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17.  GaN nanostructured p-i-n photodiodes
J.L. Pau, C. Bayram, P. Giedraitis, R. McClintock, and M. Razeghi
Applied Physics Letters, Vol. 93, No. 22, p. 221104-1-- December 1, 2008 ...[Visit Journal]
We report the fabrication of nanostructured p-i-n photodiodes based on GaN. Each device comprises arrays of ~200 nm diameter and 520 nm tall nanopillars on a 1 µm period, fabricated by e-beam lithography. Strong rectifying behavior was obtained with an average reverse current per nanopillar of 5 fA at −5 V. In contrast to conventional GaN diodes, nanostructured devices reproducibly show ideality factors lower than 2. Enhanced tunneling through sidewall surface states is proposed as the responsible mechanism for this behavior. Under backillumination, the quantum efficiency in nanostructured devices is partly limited by the collection efficiency of holes into the nanopillars. [reprint (PDF)]
 
17.  Observation of Room Temperature Surface-Emitting Stimulated Emission from GaN:Ge by Optical pumping
X. Zhang, P. Kung, A. Saxler, D. Walker, and M. Razeghi
Journal of Applied Physics 80 (11)-- December 1, 1996 ...[Visit Journal]
Optically pumped surface-emitting stimulated emission at room temperature was observed from GaN:Ge grown by metalorganic chemical vapor deposition. The sample was optically pumped perpendicularly on the top surface while the stimulated emission was collected from the back colinearly with the pump beam. The cavity was formed by the GaN/air and GaN/sapphire interfaces without any other structure. The stimulated emission was gain guided by the pump beam. The threshold optical pump density for stimulated emission was approximately 2.8 MW/cm² and the linewidth was 2.5 nm. The emission from GaN:Ge showed a redshift as the pump density increased. The comparison between theoretical calculations and experimental results suggested that many-body interactions can account well for the redshift. [reprint (PDF)]
 
17.  Recent progress of quantum cascade laser research from 3 to 12 μm at the Center for Quantum Devices
MANIJEH RAZEGHI,* WENJIA ZHOU,STEVEN SLIVKEN,QUAN-YONG LU,DONGHAI WU, AND RYAN MCCLINTOC
Applied Optics Vol. 56, No. 31 -- October 10, 2017 ...[Visit Journal]
The quantum cascade laser (QCL) is becoming the leading laser source in the mid-infrared (mid-IR) range, which contains two atmospheric transmission windows and many molecular fingerprint absorption features. Since its first demonstration in 1994, the QCL has undergone tremendous development in terms of the output power, wall plug efficiency, wavelength coverage, tunability and beam quality. At the Center for Quantum Devices, we have demonstrated high-power continuous wave operation of QCLs covering a wide wavelength range from 3 to 12 μm, with power output up to 5.1 W at room temperature. Recent research has resulted in power scaling in pulsed mode with up to 203 W output, electrically tunable QCLs based on monolithic sampled grating design, heterogeneous QCLs with a broad spectral gain, broadly tunable on-chip beam-combined QCLs, QCL-based mid-IR frequency combs, and fundamental mode surface emitting quantum cascade ring lasers. The developed QCLs will be the basis for a number of next-generation spectroscopy and sensing systems. [reprint (PDF)]
 
17.  Development of high power, InP-based quantum cascade lasers on alternative epitaxial platforms
Steven Slivken, Nirajman Shrestha, Manijeh Razeghi
Proc. of SPIE Vol. 12895, Quantum Sensing and Nano Electronics and Photonics XX, 1289503 (28 January - 1 February 2024, San Francisco) doi: 10.1117/12.3009335 ...[Visit Journal]
In this talk, challenges and solutions associated with the monolithic, epitaxial integration of mid- and longwave- infrared, InP-based quantum cascade lasers on GaAs and Si wafers will be discussed. Initial results, including room temperature, high power, and continuous wave operation, will be described. [reprint (PDF)]
 
17.  On the performance and surface passivation of type-II InAs/GaSb superlattice photodiodes for the very-long- wavelength infrared
A. Hood, M. Razeghi, E. Aifer, G.J. Brown
Applied Physics Letters 87 (1)-- October 10, 2005 ...[Visit Journal]
We demonstrate very-long-wavelength infrared Type-II InAs/GaSb superlattice photodiodes with a cutoff wavelength (λc,50%) of 17 μm. We observed a zero-bias, peak Johnson noise-limited detectivity of 7.63×109 cm·Hz½/W at 77 K with a 90%-10% cutoff width of 17 meV, and quantum efficiency of 30%. Variable area diode zero-bias resistance-area product (R0A) measurements indicated that silicon dioxide passivation increased surface resistivity by nearly a factor of 5, over unpassivated photodiodes, and increased overall R0A uniformity. The bulk R0A at 77 K was found to be 0.08 Ω·cm2, with RA increasing more than twofold at 25 mV reverse bias. [reprint (PDF)]
 
17.  AlGaN-based deep-ultraviolet 320 x 256 focal plane array
E. Cicek, Z. Vashaei, E.K. Huang, R. McClintock and M. Razeghi
OSA Optics Letters, Vol. 37, No. 5, p. 896-898-- March 1, 2012 ...[Visit Journal]
We report the synthesis, fabrication, and testing of a 320 × 256 focal plane array (FPA) of back-illuminated, solarblind, p-i-n, AlxGa1−xN–based detectors, fully realized within our research laboratory. We implemented a pulse atomic layer deposition technique for the metalorganic chemical vapor deposition growth of thick, high-quality, crack-free, high Al composition AlxGa1−xN layers. The FPA is hybridized to a matching ISC 9809 readout integrated circuit and operated in a SE-IR camera system. Solar-blind operation is observed throughout the array with peak detection occurring at wavelengths of 256 nm and lower, and falling off three orders of magnitude by ∼285 nm. By developing an opaque masking technology, the visible response of the ROIC is significantly reduced; thus the need for external filtering to achieve solar- and visible-blind operation is eliminated. This allows the FPA to achieve high external quantum efficiency (EQE); at 254 nm, average pixels showed unbiased peak responsivity of 75 mA∕W, which corresponds to an EQE of ∼37%. Finally, the uniformity of the FPA and imaging properties are investigated. [reprint (PDF)]
 
17.  Room temperature quantum cascade laser with ∼ 31% wall-plug efficiency
F. Wang, S. Slivken, D. H. Wu, and M. Razeghi
AIP Advances 10, 075012-- July 14, 2020 ...[Visit Journal]
In this article, we report the demonstration of a quantum cascade laser emitting at λ ≈ 4.9 μm with a wall-plug efficiency of ∼31% and an output power of ∼23 W in pulsed operation at room temperature with 50 cascade stages (Ns). With proper fabrication and packaging, this buried ridge quantum cascade laser with a cavity length of 5 mm delivers more than ∼15 W output power, and its wall-plug efficiency exceeds ∼20% at 100 °C. The experimental results of the lasers are well in agreement with the numerical predictions. [reprint (PDF)]
 
17.  Temperature dependent characteristics of λ ~ 3.8 µm room-temperature continuous-wave quantum-cascade lasers
J.S. Yu, A. Evans, S. Slivken, S.R. Darvish and M. Razeghi
Applied Physics Letters, 88 (25)-- June 19, 2006 ...[Visit Journal]
The highest-performance device displays pulsed laser action at wavelengths between 3.4 and 3.6 μm, for temperatures up to 300 K, with a low temperature (80 K) threshold current density of approximately 2.6 kA/cm2, and a characteristic temperature of T0~130 K. The shortest wavelength QCL (λ ~ 3.05 μm) has a higher threshold current density (~12 kA/cm2 at T=20 K) and operates in pulsed mode at temperatures up to 110 K. [reprint (PDF)]
 
17.  High-Power CW Mid-IR Quantum Cascade Lasers
J.R. Meyer, W.W. Bewley, J.R. Lindle, I. Vurgaftman, A.J. Evans, J.S. Yu, S. Slivken, and M. Razeghi
SPIE Conference, Jose, CA, -- January 22, 2005 ...[Visit Journal]
We report the cw operation of quantum cascade lasers that do not require cryogenic cooling and emit at λ = 4.7-6.2 µm. At 200 K, more than 1 W of output power is obtained from 12-µm-wide stripes, with a wall-plug efficiency (ηwall) near 10%. Room-temperature cw operation has also been demonstrated, with a maximum output power of 640 mW (ηwall = 4.5%) at 6 µm and 260 mW (ηwall = 2.3%) at 4.8 µm. Far-field characterization indicates that whereas the beam quality remains close to the diffraction limit in all of the tested lasers, in the devices emitting at 6.2 µm the beam tends to steer by as much as 5-10° degrees in either direction with varying temperature and pump current. [reprint (PDF)]
 
17.  High operating temperature 320 x 256 middle-wavelength infrared focal plane array imaging based on an InAs/InGaAs/InAlAs/InP quantum dot infrared photodetector
S. Tsao, H. Lim, W. Zhang, and M. Razeghi
Virtual Journal of Nanoscale Science and Technology-- May 28, 2007 ...[Visit Journal][reprint (PDF)]
 
17.  High-power, continuous-operation intersubband laser for wavelengths greater than 10 micron
S. Slivken, A. Evans, W. Zhang and M. Razeghi
Applied Physics Letters, Vol. 90, No. 15, p. 151115-1-- April 9, 2007 ...[Visit Journal]
In this letter, high-power continuous-wave emission (>100 mW) and high temperature operation (358 K) at a wavelength of 10.6 µm is demonstrated using an individual diode laser. This wavelength is advantageous for many medium-power applications previously reserved for the carbon dioxide laser. Improved performance was accomplished using industry-standard InP-based materials and by careful attention to design, growth, and fabrication limitations specific to long-wave infrared semiconductor lasers. The main problem areas are explored with regard to laser performance, and general steps are outlined to minimize their impact. [reprint (PDF)]
 
17.  Surface plasmon enhanced light emission from AlGaN-based ultraviolet light-emitting diodes grown on Si (111)
Chu-Young Cho, Yinjun Zhang, Erdem Cicek, Benjamin Rahnema, Yanbo Bai, Ryan McClintock, and Manijeh Razeghi
Appl. Phys. Lett. 102, 211110 (2013)-- May 31, 2013 ...[Visit Journal]
We report on the development of surface plasmon (SP) enhanced AlGaN-based multiple quantum wells (MQWs) ultraviolet (UV) light-emitting diodes (LEDs) grown on silicon (111) substrates. In order to generate SP-coupling with the radiating dipoles in MQWs, an aluminum layer is selectively deposited in holes etched in the top p-AlGaN to p-GaN layers. After flip-chip bonding and substrate removal, an optical output power of ∼1.2 mW is achieved at an emission wavelength of 346 nm; the output power of these UV LEDs with Al layer is increased by 45% compared to that of conventional UV LEDs without Al layer. This enhancement can be attributed to an increase in the spontaneous emission rate and improved internal quantum efficiency via resonance coupling between excitons in MQWs and SPs in the aluminum layer. [reprint (PDF)]
 
17.  Demonstration of high performance bias-selectable dual-band short-/mid-wavelength infrared photodetectors based on type-II InAs/GaSb/AlSb superlattices
A.M. Hoang, G. Chen, A. Haddadi and M. Razeghi
Applied Physics Letters, Vol. 102, No. 1, p. 011108-1-- January 7, 2013 ...[Visit Journal]
High performance bias-selectable dual-band short-/mid-wavelength infrared photodetector based on InAs/GaSb/AlSb type-II superlattice with designed cut-off wavelengths of 2 μm and 4 μm was demonstrated. At 150 K, the short-wave channel exhibited a quantum efficiency of 55%, a dark current density of 1.0 × 10−9 A/cm² at −50 mV bias voltage, providing an associated shot noise detectivity of 3.0 × 1013 Jones. The mid-wavelength channel exhibited a quantum efficiency of 33% and a dark current density of 2.6 × 10−5 A/cm² at 300 mV bias voltage, resulting in a detectivity of 4.0 × 1011 Jones. The spectral cross-talk between the two channels was also discussed for further optimization. [reprint (PDF)]
 
17.  Temperature dependence of threshold current density Jth and differential efficiency of High Power InGaAsP/GaAs ( λ = 0.8 μm) lasers
H. Yi, J. Diaz, I. Eliashevich, M. Stanton, M. Erdtmann, X. He, L. Wang, and M. Razeghi
Applied Physics Letters 66 (3)-- January 16, 1995 ...[Visit Journal]
An experimental and theoretical study on temperature dependence of the threshold current density Jth and differential efficiency ηd for the InGaAsP/GaAs laser diodes emitting at λ=0.8 μm was performed. Threshold current density Jth increases and differential efficiency ηd decreases as temperature is increased mainly because of thermal broadening of the gain spectrum. However, the measured temperature dependence of Jth and ηd could not be explained when only this effect was considered. In this letter, the temperature dependence of momentum relaxation rate ℏ/τ of carriers was investigated by performing the photoluminescence study. At high temperature, increase of the momentum relaxation rate ℏ/τ leads to reduction of the gain and mobility and increase of the optical loss, causing higher Jth and lower ηd as experimentally observed. The resulting theoretical model provides a good explanation for the mechanism of the increase of Jth and decrease of ηd. [reprint (PDF)]
 
17.  Uncooled operation of Type-II InAs/GaSb superlattice photodiodes in the mid- wavelength infrared range
Y. Wei, A. Hood, H. Yau, A. Gin, M. Razeghi, M.Z. Tidrow, V. Natha
Applied Physics Letters, 86 (23)-- June 6, 2005 ...[Visit Journal]
We report high performance uncooled midwavelength infrared photodiodes based on interface-engineered InAs/GaSb superlattice. Two distinct superlattices were designed with a cutoff wavelength around 5 µm for room temperature and 77 K. The device quantum efficiency reached more than 25% with responsivity around 1 A/W. Detectivity was measured around 109 cm·Hz½/W at room temperature and 1.5×1013 cm·Hz½/W at 77 K under zero bias. The devices were without antireflective coating. The device quantum efficiency stays at nearly the same level within this temperature range. Additionally, Wannier–Stark oscillations in the Zener tunneling current were observed up to room temperature. [reprint (PDF)]
 
17.  GaInN/GaN Multi-Quantum Well Laser Diodes Grown by Low-Pressure Metalorganic Chemical Vapor Deposition
P. Kung, A. Saxler, D. Walker, A. Rybaltowski, X. Zhang, J. Diaz, and M. Razeghi
MRS Internet Journal of Nitride Semiconductor Research 3 (1)-- January 1, 1998 ...[Visit Journal]
We report the growth, fabrication and characterization of GaInN/GaN multi-quantum well lasers grown on (00·1) sapphire substrates by low pressure metalorganic chemical vapor deposition. The threshold current density of a 1800 µm long cavity length laser was 1.4 kA/cm² with a threshold voltage of 25 V. These lasers exhibited series resistances of 13 and 14 Ω at 300 and 79 K, respectively. [reprint (PDF)]
 
17.  AlGaN-based deep UV light emitting diodes with peak emission below 255 nm
A. Yasan, R. McClintock, K. Mayes, P. Kung, and M. Razeghi
SPIE Conference, Jose, CA, Vol. 5732, pp. 197-- January 22, 2005 ...[Visit Journal]
We report on the growth and fabrication of AlGaN-based deep ultraviolet light-emitting diodes (LEDs) with peak emission of below 255 nm. In order to achieve such short wavelength UV LEDs, the Al mole fractions in the device layers should be greater than ~60%. This introdues serious challenges on the growth and doping of AlxGa1-xN epilayers. However, with the aid of a high-quality AlN template layer and refinement of the growth conditions we have been able to demonstrate UV LEDs emitting below 255 nm. [reprint (PDF)]
 
17.  High Performance Solar-Blind Ultraviolet Focal Plane Arrays Based on AlGaN
Erdem Cicek, Ryan McClintock, Abbas Haddadi, William A. Gaviria Rojas, and Manijeh Razeghi
IEEE Journal of Quantum Electronics, Vol. 50, Issue 8, p 591-595-- August 1, 2014 ...[Visit Journal]
We report on solar-blind ultraviolet, AlxGa1-x N- based,p-i-n,focal plane array (FPA) with 92% operability. At the peak detection wavelength of 278 nm, 320×256-FP A-pixel showed unbiased peak external quantum efficiency (EQE) and responsivity of 49% and 109 mA/W, respectively, increasing to 66% under 5 volts of reverse bias. Electrical measurements yielded a low-dark current density: <7×10-9A/cm², at FPA operating voltage of 2 volts of reverse bias. [reprint (PDF)]
 
17.  Pressure dependence study of the effective mass in Ga0.47In0.53As/InP heterojunctions
D. Gauthier , L. Dmowski, J.C. Portal D. Leadley, M.A. Hopkins , M.A. Brummell , R.J. Nicholas, M. Razeghi, P. Maurel
D. Gauthier, L. Dmowski, J.C. Portal, D. Leadley, M.A. Hopkins, M.A. Brummell, R.J. Nicholas, M. Razeghi, P. Maurel, Pressure dependence study of the effective mass in Ga0.47In0.53As/InP heterojunctions, Superlattices and Microstructures, Volume 4, Issue 2, 1988, Pages 201-206-- August 17, 1987 ...[Visit Journal]
A study of the effective mass in GaInAs/InP heterojunctions under hydrostatic pressure up to 15 kbars is presented. Earlier results have shown the importance of hydrostatic pressure effects on the band parameters of the heterojunction to explain the experimental decrease of the carrier concentration with pressure at the interface (1). Here magnetophonon resonance experiments are performed to work out the increase of mass with pressure in our samples. The effective mass at atmospheric pressure is deduced from high temperature cyclotron resonance experiments and then used to calculate the frequency of the phonon interacting with the 2D electron gas (wo). The value of wo is found to be dependent on the carrier concentration of the measured samples. The lowest value is found for the highest carrier concentration sample. A band edge effective mass increase of 1 ± .1% kbar is found in the highest carrier concentration sample. This is two times smaller than the rate found experimentally in GaInAs bulk material and slightly smaller than in an AlInAs/GaInAs heterojunction. The experimental increase could be fitted with multiband k.p theory assuming no pressure dependence for the conduction band-valence band matrix element Ep. However at lower concentration a variation of the matrix element Ep with pressure has to be considered. [reprint (PDF)]
 
17.  Microstructural compositional, and optical characterization of GaN grown by metal organic vapor phase epitaxy on ZnO epilayers
D.J. Rogers, F. Hosseini Teherani, T. Moudakir, S. Gautier, F. Jomard, M. Molinari, M. Troyon, D. McGrouther, J.N. Chapman, M. Razeghi and A. Ougazzaden
Journal of Vacuum Science and Technology B, Vol. 27, No. 3, May/June, p. 1655-1657-- May 29, 2009 ...[Visit Journal]
This article presents the results of microstructural, compositional, and optical characterization of GaN films grown on ZnO buffered c-sapphire substrates. Transmission electron microscopy showed epitaxy between the GaN and the ZnO, no degradation of the ZnO buffer layer, and no evidence of any interfacial compounds. Secondary ion mass spectroscopy revealed negligible Zn signal in the GaN layer away from the GaN/ZnO interface. After chemical removal of the ZnO, room temperature (RT) cathodoluminescence spectra had a single main peak centered at ~ 368 nm (~3.37 eV), which was indexed as near-band-edge (NBE) emission from the GaN layer. There was no evidence of the ZnO NBE peak, centered at ~379 nm (~3.28 eV), which had been observed in RT photoluminescence spectra prior to removal of the ZnO. [reprint (PDF)]
 
17.  Hole-initiated multiplication in back-illuminated GaN avalanche photodiodes
R. McClintock, J.L. Pau, K. Minder, C. Bayram, P. Kung and M. Razeghi
Applied Physics Letters, Vol. 90 No. 14, p. 141112-1-- April 2, 2007 ...[Visit Journal]
Avalanche p-i-n photodiodes were fabricated on AlN templates for back illumination. Structures with different intrinsic layer thicknesses were tested. A critical electric field of 2.73 MV/cm was estimated from the variation of the breakdown voltage with thickness. From the device response under back and front illumination and the consequent selective injection of holes and electrons in the junction, ionization coefficients were obtained for GaN. The hole ionization coefficient was found to be higher than the electron ionization coefficient as predicted by theory. Excess multiplication noise factors were also calculated for back and front illumination, and indicated a higher noise contribution for electron injection. [reprint (PDF)]
 
17.  Frequency-Shifted Polaron Coupling in Ga0.47In0.53As Heterojunctions
R. J. Nicholas*, L. C. Brunel, S. Huant, K. Karrai, and J. C. Portal† M. A. Brummell M. Razeghi K. Y. Cheng and A. Y. Cho
Phys. Rev. Lett. 55, 883 – 1985-- August 19, 1985 ...[Visit Journal]
Frequency-dependent cyclotron-resonance measurements are reported on Ga0.47In0.53As-InP and Ga0.47In0.53A⁢s−A⁢l0.48In0.52As heterojunctions. Discontinuities in the effective mass occur at two frequencies as a result of resonant polaron coupling with both optic-phonon modes present in the Ga0.47In0.53As alloy. The coupling occurs at the frequencies at the TO phonons, in contrast to measurements on bulk materials. Possible changes in the screening and polarization of the optic-phonon modes are considered. [reprint (PDF)]
 
17.  Advances in UV sensitive visible blind GaN-based APDs
M. Ulmer, R. McClintock and M. Razeghi
SPIE Proceedings, San Francisco, CA (January 22-27, 2011), Vol. 7945, p. 79451G-- January 23, 2011 ...[Visit Journal]
In this paper, we describe our current state-of-the-art process of making visible-blind APDs based on GaN. We have grown our material on both conventional sapphire and low dislocation density free-standing c- and m-plane GaN substrates. Leakage current, gain, and single photon detection efficiency (SPDE) of these APDs are compared. The spectral response and Geiger-mode photon counting performance of UV APDs are studied under low photon fluxes. Single photon detection capabilities with over 30% are demonstrated. We show how with pulse height discrimination the Geiger-mode operation conditions can be optimized for enhanced SPDE versus dark counts. [reprint (PDF)]
 
17.  Well Resolved Room Temperature Photovoltage Spectra of GaAs-GaInP Quantum Wells and Superlattices
Xiaoguang He and Manijeh Razeghi
Applied Physics Letters 62 (6)-- February 8, 1993 ...[Visit Journal]
We report the first well resolved room‐temperature photovoltage spectra due to the sublevel transitions in the GaInP‐GaAs superlattices and multiquantum wells grown by low pressure metalorganic chemical vapor deposition. Sharp well resolved peaks attributed to exciton absorption of the electron‐to‐light hole and electron‐to‐heavy hole have been observed at room temperature. This indicates that GaAs‐GaInP is a promising material for the application of the modulators, optical switches, and optical bistable divices. Satisfactory agreements between experimental measurements and theoretical results have been obtained. These results demonstrate that photovoltage spectroscopy is a simple, but very powerful tool to study quantum confinement structures.   [reprint (PDF)]
 
17.  Type-II superlattice photodetectors for MWIR to VLWIR focal plane arrays
M. Razeghi, Y. Wei, A. Hood, D. Hoffman, B.M. Nguyen, P.Y. Delaunay, E. Michel and R. McClintock
SPIE Infrared Technology and Applications Conference, April 17-21, 2006, Orlando, FL Proceedings – Infrared Technology and Applications XXXII, Vol. 6206, p. 62060N-1-- April 21, 2006 ...[Visit Journal]
Results obtained on GaSb/InAs Type-II superlattices have shown performance comparable to HgCdTe detectors, with the promise of higher performance due to reduced Auger recombination and dark current through improvements in device design and material quality. In this paper, we discuss advancements in Type-II IR sensors that cover the 3 to > 30 µm wavelength range. Specific topics covered will be device design and modeling using the Empirical Tight Binding Method (ETBM), material growth and characterization, device fabrication and testing, as well as focal plane array processing and imaging. Imaging has been demonstrated at room temperature for the first time with a 5 µm cutoff wavelength 256×256 focal plane array. [reprint (PDF)]
 

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