various forms including commonly observed structures such as nanorods, nanoneedles and nanotubes. Some novel nanostructures were also observed, however, which resembled twist pastries and bevelled-multifaceted table legs. [reprint (PDF)]
 
11.  Investigation of 0.8 μm InGaAsP-GaAs laser diodes with Multiple Quantum Wells
J. Diaz, H. Yi, S. Kim, M. Erdtmann, L.J. Wang, I. Eliashevich, E. Bigan and M. Razeghi
Optoelectronic Integrated Circuit Materials, Physics and Devices, SPIE Conference, San Jose, CA; Proceedings, Vol. 2397-- February 6, 1995 ...[Visit Journal]
In this paper, we studied the effects of the active region structure (one, two and three quantum wells with same total thickness) for high-power InGaAsP-GaAs separate confinement heterostructure lasers emitting at 0.8 μm wavelength. Experimental results for the lasers grown by low pressure metalorganic chemical vapor deposition show excellent agreement with the theoretical model. Total output power of 47 W from an uncoated 1 cm-wide laser bar was achieved in quasi-continuous wave operation [reprint (PDF)]
 
11.  Characterization of high quality GaInP/GaAs superlattices grown on GaAs and Si substrates by gas source molecular beam epitaxy
C. Jelen, S. Slivken, X.G. He, and M. Razeghi and S. Shastry
Journal of Vacuum Science and Technology B 12 (2)-- March 1, 1994 ...[Visit Journal]
We report an analysis of the heteroepitaxial interfaces in high quality GaInP–GaAs superlattices grown simultaneously on GaAs and Si substrates by gas source molecular beam epitaxy. These two superlattices have been studied using high resolution x-ray diffraction measurements. Sharp superlattice satellites, with very little broadening, are observed within a 6° range for the sample on GaAs. Photoluminescence peaks with full widths at half-maximums of 5 and 7 meV are obtained at 4 K for samples with 58 Å wells on GaAs and Si, respectively. Room temperature exciton absorption is observed in the photovoltage measurements for a superlattice grown on Si substrate. The thicknesses determined by x-ray analysis are consistent with those obtained by a Kronig–Penny model fitting of the photovoltage spectroscopy. [reprint (PDF)]
 
11.  Pressure-induced depopulation of the first excited subband in GaInAs/InP heterojunctions
D Gauthier, J C Portal and M Razeghi
D Gauthier et al 1989 Semicond. Sci. Technol. 4 218-- December 8, 1988 ...[Visit Journal]
Following our previous work on (GalnAs)/(lnP) heterojunctions under hydrostatic pressure we present recent experimental results where the evidence for the total depopulation of the first excited electric subband with pressure is demonstrated. The total electron concentration decreases at a rate of 2.7% kbar”, much higher than in previous experiments. The experimental situation can be fitted with the triangular-well approximation if we both assume the change with pressure of the conduction band discontinuity AE, and the deepening of a deep impurity level with activation energy of the order 160 meV at zero pressure. [reprint (PDF)]
 
11.  Exciton localization in group-III nitride quantum wells
V.I. Litvinov and M. Razeghi
Physical Review B 59 (15)-- May 15, 1999 ...[Visit Journal]
Exciton density of states broadened by compositional disorder in the group-III nitride quantum well is calculated. The excitonic photoluminescence linewidth is estimated and related to the material parameters of the alloy for two limiting cases of two-dimensional (2D) and three-dimensional excitons in the quantum well. It is shown that the effect of the compositional fluctuations depends on dimensionality of the exciton: the 2D excitons are more sensitive to the inhomogeneities than 3D ones. The broad near-band-gap energy states distribution for quasi-two-dimensional excitons is consistent with the experimental evidence of the spontaneous and stimulated emissions from excitonic states localized on compositional fluctuations. [reprint (PDF)]
 
11.  AlGaN/AlN MOVPE heteroepitaxy: pulsed co-doping SiH4 and TMIn
Ilkay Demir, Yusuf Koçak, A. Emre Kasapoğlu, Manijeh Razeghi, Emre Gür and Sezai Elagoz
Semicond. Sci. Technol. 34 075028-- June 24, 2019 ...[Visit Journal]
We report a new growth approach pulsed co-doping growth of AlxGa1−xN (x > 0.5) epilayers on AlN/Al2O3 templates by metal organic vapor phase epitaxy (MOVPE). Using this approach SiH4 (silane) and TMIn (trimethylindium) supplied to the growth chamber alternately and pulsed during the growth of AlGaN epilayers. Structural and morphological quality of AlGaN epilayers were investigated by high resolution x-ray diffraction (HR-XRD), atomic force microscopy (AFM), Raman spectroscopy, and scanning electron microscopy (SEM) techniques. It has shown that higher crystalline quality with low full width at half maximum (FWHM) and smoother surface morphology with reduced hexagonal hillock density has been obtained by the pulsed co-doping growth approach. Volcano like hillock structures has been confirmed by Raman mapping. [reprint (PDF)]
 
11.  Growth and Characterization of Type-II Non-Equilibrium Photovoltaic Detectors for Long Wavelength Infrared Range
H. Mohseni, J. Wojkowski, A. Tahraoui, M. Razeghi, G. Brown and W. Mitche
SPIE Conference, San Jose, CA, -- January 26, 2000 ...[Visit Journal]
Growth and characterization of type-II detectors for mid-IR wavelength range is presented. The device has a p-i-n structure is designed to operate in the non-equilibrium mode with low tunneling current. The active layer is a short period InAs/GaSb superlattice. Wider bandgap p-type AlSb and n-type InAs layers are used to facilitate the extraction of both electronics and holes from the active layer for the first time. The performance of these devices were compared to the performance of devices grown at the same condition, but without the AlSb barrier layers. The processed devices with the AlSb barrier show a peak responsivity of about 1.2 A/W with Johnson noise limited detectivity of 1.1 X 1011 cm·Hz½/W at 8 μm at 80 K at zero bias. The details of the modeling, growth, and characterizations will be presented. [reprint (PDF)]
 
11.  Passivation of Type-II InAs/GaSb superlattice photodetectors
A. Hood, Y. Wei, A. Gin, M. Razeghi, M. Tidrow, and V. Nathan
SPIE Conference, Jose, CA, Vol. 5732, pp. 316-- January 22, 2005 ...[Visit Journal]
Leakage currents limit the operation of high performance Type-II InAs/GaSb superlattice photodiode technology. Surface leakage current becomes a dominant limiting factor, especially at the scale of a focal plane array pixel (< 25 µm) and must be addressed. A reduction of the surface state density, unpinning the Fermi level at the surface, and appropriate termination of the semiconductor crystal are all aims of effective passivation. Recent work in the passivation of Type-II InAs\GaSb superlattice photodetectors with aqueous sulfur-based solutions has resulted in increased R0A products and reduced dark current densities by reducing the surface trap density. Additionally, photoluminescence of similarly passivated Type-II InAs/GaSb superlattice and InAs GaSb bulk material will be discussed. [reprint (PDF)]
 
11.  Planar nBn type-II superlattice mid-wavelength infrared photodetectors using zinc ion-implantation
Arash Dehzangi, Donghai Wu, Ryan McClintock, Jiakai Li, and Manijeh Razeghi
Appl. Phys. Lett. 116, 221103 https://doi.org/10.1063/5.0010273-- June 2, 2020 ...[Visit Journal]
In this Letter, we report the demonstration of zinc ion-implantation to realize planar mid-wavelength infrared photodetectors based on type-II InAs/InAs1−xSbx superlattices. At 77 K, the photodetectors exhibit a peak responsivity of 0.68 A/W at 3.35 μm, corresponding to a quantum efficiency of 23.5% under Vb = −80 mV, without anti-reflection coating; these photodetectors have a 100% cutoff wavelength of 4.28 μm. With an R0 × A value of 1.53 × 104 Ω cm2 and a dark current density of 1.23 × 10−6 A/cm2 under an applied bias of −80 mV at 77 K, the photodetectors exhibit a specific detectivity of 9.12 × 1011 cm·Hz1/2/W. [reprint (PDF)]
 
11.  A Review of III-Nitride Research at the Center for Quantum Devices
M. Razeghi and R. McClintock
Journal of Crystal Growth, Vol. 311, No. 10-- May 1, 2009 ...[Visit Journal]
In this paper, we review the history of the Center for Quantum Devices’ (CQD) III-nitride research covering the past 15 years. We review early work developing III-nitride material growth. We then present a review of laser and light-emitting diode (LED) results covering everything from blue lasers to deep UV LEDs emitting at 250 nm. This is followed by a discussion of our UV photodetector research from early photoconductors all the way to current state of the art Geiger-mode UV single photon detectors. [reprint (PDF)]
 
11.  Electroluminescence at 375 nm from a Zn0/GaN:Mg/c-Al2O3 heterojunction light emitting diodes
D.J. Rogers, F.Hosseini Teherani, A. Yasan, K. Minder, P. Kung, and M. Razeghi
Applied Physics Letters, 88 (14)-- April 13, 2006 ...[Visit Journal]
n-ZnO/p-GaN:Mg heterojunction light emitting diode (LED) mesas were fabricated on c-Al2O3 substrates using pulsed laser deposition for the ZnO and metal organic chemical vapor deposition for the GaN:Mg. Room temperature (RT) photoluminescence (PL) showed an intense main peak at 375 nm and a negligibly low green emission indicative of a near band edge excitonic emission from a ZnO layer with low dislocation/defect density. The LEDs showed I-V characteristics confirming a rectifying diode behavior and a RT electroluminescence (EL) peaked at about 375 nm. [reprint (PDF)]
 
11.  Radiometric characterization of long-wavelength infrared type II strained layer superlattice focal plane array under low-photon irradiance conditions
J. Hubbs, V. Nathan, M. Tidrow, and M. Razeghi
Optical Engineering, Vol. 51, No. 6, p. 064002-1-- June 15, 2012 ...[Visit Journal]
We present the results of the radiometric characterization of an “M” structure long wavelength infrared Type-II strained layer superlattice(SLS) infrared focal plane array (IRFPA) developed by Northwestern University (NWU). The performance of the M-structure SLS IRFPA was radiometrically characterized as a function of photon irradiance, integration time, operating temperature, and detector bias. Its performance is described using standard figures of merit: responsivity, noise, and noise equivalent irradiance. Assuming background limited performance operation at higher irradiances, the detector quantum efficiency for the SLS detector array is approximately 57%. The detector dark density at 80 K is 142 μA∕cm², which represents a factor of seven reduction from previously measured devices. [reprint (PDF)]
 
11.  Persistent photoconductivity in Ga0.49In0.51P/GaAs heterojunctions
S. Ben Amor; L. Dmowski; J. C. Portal; N. J. Pulsford; R. J. Nicholas; J. Singleton; M. Razeghi
J. Appl. Phys. 65, 2756–2760 (1989-- November 18, 1988 ...[Visit Journal]
We have studied the persistent photoconductivity (PPC) effect in Ga0.49 Ino. sl P IGaAs heterostructures. Through time- and temperature-dependent Hall effect, we observe very small relaxation rates and the PPC remains observable at room temperature. Optical experiments show an optical energy threshold of 1.15 e V and an infrared quenching of the ppc. Thermal cycling of the samples strongly affects the PPC and the quenching temperature. The center responsible for the observed PPC, therefore, appears related to defects, Most of our observations are qualitatively understood in a large lattice relaxation DX-like center approach. However, the origin of the high quenching temperature remains to be explained. [reprint (PDF)]
 
11.  High quantum efficiency mid-wavelength infrared type-II InAs/InAs1-xSbx superlattice photodiodes grown by metal-organic chemical vapor deposition
Donghai Wu , Quentin Durlin, Arash Dehzangi , Yiyun Zhang , and Manijeh Razeghi
Appl. Phys. Lett. 114, 011104-- January 8, 2019 ...[Visit Journal]
We report the growth and characterization of mid-wavelength infrared type-II InAs/InAs1-xSbx superlattice photodiodes on GaSb substrates grown by metal-organic chemical vapor deposition. At 150 K, the 50% cut-off wavelength is 5.0 um, the dark current density is 3.3x10−4 A/cm2 under −20mV bias, and the peak responsivity is 1.76A/W corresponding to a quantum efficiency of 55% without anti-reflection coating. A specific detectivity of 1.2x1011cmHz1/2/W is achieved at 4.0 um under −20mV bias at 150 K. [reprint (PDF)]
 
11.  GaN nanostructured p-i-n photodiodes
J.L. Pau, C. Bayram, P. Giedraitis, R. McClintock, and M. Razeghi
Applied Physics Letters, Vol. 93, No. 22, p. 221104-1-- December 1, 2008 ...[Visit Journal]
We report the fabrication of nanostructured p-i-n photodiodes based on GaN. Each device comprises arrays of ~200 nm diameter and 520 nm tall nanopillars on a 1 µm period, fabricated by e-beam lithography. Strong rectifying behavior was obtained with an average reverse current per nanopillar of 5 fA at −5 V. In contrast to conventional GaN diodes, nanostructured devices reproducibly show ideality factors lower than 2. Enhanced tunneling through sidewall surface states is proposed as the responsible mechanism for this behavior. Under backillumination, the quantum efficiency in nanostructured devices is partly limited by the collection efficiency of holes into the nanopillars. [reprint (PDF)]
 
11.  Electrically pumped photonic crystal distributed feedback quantum cascade lasers
Y. Bai, P. Sung, S.R. Darvish, W. Zhang, A. Evans, S. Slivken, and M. Razeghi
SPIE Conference, January 20-25, 2008, San Jose, CA Proceedings – Quantum Sensing and Nanophotonic Devices V, Vol. 6900, p. 69000A-1-8.-- February 1, 2008 ...[Visit Journal]
We demonstrate electrically pumped, room temperature, single mode operation of photonic crystal distributed feedback (PCDFB) quantum cascade lasers emitting at ~ 4.75 µm. Ridge waveguides of 50 µm and 100 µm width were fabricated with both PCDFB and Fabry-Perot feedback mechanisms. The Fabry-Perot device has a broad emitting spectrum and a broad far-field character. The PCDFB devices have primarily a single spectral mode and a diffraction limited far field characteristic with a full angular width at half-maximum of 4.8 degrees and 2.4 degrees for the 50 µm and 100 µm ridge widths, respectively. [reprint (PDF)]
 
11.  Highly temperature insensitive quantum cascade lasers
Y. Bai, N. Bandyopadhyay, S. Tsao, E. Selcuk, S. Slivken and M. Razeghi
Applied Physics Letters, Vol. 97, No. 25-- December 20, 2010 ...[Visit Journal]
An InP based quantum cascade laser (QCL) heterostructure emitting around 5 μm is grown with gas-source molecular beam epitaxy. The QCL core design takes a shallow-well approach to maximize the characteristic temperatures, T(0) and T(1), for operations above room temperature. A T(0) value of 383 K and a T(1) value of 645 K are obtained within a temperature range of 298–373 K. In room temperature continuous wave operation, this design gives a single facet output power of 3 W and a wall plug efficiency of 16% from a device with a cavity length of 5 mm and a ridge width of 8 μm. [reprint (PDF)]
 
11.  Ultraviolet avalanche photodiodes
Ryan McClintock ; Manijeh Razeghi
Proc. SPIE 9555, Optical Sensing, Imaging, and Photon Counting: Nanostructured Devices and Applications, 95550B -- August 28, 2015 ...[Visit Journal]
The III-Nitride material system is rapidly maturing; having proved itself as a material for LEDs and laser, and now finding use in the area of UV photodetectors. However, many UV applications are still dominated by the use of photomultiplier tubes (PMT). PMTs are capable of obtaining very high sensitivity using internal electron multiplication gain (typically ~106). It is highly desirable to develop a compact semiconductor-based photodetector capable of realizing this level of sensitivity. In principle, this can be obtained in III-Nitrides by taking advantage of avalanche multiplication under high electric fields – typically 2.7 MV/cm, which with proper design can correspond to an external reverse bias of less than 100 volts. In this talk, we review the current state-of-the-art in III-Nitride solar- and visible-blind APDs, and present our latest results on GaN APDs grown on both conventional sapphire and low dislocation density free-standing c- and m-plane GaN substrates. Leakage current, gain, and single photon detection efficiency (SPDE) of these APDs were compared. The spectral response and Geiger-mode photon counting performance of UV APDs are studied under low photon fluxes, with single photon detection capabilities as much as 30% being demonstrated in smaller devices. Geiger-mode operation conditions are optimized for enhanced SPDE. [reprint (PDF)]
 
10.  Thin film transistors with wurtzite ZnO channels grown on Si3N4/SiO2/Si (111) substrates by pulsed laser deposition
D.J. Rogers; V.E. Sandana; F. Hosseini Teherani; M. Razeghi
Proc. SPIE 7603, Oxide-based Materials and Devices, 760318 (March 02, 2010)-- March 7, 2010 ...[Visit Journal]
Thin Film Transistors (TFT) were made by growing ZnO on Si3N4/SiO2/Si (111) substrates by pulsed laser deposition. X-ray diffraction and scanning electron microscope studies revealed the ZnO to have a polycrystalline wurtzite structure with a smooth surface, good crystallographic quality and a strong preferential c-axis orientation. Transmission studies in similar ZnO layers on glass substrates showed high transmission over the whole visible spectrum. Electrical measurements of a back gate geometry FET showed an enhancement-mode response with hard saturation, mA range Id and a VON ∼ 0V. When scaled down, such TFTs may be of interest for high frequency applications. [reprint (PDF)]
 
10.  Widely tuned room temperature terahertz quantum cascade laser sources
Q.Y. Lu, N. Bandyopadhyay, S. Slivken, Y. Bai and M. Razeghi
SPIE Proceedings, Vol. 8631, p. 863108-1, Photonics West, San Francisco, CA-- February 3, 2013 ...[Visit Journal]
Room temperature THz quantum cascade laser sources with a broad spectral coverage based on intracavity difference frequency generation are demonstrated. Two mid-infrared active cores in the longer mid-IR wavelength range (9-11 micron)based on the single-phonon resonance scheme are designed with a second-order difference frequency nonlinearity specially optimized for the high operating fields that correspond to the highest mid-infrared output powers. A Čerenkov phase-matching scheme along with integrated dual-period distributed feedback gratings are used for efficient THz extraction and spectral purification. Single mode emissions from 1.0 to 4.6 THz with a side-mode suppression ratio and output power up to 40 dB and 32 μW are obtained, respectively. [reprint (PDF)]
 
10.  Lateral epitaxial overgrowth of GaN films on sapphire and silicon substrates
P. Kung, D. Walker, M. Hamilton, J. Diaz, and M. Razeghi
Applied Physics Letters 74 (4)-- January 25, 1999 ...[Visit Journal]
We report the lateral epitaxial overgrowth of GaN films on (00.1) Al2O3 and (111) Si substrates by metalorganic chemical vapor deposition. The lateral epitaxial overgrowth on Si substrates was possible after achieving quasi-monocrystalline GaN template films on (111) Si substrates. X-ray diffraction, photoluminescence, scanning electron microscopy, and atomic force microscopy were used to assess the quality of the lateral epitaxial overgrown films. Lateral growth rates more than five times as high as vertical growth rates were achieved for both lateral epitaxial overgrowths of GaN on sapphire and silicon substrates. [reprint (PDF)]
 
10.  Electrical Transport Properties of Highly Doped N-type GaN Epilayers
H.J. Lee, M.G. Cheong, E.K. Suh, and M. Razeghi
SPIE Conference, San Jose, CA, -- January 28, 1998 ...[Visit Journal]
Temperature-dependent Hall-effects in MOCVD-grown Si-doped GaN epilayers were measured as a function of temperature in the range 10-800 K. The results were satisfactorily analyzed in terms of a two-band model including the (Gamma) and impurity bands at lower temperatures than room. The (Gamma) band electrons are dominant only high temperatures. The ionized impurity scattering is the most important in the (Gamma) band except at very high temperatures. [reprint (PDF)]
 

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