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2.  Photonic crystal distributed feedback quantum cascade lasers with 12 W output power
Y. Bai, B. Gokden, S.R. Darvish, S. Slivken, and M. Razeghi
Applied Physics Letters, Vol. 95, No. 3-- July 20, 2009 ...[Visit Journal]
We demonstrate room temperature, high power, and diffraction limited operation of photonic crystal distributed feedback (PCDFB) quantum cascade lasers emitting around 4.7 µm. PCDFB gratings with three distinctive periods are fabricated on the same wafer. Peak output power up to 12 W is demonstrated. Lasers with different periods show expected wavelength shifts according to the design. Dual mode spectra are attributed to a purer index coupling by putting the grating layer 100 nm away from the laser core. Single lobed diffraction limited far field profiles are observed. [reprint (PDF)]
 
2.  Type-II Superlattices and Quantum Cascade Lasers for MWIR and LWIR Free-Space Communications
A. Hood, A. Evans and M. Razeghi
SPIE Conference, January 20-25, 2008, San Jose, CA Proceedings – Quantum Sensing and Nanophotonic Devices V, Vol. 6900, p. 690005-1-9.-- February 1, 2008 ...[Visit Journal]
Free-space optical communications has recently been touted as a solution to the "last mile" bottleneck of high-speed data networks providing highly secure, short to long range, and high-bandwidth connections. However, commercial near infrared systems experience atmospheric scattering losses and scintillation effects which can adversely affect a link's operating budget. By moving the operating wavelength into the mid- or long-wavelength infrared enhanced link uptimes and increased operating range can be achieved due to less susceptibility to atmospheric affects. The combination of room-temperature, continuous-wave, high-power quantum cascade lasers and high operating temperature type-II superlattice photodetectors offers the benefits of mid- and long-wavelength infrared systems as well as practical operating conditions for next generation free-space communications systems. [reprint (PDF)]
 
2.  Very high quantum efficiency in type-II InAs/GaSb superlattice photodiode with cutoff of 12 µm
B.M. Nguyen, D. Hoffman, Y. Wei, P.Y. Delaunay, A. Hood and M. Razeghi
Applied Physics Letters, Vol. 90, No. 23, p. 231108-1-- June 4, 2007 ...[Visit Journal]
The authors report the dependence of the quantum efficiency on device thickness of Type-II InAs/GaSb superlattice photodetectors with a cutoff wavelength around 12 µm. The quantum efficiency and responsivity show a clear delineation in comparison to the device thickness. An external single-pass quantum efficiency of 54% is obtained for a 12 µm cutoff wavelength photodiodes with a -region thickness of 6.0 µm. The R0A value is kept stable for the range of structure thicknesses allowing for a specific detectivity (2.2×1011 cm·Hz½/W). [reprint (PDF)]
 
2.  High-power λ ~ 9.5 µm quantum-cascade lasers operating above room temperature in continuous-wave mode
J.S. Yu, S. Slivken, A. Evans, S.R. Darvish, J. Nguyen, and M. Razeghi
Applied Physics Letters, 88 (9)-- February 27, 2006 ...[Visit Journal]
We report high-power continuous-wave (cw) operation of λ~9.5 μm quantum-cascade lasers to a temperature of 318 K. A high-reflectivity-coated 19-μm-wide and 3-mm-long device exhibits cw output powers as high as 150 mW at 288 K and still 22 mW at 318 K. In cw operation at 298 K, a threshold current density of 1.57 kA/cm2, a slope efficiency of 391 mW/A, and a maximum wall-plug efficiency of 0.71% are obtained. [reprint (PDF)]
 
2.  Beam Steering in High-Power CW Quantum Cascade Lasers
W.W. Bewley, J.R. Lindle, C.S. Kim, I. Vurgaftman, J.R. Meyer, A.J. Evans, J.S. Yu, S. Slivken, and M. Razeghi
IEEE Journal of Quantum Electronics, 41 (6)-- June 1, 2005 ...[Visit Journal]
We report the light-current (L-I), spectral, and far-field characteristics of quantum cascade lasers (QCLs) with seven different wavelengths in the λ=4.3 to 6.3 μm range. In continuous-wave (CW) mode, the narrow-stripe (≈13 μm) epitaxial- side-up devices operated at temperatures up to 340 K, while at 295 K the CW output power was as high as 640 mW with a wallplug efficiency of 4.5%. All devices with λ≥4.7 μm achieved room-temperature CW operation, and at T=200 K several produced powers exceeding 1 W with ≈10% wallplug efficiency. The data indicated both spectral and spatial instabilities of the optical modes. For example, minor variations of the current often produced nonmonotonic hopping between spectra with envelopes as narrow as 5-10 nm or as broad as 200-250 nm. Bistable beam steering, by far-field angles of up to ±12° from the facet normal, also occurred, although even in extreme cases the beam quality never became worse than twice the diffraction limit. The observed steering is consistent with a theory for interference and beating between the two lowest order lateral modes. We also describe simulations of a wide-stripe photonic-crystal distributed-feedback QCL, which based on the current material quality is projected to emit multiple watts of CW power into a single-mode beam at T=200 K. [reprint (PDF)]
 
2.  Demonstration of 256x256 Focal Plane Arrays Based on Al-free GaInAs/InP QWIP
J. Jiang, K. Mi, R. McClintock, M. Razeghi, G.J. Brown, and C. Jelen
IEEE Photonics Technology Letters 15 (9)-- September 1, 2003 ...[Visit Journal]
We report the first demonstration of an infrared focal plane array based on aluminum-free GaInAs-InP quantum-well infrared photodetectors (QWIPs).A unique positive lithography method was developed to perform indium-bump liftoff. The noise equivalent differential temperature (NEΔT) of 29 mK was achieved at 70 K with f/2 optics. [reprint (PDF)]
 
2.  High-Power (~9 μm) Quantum Cascade Lasers
S. Slivken, Z. Huang, A. Evans, and M. Razeghi
Virtual Journal of Nanoscale Science and Technology 5 (22)-- June 3, 2002 ...[Visit Journal][reprint (PDF)]
 
2.  Low-Threshold 7.3 μm Quantum Cascade Lasers Grown by Gas-Source Molecular Beam Epitaxy
S. Slivken, A. Matlis, A. Rybaltowski, Z. Wu and M. Razeghi
Applied Physics Letters 74 (19)-- May 19, 1999 ...[Visit Journal]
We report low-threshold 7.3 μm superlattice-based quantum cascade lasers. The threshold current density is 3.4 kA/cm² at 300 K and 1.25 kA/cm² at 79 K in pulsed mode for narrow (∼20 μm), 2 mm-long laser diodes. The characteristic temperature (T0) is 210 K. The slope efficiencies are 153 and 650 mW/A at 300 and 100 K, respectively. Power output is in excess of 100 mW at 300 K. Laser far-field intensity measurements give divergence angles of 64° and 29° in the growth direction and in the plane of the quantum wells, respectively. Far-field simulations show excellent agreement with the measured results. [reprint (PDF)]
 
2.  Metalorganic chemical vapor deposition of monocrystalline GaN thin films on β-LiGaO2substrates
P. Kung, A. Saxler, X. Zhang, D. Walker, R. Lavado, and M. Razeghi
Applied Physics Letters 69 (14)-- September 30, 1996 ...[Visit Journal]
We report the metalorganic chemical vapor deposition growth and characterization of monocrystalline GaN thin films on β-LiGaO2 substrates. The influence of the growth temperature on the crystal quality was studied. The structural, electrical, and optical properties of the films were assessed through scanning electron microscopy, x-ray diffraction, Hall measurements, optical transmission, photoluminescence. [reprint (PDF)]
 
2.  Photovoltaic effects in GaN structures with p-n junction
X. Zhang, P. Kung, D. Walker, J. Piotrowski, A. Rogalski, A. Saxler, and M. Razeghi
Applied Physics Letters 67 (14)-- October 2, 1995 ...[Visit Journal]
Large-area GaN photovoltaic structures with p-n junctions have been fabricated using atmospheric pressure metalorganic chemical vapor deposition. The photovoltaic devices typically exhibit selective spectral characteristics with two narrow peaks of opposite polarity. This can be related to p-n junction connected back‐to‐back with a Schottky barrier. The shape of the spectral characteristic is dependent on the thickness of the n- and p-type regions. The diffusion length of holes in the n-type GaN region, estimated by theoretical modeling of the spectral response shape, was about 0.1 μm. [reprint (PDF)]
 
2.  Improved performance of quantum cascade lasers via manufacturable quality epitaxial side down mounting process utilizing aluminum nitride heatsinks
A. Tsekoun, R. Go, M. Pushkarsky, M. Razeghi, C.K.N. Patel
SPIE Conference, San Jose, CA, Vol. 6127, pp. 612702-- January 23, 2006 ...[Visit Journal]
We report substantially improved performance of high power quantum cascade lasers by utilizing epi-side down mounting that provides superior heat dissipation properties. We have obtained CW power output of 450 mW at 20°C from mid-IR QCLs. The improved thermal management achieved with epi-side down mounting has also permitted us to carry out initial lifetime tests on the mid-IR QCLs. No degradation of power output is seen even after over 300 hours of CW operation at 25°C with power output in excess of 300 mW. We believe these improvements should permit incorporation of mid-IR QCLs in reliable instrumentation. [reprint (PDF)]
 
2.  Fabrication of GaN Nanotubular Material using MOCVD with an Aluminium Oxide Membrane
W.G. Jung, S.H. Jung, P. Kung, and M. Razeghi
Nanotechnology 17-- January 1, 2006 ...[Visit Journal]
GaN nanotubular material is fabricated with an aluminium oxide membrane in MOCVD. SEM, XRD, TEM and PL are employed to characterize the fabricated GaN nanotubular material. An aluminium oxide membrane with ordered nanoholes is used as a template. Gallium nitride is deposited at the inner wall of the nanoholes in the aluminium oxide template, and the nanotubular material with high aspect ratio is synthesized using the precursors of TMG and ammonia gas. Optimal synthesis conditions in MOCVD are obtained successfully for the gallium nitride nanotubular material in this research. The diameter of the GaN nanotube fabricated is approximately 200–250 nm and the wall thickness is about 40–50 nm. [reprint (PDF)]
 
2.  Strain-Induced Metastable Phase Stabilization in Ga2O3 Thin Films
Yaobin Xu, Ji-hyeon Park, Zhenpeng Yao, Christopher Wolverton, Manijeh Razeghi, Jinsong Wu, and Vinayak P. Dravid
ACS Appl. Mater. Interfaces-- January 10, 2019 ...[Visit Journal]
It is well known that metastable and transient structures in bulk can be stabilized in thin films via epitaxial strain (heteroepitaxy) and appropriate growth conditions that are often far from equilibrium. However, the mechanism of heteroepitaxy, particularly how the nominally unstable or metastable phase gets stabilized, remains largely unclear. This is especially intriguing for thin film Ga2O3, where multiple crystal phases may exist under varied growth conditions with spatial and dimensional constraints. Herein, the development and distribution of epitaxial strain at the Ga2O3/Al2O3 film-substrate interfaces is revealed down to the atomic resolution along different orientations, with an aberration-corrected scanning transmission electron microscope (STEM). Just a few layers of metastable α-Ga2O3 structure were found to accommodate the misfit strain in direct contact with the substrate. Following an epitaxial α-Ga2O3 structure of about couple unit cells, several layers (4~5) of transient phase appear as the intermediate structure to release the misfit strain. Subsequent to this transient crystal phase, the nominally unstable κ-Ga2O3 phase is stabilized as the major thin film phase form. We show that the epitaxial strain is gracefully accommodated by rearrangement of the oxygen polyhedra. When the structure is under large compressive strain, Ga3+ ions occupy only the oxygen octahedral sites to form a dense structure. With gradual release of the compressive strain, more and more Ga3+ ions occupy the oxygen tetrahedral sites, leading to volumetric expansion and the phase transformation. The structure of the transition phase is identified by high resolution electron microscopy (HREM) observation, complemented by the density functional theory (DFT) calculations. This study provides insights from the atomic scale and their implications for the design of functional thin film materials using epitaxial engineering.
 
2.  Improved performance of IR photodetectors with 3D gap engineering
J. Piotrowski and M. Razeghi
Optoelectronic Integrated Circuit Materials, Physics and Devices, SPIE Conference, San Jose, CA; Proceedings, Vol. 2397-- February 6, 1995 ...[Visit Journal]
The ultimate signal-to-noise performance of the semiconductor photodetector is limited by the statistical fluctuations of the thermal generation and recombination rates in photodetector material. Cooling is an effective but impractical way of suppression of the thermal processes. The performance of uncooled detectors can be improved by minimizing the thermal generation and recombination rates and reducing the actual volume of photodetector. This can be realized in 3D heterostructure devices. In these devices, the incident radiation is absorbed in small regions of narrow gap semiconductor, buried in wide gap volume and supplied with wide gap electric contacts and radiation concentrators. The practical near room-temperature 1 - 12 μm IR heterostructure photodetectors are reported. The devices are based on variable gap Hg1-xCdxTe. The 3D heterostructures have been obtained by Isothermal Vapor Growth Epitaxy in a reusable growth system which enables in situ doping during growth with foreign impurities. Ion milling was extensively used in preparation of the devices. Monolithic optical immersion has been applied for further improvement of performance. The 3D heterostructure devices exhibit performance exceeding that of conventional photodetectors. [reprint (PDF)]
 
2.  Very High Average Power at Room Temperature from λ ~ 5.9 μm Quantum Cascade Lasers
J.S. Yu, S. Slivken, A. Evans, J. David and M. Razeghi
Virtual Journal of Nanoscale Science & Technology 26-- May 26, 2003 ...[Visit Journal][reprint (PDF)]
 
2.  Growth of AlxGa1-xN:Ge on sapphire and silicon substrates
X. Zhang, P. Kung, A. Saxler, D. Walker, T.C. Wang, and M. Razeghi
Applied Physics Letters 67 (12)-- September 18, 1995 ...[Visit Journal]
AlxGa1–xN were grown on (00.1) sapphire and (111) silicon substrates in the whole composition range (0 <= x <= 1). The high optical quality of the epilayers was assessed by room-temperature optical absorption and photoluminescence measurements. Layers with higher Al composition are more resistive. Resistive AlxGa1–xN epilayers were successfully doped with Ge and free-electron concentration as high as 3 × 1019 cm–3 was achieved. [reprint (PDF)]
 
2.  Growth and characterization of InAs/GaSb photoconductors for long wavelength infrared range
H. Mohseni, E. Michel, J. Sandven, M. Razeghi, W. Mitchel, and G. Brown
Applied Physics Letters 71 (10)-- September 8, 1997 ...[Visit Journal]
In this letter we report the molecular beam epitaxial growth and characterization of InAs/GaSb superlattices grown on semi-insulating GaAs substrates for long wavelength infrared detectors. Photoconductive detectors fabricated from the superlattices showed photoresponse up to 12 µm and peak responsivity of 5.5 V/W with Johnson noise limited detectivity of 1.33 × 109 cm·Hz½/W at 10.3 µm at 78 K. [reprint (PDF)]
 
2.  GaInAs/InP nanopillar arrays for long wavelength infrared detection
A. Gin, Y. Wei, A. Hood, D. Hoffman, M. Razeghi and G.J. Brown
SPIE Conference, Jose, CA, Vol. 5732, pp. 350-- January 22, 2005 ...[Visit Journal]
Nanopillar devices have been fabricated from GaInAs/InP QWIP material grown by MOCVD. Using electron beam lithography and reactive ion etching techniques, large, regular arrays of nanopillars with controllable diameters ranging from 150 nm to less than 40 nm have been reproducibly formed. Photoluminescence experiments demonstrate a strong peak wavelength blue shift for nanopillar structures compared to the as-grown quantum well material. Top and bottom metal contacts have been realized using a polyimide planarization and etchback procedure. I-V and noise measurements have been performed. Optical measurements indicate photoconductive response in selected nanopillar arrays. Device peak wavelength response occurs at about 8 µm with peak device responsivity of 420 mA/W. Peak detectivity of 3×108 cm·Hz½/W has been achieved at -1V bias and 30 K. [reprint (PDF)]
 
2.  AlxGa1-xN (0 ≤ x ≤ 1) Ultraviolet Photodetectors Grown on Sapphire by Metal-organic Chemical-vapor Deposition
D. Walker, X. Zhang, A. Saxler, P. Kung, J. Xu, and M. Razeghi
Applied Physics Letters 70 (8)-- February 24, 1997 ...[Visit Journal]
AlxGa1–xN (0 ≤ x ≤ 1) ultraviolet photoconductors with cutoff wavelengths from 365 to 200 nm have been fabricated and characterized. The maximum detectivity reached 5.5 × 108 cm·Hz1/2/W at a modulating frequency of 14 Hz. The effective majority carrier lifetime in AlxGa1–xN materials, derived from frequency-dependent photoconductivity measurements, has been estimated to be from 6 to 35 ms. The frequency-dependent noise spectrum shows that it is dominated by Johnson noise at high frequencies for low-Al-composition samples. [reprint (PDF)]
 
2.  High power, continuous wave, room temperature operation of λ ~ 3.4 μm and λ ~ 3.55 μm InP-based quantum cascade lasers
N. Bandyopadhyay, S. Slivken, Y. Bai and M. Razeghi
Applied Physics Letters, Vol. 100, No. 21, p. 212104-1-- May 21, 2012 ...[Visit Journal]
We report two highly strain-balanced InP-based AlInAs/GaInAs quantum cascade lasers emitting near 3.39 and 3.56 . A pulsed threshold current density of only 1.1 kA/cm² has been achieved at room temperature for both lasers with characteristic temperatures (T0) of 166  K and 152  K, respectively. The slope efficiency is also relatively temperature insensitive with characteristic temperatures (T1) of 116 K and 191  K, respectively. Continuous wave powers of 504 mW and 576 mW are obtained at room temperature, respectively. This was accomplished without buried ridge processing. [reprint (PDF)]
 
2.  High performance monolithic, broadly tunable mid-infrared quantum cascade lasers
WENJIA Zhou, DONGHAI Wu, RYAN McCLINTOCK, STEVEN SLIVKEN, AND MANIJEH RAZEGH1
Optica 4(10), p. 1228-- October 10, 2017 ...[Visit Journal]
Mid-infrared lasers, emitting in the spectral region of 3-12 µm that contains strong characteristic vibrational tran­sitions of many important molecules, are highly desirable for spectroscopy sensing applications. High-efficiency quantum cascade lasers have been demonstrated with up to watt-level output power in the mid-infrared region. However, the wide wavelength tuning that is critical for spectroscopy applica­tions still largely relies on incorporating external gratings, which have stability issues. Here, we demonstrate a mono­lithic, broadly tunable quantum cascade laser source emitting between 6.1 and 9.2 µm through an on-chip integration of a sampled grating distributed feedback tunable laser array and a beam combiner. High peak power up to 65 mW has been obtained through a balanced high-gain active region design, efficient waveguide layout, and the development of a broad­band antireflection coating. Nearly fundamental transverse­mode operation is achieved for all emission wavelengths with a pointing stability better than 1.6 mrad (0.1 °). The demon­strated laser source opens new opportunities for mid-infrared spectroscopy. [reprint (PDF)]
 
2.  Room temperature quantum cascade lasers with 27% wall plug efficiency
Y. Bai, N. Bandyopadhyay, S. Tsao, S. Slivken and M. Razeghi
Applied Physics Letters, Vol. 98, No. 18, p. 181102-1-- May 3, 2011 ...[Visit Journal]
Using the recently proposed shallow-well design, we demonstrate InP based quantum cascade lasers (QCLs) emitting around 4.9 μm with 27% and 21% wall plug efficiencies in room temperature (298 K) pulsed and continuous wave (CW) operations, respectively. The laser core consists of 40 QCL-stages. The highest cw efficiency is obtained from a buried-ridge device with a ridge width of 8 μm and a cavity length of 5 mm. The front and back facets are antireflection and high-reflection coated, respectively. The maximum single facet cw power at room temperature amounts to 5.1 W. [reprint (PDF)]
 
2.  Type-II InAs/GaSb/AlSb superlatticebased heterojunction phototransistors: back to the future
Abbas Haddadi, Arash Dehzangi, Romain Chevallier, Thomas Yang, Manijeh Razeghi
Proc. SPIE 10540, Quantum Sensing and Nano Electronics and Photonics XV- Page-1054004-1-- January 26, 2018 ...[Visit Journal]
Most of reported HPTs in literatures are based on InGaAs compounds that cover NIR spectral region. However, InGaAs compounds provide limited cut-off wavelength tunability. In contrast, type-II superlattices (T2SLs) are a developing new material system with intrinsic advantages such as great flexibility in bandgap engineering, low growth and manufacturing cost, high-uniformity, auger recombination suppression, and high carrier effective mass that are becoming an attractive candidate for infrared detection and imaging from short-wavelength infrared to very long wavelength infrared regime. We present the recent advancements in T2SL-based heterojunction phototransistors in e– SWIR, MWIR and LWIR spectral ranges. A mid-wavelength infrared heterojunction phototransistor based on type-II InAs/AlSb/GaSb superlattices on GaSb substrate has been demonstrated. Then, we present the effect of vertical scaling on the optical and electrical performance of heterojunction phototransistors, where the performance of devices with different base width was compared as the base was scaled from 60 down to 40 nm. [reprint (PDF)]
 
2.  Scale-up of the Chemical Lift-off of (In)GaN-based p-i-n Junctions from Sapphire Substrates Using Sacrificial ZnO Template Layers
D. J. Rogers, S. Sundaram, Y. El Gmili, F. Hosseini Teherani, P. Bove, V. Sandana, P. L. Voss, A. Ougazzaden, A. Rajan, K.A. Prior, R. McClintock, & M. Razeghi
Proc. SPIE 9364, Oxide-based Materials and Devices VI, 936424 -- March 24, 2015 ...[Visit Journal]
(In)GaN p-i-n structures were grown by MOVPE on both GaN- and ZnO-coated c-sapphire substrates. XRD studies of the as-grown layers revealed that a strongly c-axis oriented wurtzite crystal structure was obtained on both templates and that there was a slight compressive strain in the ZnO underlayer which increased after GaN overgrowth. The InGaN peak position gave an estimate of 13.6at% for the indium content in the active layer. SEM and AFM revealed that the top surface morphologies were similar for both substrates, with an RMS roughness (5 μm x 5 μm) of about 10 nm. Granularity appeared slightly coarser (40nm for the device grown on ZnO vs 30nm for the device grown on the GaN template) however. CL revealed a weaker GaN near band edge UV emission peak and a stronger broad defect-related visible emission band for the structure grown on the GaN template. Only a strong ZnO NBE UV emission was observed for the sample grown on the ZnO template. Quarter-wafer chemical lift-off (CLO) of the InGaN-based p-i-n structures from the sapphire substrate was achieved by temporary-bonding the GaN surface to rigid glass support with wax and then selectively dissolving the ZnO in 0.1M HCl. XRD studies revealed that the epitaxial nature and strong preferential c-axis orientation of the layers had been maintained after lift-off. This demonstration of CLO scale-up, without compromising the crystallographic integrity of the (In)GaN p-i-n structure opens up the perspective of transferring GaN based devices off of sapphire substrates industrially. [reprint (PDF)]
 
2.  III-Nitride photon counting avalanche photodiodes
R. McClintock, J.L. Pau, K. Minder, C. Bayram and M. Razeghi
SPIE Conference, January 20-25, 2008, San Jose, CA Proceedings – Quantum Sensing and Nanophotonic Devices V, Vol. 6900, p. 69000N-1-11.-- February 1, 2008 ...[Visit Journal]
In order for solar and visible blind III-Nitride based photodetectors to effectively compete with the detective performance of PMT there is a need to develop photodetectors that take advantage of low noise avalanche gain. Furthermore, in certain applications, it is desirable to obtain UV photon counting performance. In this paper, we review the characteristics of III-nitride visible-blind avalanche photodetectors (APDs), and present the state-of-the-art results on photon counting based on the Geiger mode operation of GaN APDs. The devices are fabricated on transparent AlN templates specifically for back-illumination in order to enhance hole-initiated multiplication. The spectral response and Geiger-mode photon counting performance are analyzed under low photon fluxes, with single photon detection capabilities being demonstrated in smaller devices. Other major technical issues associated with the realization of high-quality visible-blind APDs and Geiger mode APDs are also discussed in detail and solutions to the major problems are described where available. Finally, future prospects for improving upon the performance of these devices are outlined. [reprint (PDF)]
 

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