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1.  Research activity on Type-II InAs/GaSb superlattice for LWIR detection and imaging at the Center for Quantum Devices
M. Razeghi and B.M. Nguyen
American Institute of Physics Conference Proceedings Vol. 949, Issue 1, p. 35-42, 6th International Workshop on Information Optics (WIO'07), Reykjavik, Iceland, June 25-30, 2007-- October 24, 2007 ...[Visit Journal]
Type-II superlattice photodetectors have recently experienced significant improvements in both theoretical structure design and experimental realization. Empirical Tight Binding Method was initiated and developed for Type-II superlattice. A new Type-II structure, called M-structure, was introduced and theoretically demonstrated high R0A, high quantum efficiency. Device design and growth condition were optimized to improve the performance. As a result, a 54% quantum efficiency, a 12 Ω·cm2 R0A were achieved for 11 µm cut-off photodetector at 77 K. Effective surface passivation techniques for MWIR and LWIR Type-II superlattice were developed. FPA imaging at MWIR and LWIR were demonstrated with a capability of imaging up to room temperature and 211 K respectively. The noise equivalent temperature difference presented a peak at 50 mK for MWIR FPA at 121 K and 26 mK for LWIR FPA at 81 K. [reprint (PDF)]
 
1.  Reliable High-Power Uncoated Al-free InGaAsP/GaAs Lasers for Cost-Sensitive Optical Communication and Processing Applications
M. Razeghi
SPIE Conference, Dallas, TX, -- November 4, 1997 ...[Visit Journal]
Unlike InP-based systems for long-distance communication applications, GaAs-based optoelectronic systems mostly for local-area network, optical interconnection or optical computing are very cost-sensitive because often these optoelectronic devices constitute most of the cost for these applications and fewer users share the cost. Thus besides technical issues, the processing cost should be addressed in the selection of materials and fabrication methods. We discuss a number of major advantages of Al-free InGaAsP/GaAs lasers for these applications, such as not coating- requirement, low cost, high long-term reliability, high performance. We discuss recent preliminary results of Al- free lasers as a first step toward these optoelectronic applications. [reprint (PDF)]
 
1.  Comparison of the Physical Properties of GaN Thin Films Deposited on (0112) and (0001) Sapphire Substrates
C.J. Sun and M. Razeghi
Applied Physics Letters 63 (7)-- August 16, 1993 ...[Visit Journal]
A direct comparison of the physical properties of GaN thin films is made as a function of the choice of substrate orientations. Gallium nitride single crystals were grown on (0001) and (0112) sapphire substrates by metalorganic chemical vapor deposition. Better crystallinity with fine ridgelike facets is obtained on the (0112) sapphire. Also lower carrier concentration and higher mobilities indicate both lower nitrogen vacancies and less oxygen incorporation on the (0112) sapphire. The results of this study show better physical properties of GaN thin films achieved on (0112) sapphire. [reprint (PDF)]
 
1.  Pressure-induced depopulation of the first excited subband in GaInAs/InP heterojunctions
D Gauthier, J C Portal and M Razeghi
D Gauthier et al 1989 Semicond. Sci. Technol. 4 218-- December 8, 1988 ...[Visit Journal]
Following our previous work on (GalnAs)/(lnP) heterojunctions under hydrostatic pressure we present recent experimental results where the evidence for the total depopulation of the first excited electric subband with pressure is demonstrated. The total electron concentration decreases at a rate of 2.7% kbar”, much higher than in previous experiments. The experimental situation can be fitted with the triangular-well approximation if we both assume the change with pressure of the conduction band discontinuity AE, and the deepening of a deep impurity level with activation energy of the order 160 meV at zero pressure. [reprint (PDF)]
 
1.  Direct growth of thick AlN layers on nanopatterned Si substrates by cantilever epitaxy
Ilkay Demir, Yoann Robin, Ryan McClintock, Sezai Elagoz, Konstantinos Zekentes, and Manijeh Razeghi
Physica Status Solidi 214 (4), pp. 1770120-- April 4, 2017 ...[Visit Journal]
The growth of thick, high quality, and low stress AlN films on Si substrates is highly desired for a number of applications like the development of micro and nano electromechanical system (MEMS and NEMS) technologies [1] and particularly for fabricating AlGaNbased UV LEDs [2–5]. UV LEDs are attractive as they are applied in many areas, such as biomedical instrumentations and dermatology, curing of industrial resins and inks, air purification, water sterilization, and many others [2, 3]. UV LEDs have been generally fabricated on AlN, GaN, Al2O3, or SiC substrates because of better lattice mismatching to AlGaN material systems. [reprint (PDF)]
 
1.  Surface leakage current reduction in long wavelength infrared type-II InAs/GaSb superlattice photodiodes
S. Bogdanov, B.M. Nguyen, A.M. Hoang, and M. Razeghi
Applied Physics Letters, Vol. 98, No. 18, p. 183501-1-- May 2, 2011 ...[Visit Journal]
Dielectric passivation of long wavelength infrared Type-II InAs/GaSb superlattice photodetectors with different active region doping profiles has been studied. SiO2 passivation was shown to be efficient as long as it was not put in direct contact with the highly doped superlattice. A hybrid graded doping profile combined with the shallow etch technique reduced the surface leakage current in SiO2 passivated devices by up to two orders of magnitude compared to the usual design. As a result, at 77 K the SiO(2) passivated devices with 10.5 μm cutoff wavelength exhibit an R0A of 120 Ω·cm², RmaxA of 6000 Ω·cm², and a dark current level of 3.5×10−5 A·cm−2 at −50 mV bias. [reprint (PDF)]
 
1.  Demonstration of negative differential resistance in GaN/AlN resonant tunneling didoes at room temperature
Z. Vashaei, C. Bayram and M. Razeghi
Journal of Applied Physics, Vol. 107, No. 8, p. 083505-- April 15, 2010 ...[Visit Journal]
GaN/AlN resonant tunneling diodes (RTD) were grown by metal-organic chemical vapor deposition (MOCVD) and negative differential resistance with peak-to-valley ratios as high as 2.15 at room temperature was demonstrated. Effect of material quality on RTDs’ performance was investigated by growing RTD structures on AlN, GaN, and lateral epitaxial overgrowth GaN templates. Our results reveal that negative differential resistance characteristics of RTDs are very sensitive to material quality (such as surface roughness) and MOCVD is a suitable technique for III-nitride-based quantum devices. [reprint (PDF)]
 
1.  Low-Threshold 7.3 μm Quantum Cascade Lasers Grown by Gas-Source Molecular Beam Epitaxy
S. Slivken, A. Matlis, A. Rybaltowski, Z. Wu and M. Razeghi
Applied Physics Letters 74 (19)-- May 19, 1999 ...[Visit Journal]
We report low-threshold 7.3 μm superlattice-based quantum cascade lasers. The threshold current density is 3.4 kA/cm² at 300 K and 1.25 kA/cm² at 79 K in pulsed mode for narrow (∼20 μm), 2 mm-long laser diodes. The characteristic temperature (T0) is 210 K. The slope efficiencies are 153 and 650 mW/A at 300 and 100 K, respectively. Power output is in excess of 100 mW at 300 K. Laser far-field intensity measurements give divergence angles of 64° and 29° in the growth direction and in the plane of the quantum wells, respectively. Far-field simulations show excellent agreement with the measured results. [reprint (PDF)]
 
1.  Type-II InAs/GaSb photodiodes and focal plane arrays aimed at high operating temperatures
M. Razeghi, S. Abdollahi Pour, E.K. Huang, G. Chen, A. Haddadi, and B.M. Nguyen
Opto-Electronics Review (OER), Vol. 19, No. 3, June 2011, p. 46-54-- June 1, 2011 ...[Visit Journal]
Recent efforts to improve the performance of type-II InAs/GaSb superlattice photodiodes and focal plane arrays (FPA) have been reviewed. The theoretical bandstructure models have been discussed first. A review of recent developments in growth and characterization techniques is given. The efforts to improve the performance of MWIR photodiodes and focal plane arrays (FPAs) have been reviewed and the latest results have been reported. It is shown that these improvements has resulted in background limited performance (BLIP) of single element photodiodes up to 180 K. FPA shows a constant noise equivalent temperature difference (NEDT) of 11 mK up to 120 K and it shows human body imaging up to 170 K. [reprint (PDF)]
 
1.   Emerging materials for photonics
Miriam S. Vitiello, and Manijeh Razeghi
APL Materials 5, 03510-- March 31, 2017 ...[Visit Journal]
Photonics plays a major role in all aspects of human life. It revolutionized science by addressing fundamental scientific questions and by enabling key functions in many interdisciplinary fields spanning from quantum technologies to information andcommunicationscience,andfrombiomedicalresearchtoindustrialprocessmonitoring and life entertainment. [reprint (PDF)]
 
1.  Quantum cascade lasers that emit more light than heat
Y. Bai, S. Slivken, S. Kuboya, S.R. Darvish and M. Razeghi
Nature Photonics, February 2010, Vol. 4, p. 99-102-- February 1, 2010 ...[Visit Journal]
For any semiconductor lasers, the wall plug efficiency, that is, the portion of the injected electrical energy that can be converted into output optical energy, is one of the most important figures of merit. A device with a higher wall plug efficiency has a lower power demand and prolonged device lifetime due to its reduced self-heating. Since its invention, the power performance of the quantum cascade laser has improved tremendously. However, although the internal quantum efficiency can be engineered to be greater than 80% at low temperatures, the wall plug efficiency of a quantum cascade laser has never been demonstrated above 50% at any temperature. The best wall plug efficiency reported to date is 36% at 120 K. Here, we overcome the limiting factors using a single-well injector design and demonstrate 53% wall plug efficiency at 40 K with an emitting wavelength of 5 µm. In other words, we demonstrate a quantum cascade laser that produces more light than heat. [reprint (PDF)]
 
1.  Gain and recombination dynamics in photodetectors made with quantum nanostructures: The quantum dot in a well and the quantum well
B. Movaghar, S. Tsao, S. Abdollahi Pour, T. Yamanaka, and M. Razeghi
Physical Review B, Vol. 78, No. 11-- September 15, 2008 ...[Visit Journal]
We consider the problem of charge transport and recombination in semiconductor quantum well infrared photodetectors and quantum-dot-in-a-well infrared detectors. The photoexcited carrier relaxation is calculated using rigorous random-walk and diffusion methods, which take into account the finiteness of recombination cross sections, and if necessary the memory of the carrier generation point. In the present application, bias fields are high and it is sufficient to consider the drift limited regime. The photoconductive gain is discussed in a quantum-mechanical language, making it more transparent, especially with regard to understanding the bias and temperature dependence. Comparing experiment and theory, we can estimate the respective recombination times. The method developed here applies equally well to nanopillar structures, provided account is taken of changes in mobility and trapping. Finally, we also derive formulas for the photocurrent time decays, which in a clean system at high bias are sums of two exponentials. [reprint (PDF)]
 
1.  Non-equilibrium radiation of long wavelength InAs/GaSb superlattice photodiodes
D. Hoffman, A. Hood, F. Fuchs and M. Razeghi
Journal of Applied Physics 99-- February 15, 2006 ...[Visit Journal]
The emission behavior of binary-binary type-II InAs/GaSb superlattice photodiodes has been studied in the spectral range between 8 and 13 μm. With a radiometric calibration of the experimental setup the internal and external quantum efficiencies have been determined in the temperature range between 80 and 300 K for both the negative and positive luminescences. [reprint (PDF)]
 
1.  Dark current reduction in microjunction-based compound electron barrier type-II InAs/InAs1-xSbx superlattice-based long-wavelength infrared photodetectors
Romain Chevallier, Abbas Haddadi, Manijeh Razeghi
Proc. SPIE 10540, Quantum Sensing and Nano Electronics and Photonics XV Page. 1054007-1-- January 26, 2018 ...[Visit Journal]
Reduction of dark current density in microjunction-based InAs/InAs1-xSbx type-II superlattice long-wavelength infrared photodetectors was demonstrated. A double electron barrier design was used to suppress both generation-recombination and surface dark currents. The photodetectors exhibited high surface resistivity after passivation with SiO2, which permits the use of small size features without having strong surface leakage current degrading the electrical performance. Fabricating a microjunction structure (25×25 μm² mesas with 10×10 μm² microjunctions) with this photodetector double barrier design results in a dark current density of 6.3×10-6 A/cm² at 77 K. The device has an 8 μm cut-off wavelength at 77 K and exhibits a quantum efficiency of 31% for a 2 μm-thick absorption region, which results in a specific detectivity value of 1.2×1012 cm·Hz1/2/W at 77 K. [reprint (PDF)]
 
1.  Beryllium compensation doping of InAs/GaSb infrared superlattice photodiodes
D. Hoffman, B.M. Nguyen, P.Y. Delaunay, A. Hood, M. Razeghi and J. Pellegrino
Applied Physics Letters, Vol. 91, No. 14, p. 143507-1-- October 1, 2007 ...[Visit Journal]
Capacitance-voltage measurements in conjunction with dark current measurements on InAs/GaSb long wavelength infrared superlattice photodiodes grown by molecular-beam epitaxy on GaSb substrates are reported. By varying the beryllium concentration in the InAs layer of the active region, the residually n-type superlattice is compensated to become slightly p-type. By adjusting the doping, the dominant dark current mechanism can be varied from diffusion to Zener tunneling. Minimization of the dark current leads to an increase of the zero-bias differential resistance from less than 4 to 32 cm2 for a 100% cutoff of 12.05 µm [reprint (PDF)]
 
1.  High Power 0.98 μm GaInAs/GaAs/GaInP Multiple Quantum Well Laser
K. Mobarhan, M. Razeghi, G. Marquebielle and E. Vassilaki
Journal of Applied Physics 72 (9)-- November 1, 1992 ...[Visit Journal]
We report the fabrication of high quality Ga0.8In0.2As/GaAs/Ga0.51In0.49P multiple quantum well laser emitting at 0.98 μm grown by low pressure metalorganic chemical vapor deposition. Continuous wave operation with output power of 500 mW per facet was achieved at room temperature for a broad area laser with 130 μm width and 300 μm cavity length. This is an unusually high value of output power for this wavelength laser in this material system. The differential quantum efficiency exceeded 75% with excellent homogeneity and uniformity. The characteristic temperature, T0 was in the range of 120–130 K. [reprint (PDF)]
 
1.  First cw operation of a Ga0.25In0.75As0.5P0.5‐InP laser on a silicon substrate
M. Razeghi; M. Defour; R. Blondeau; F. Omnes; P. Maurel; O. Acher; F. Brillouet; J. C. C‐Fan; J. Salerno
Appl. Phys. Lett. 53, 2389–2390 (1988) -- December 12, 1988 ...[Visit Journal]
We report the first successful room-temperature cw operations of a GaO. 25 1110.75 ASo. 5 po. s -InP buried ridge structure laser emitting at 1.3 f-tm grown by two-step low-pressure metalorganic chemical vapor deposition on a silicon substrate. An output power of 20 m W with an external quantum efficiency of 16% at room temperature has been obtained. A threshold current as low as 45 rnA under cw operation at room temperature has been measured. The first cw aging test at room temperature, at 2 mW during 5 h, shows a very low degradation (Ill 11,;;5%). [reprint (PDF)]
 
1.  Spatial Noise and Correctability of Type-II InAs/GaSb Focal Plane Arrays
P.Y. Delaunay and M. Razeghi
IEEE Journal of Quanutm Electronics, April 2010, Vol. 46, No. 4, p. 584-588-- April 1, 2010 ...[Visit Journal]
A long wavelength infrared focal plane array based on Type-II InAs/GaSb superlattices was fabricated and characterized at 80 K. The noise equivalent temperature difference of the array was measured as low as 23 mK (f# = 2), for an integration time of 0.129 ms. The spatial noise of the array was dominated by the nonuniformity of the illumination through the circular aperture. A standard two-point nonuniformity correction improved the inhomogeneity equivalent temperature difference to 16 mK. The correctability just after calibration was 0.6. The long-term stability time was superior to 25 hours. [reprint (PDF)]
 
1.  Performance characteristics of high-purity mid-wave and long-wave infrared type-II InAs/GaSb superlattice infrared photodiodes
A. Hood, M. Razeghi, V. Nathan and M.Z. Tidrow
SPIE Conference, San Jose, CA, Vol. 6127, pp. 61270U-- January 23, 2006 ...[Visit Journal]
The authors report on recent advances in the development of mid-, long-, and very long-wavelength infrared (MWIR, LWIR, and VLWIR) Type-II InAs/GaSb superlattice infrared photodiodes. The residual carrier background of binary Type-II InAs/GaSb superlattice photodiodes of cut-off wavelengths around 5 µm has been studied in the temperature range between 10 and 200 K. A four-point, capacitance-voltage technique on mid-wavelength and long-wavelength Type-II InAs/GaSb superlattice infrared photodiodes reveal residual background concentrations around 5×1014 cm-3. Additionally, recent progress towards LWIR photodiodes for focal plane array imaging applications is presented. [reprint (PDF)]
 
1.  Room temperature continuous wave, monolithic tunable THz sources based on highly efficient mid-infrared quantum cascade lasers
Quanyong Lu, Donghai Wu, Saumya Sengupta, Steven Slivken, Manijeh Razeghi
Nature Scientific Reports 6, Article number: 23595-- March 24, 2016 ...[Visit Journal]
A compact, high power, room temperature continuous wave terahertz source emitting in a wide frequency range (ν ~ 1–5 THz) is of great importance to terahertz system development for applications in spectroscopy, communication, sensing, and imaging. Here, we present a strong-coupled strain-balanced quantum cascade laser design for efficient THz generation based on intracavity difference frequency generation. Room temperature continuous wave emission at 3.41 THz with a side-mode suppression ratio of 30 dB and output power up to 14 μW is achieved with a wall-plug efficiency about one order of magnitude higher than previous demonstrations. With this highly efficient design, continuous wave, single mode THz emissions with a wide frequency tuning range of 2.06–4.35 THz and an output power up to 4.2 μW are demonstrated at room temperature from two monolithic three-section sampled grating distributed feedback-distributed Bragg reflector lasers. [reprint (PDF)]
 
1.  III-Nitride Optoelectronic Devices: From Ultraviolet Toward Terahertz
M. Razeghi
IEEE Photonics Journal-Breakthroughs in Photonics 2010, Vol. 3, No. 2, p. 263-267-- April 26, 2011 ...[Visit Journal]
We review III-Nitride optoelectronic device technologies with an emphasis on recent breakthroughs. We start with a brief summary of historical accomplishments and then report the state-of-the-art in three key spectral regimes: (1) Ultraviolet (AlGaN-based avalanche photodiodes, single photon detectors, focal plane arrays, and light emitting diodes), (2) Visible (InGaN-based solid state lighting, lasers, and solar cells), and (3) Near-, mid-infrared, and terahertz (AlGaN/GaN-based gap-engineered intersubband devices). We also describe future trends in III-Nitride optoelectronic devices. [reprint (PDF)]
 
1.  Multi-band SWIR-MWIR-LWIR Type-II superlattice based infrared photodetector
Manijeh Razeghi, Arash Dehzangi, Jiakai Li
Results in Optics Volume 2, January 2021, 100054 https://doi.org/10.1016/j.rio.2021.100054 ...[Visit Journal]
Type-II InAs/GaSb superlattices (T2SLs) has drawn a lot of attention since it was introduced in 1970, especially for infrared detection as a system of multi-interacting quantum wells. In recent years, T2SL material system has experienced incredible improvements in material quality, device structure designs and device fabrication process, which elevated the performances of T2SL-based photo-detectors to a comparable level to the state-of-the-art material systems for infrared detection such as Mercury Cadmium Telluride (MCT). As a pioneer in the field, center for quantum devices (CQD) has been involved in growth, design, characterization, and introduction of T2SL material system for infrared photodetection. In this review paper, we will present the latest development of bias-selectable multi-band infrared photodetectors at the CQD, based on InAs/GaSb/AlSb and InAs/InAs1-xSbx type-II superlattice. [reprint (PDF)]
 
1.  High Performance Quantum Cascade Lasers Grown by Gas-Source Molecular Beam Epitaxy
M. Razeghi, S. Slivken, A. Tahraoui and A. Matlis
SPIE Conference, San Jose, CA, -- January 22, 2001 ...[Visit Journal]
Recent improvements in quantum cascade laser technology have led to a number of very impressive results. This paper is a brief summary of the technological development and state-of- the-art performance of quantum cascade lasers produced at the Center for Quantum Devices. Laser design will be discussed, as well as experimental details of device fabrication. Room temperature QCL operation has been reported for lasers emitting between 5 - 11 μm, with 9 - 11 μm lasers operating up to 425 K. We also demonstrate record room temperature peak output powers at 9 and 11 μm(2.5 W and 1 W respectively) as well as record low 80 K threshold current densities (250 A/cm²) for some laser designs. Finally, some of the current limitations to laser efficiency are mentioned, as well as a means to combat them. [reprint (PDF)]
 
1.  Temperature dependence of the dark current and activation energy at avalanche onset of GaN Avalanche Photodiodes
M.P. Ulmer, E. Cicek, R. McClintock, Z. Vashaei and M. Razeghi
SPIE Proceedings, Vol. 8460, p. 84601G-1-- August 15, 2012 ...[Visit Journal]
We report a study of the performance of an avalanche photodiode (APD) as a function of temperature from 564 K to 74 K. The dark current at avalanche onset decreases from 564 K to 74 K by approximately a factor of 125 and from 300 K to 74K the dark current at avalanche offset is reduced by a factor of about 10. The drop would have been considerably larger if the activation energy at avalanche onset (Ea) did not also decrease with decreasing temperature. These data give us insights into how to improve the single-photon counting performance of a GaN based ADP. [reprint (PDF)]
 
1.  Broadband monolithically-tunable quantum cascade lasers
Wenjia Zhou, Ryan McClintock, Donghai Wu, Steven Slivken, Manijeh Razeghi
Proc. SPIE 10540, Quantum Sensing and Nano Electronics and Photonics XV, 105400A-- January 26, 2018 ...[Visit Journal]
Mid-infrared lasers, emitting in the spectral region of 3-12 μm that contain strong characteristic vibrational transitions of many important molecules, are highly desirable for spectroscopy sensing applications. High efficiency quantum cascade lasers have been demonstrated with up to watt-level output power in the mid-infrared region. However, the wide wavelength tuning, which is critical for spectroscopy applications, is still largely relying on incorporating external gratings, which have stability issues. Here, we demonstrate the development a monolithic, widely tunable quantum cascade laser source emitting between 6.1 and 9.2 μm through an on-chip integration of a sampled grating distributed feedback tunable laser array with a beam combiner. A compact tunable laser system was built to drive the individual lasers within the array and coordinate the driving of the laser array to produce desired wavelength. A broadband spectral measurement (520cm-1) of methane shows excellent agreement with Fourier transform infrared spectrometer measurement. Further optimizations have led to high performance monolithic tunable QCLs with up to 65 mW output while delivering fundamental mode outputs. [reprint (PDF)]
 

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