Center for Quantum Devices - Most Downloaded Journal Articles

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2.	Very High Average Power at Room Temperature from λ ~ 5.9 μm Quantum Cascade Lasers J.S. Yu, S. Slivken, A. Evans, J. David and M. Razeghi Virtual Journal of Nanoscale Science & Technology 26-- May 26, 2003 ...[Visit Journal][reprint (PDF)]
2.	Growth of Al_xGa_1-xN:Ge on sapphire and silicon substrates X. Zhang, P. Kung, A. Saxler, D. Walker, T.C. Wang, and M. Razeghi Applied Physics Letters 67 (12)-- September 18, 1995 ...[Visit Journal] Al_xGa_1–xN were grown on (00.1) sapphire and (111) silicon substrates in the whole composition range (0 <= x <= 1). The high optical quality of the epilayers was assessed by room-temperature optical absorption and photoluminescence measurements. Layers with higher Al composition are more resistive. Resistive Al_xGa_1–xN epilayers were successfully doped with Ge and free-electron concentration as high as 3 × 10¹⁹ cm^–3 was achieved. [reprint (PDF)]
2.	Recent performance records for mid-IR quantum cascade lasers M. Razeghi; Y. Bai; S. Slivken; S. Kuboya; S.R. Darvish Terahertz and Mid Infrared Radiation: Basic Research and Practical Applications, 2009. TERA-MIR International Workshop [5379656], (2009) -- November 9, 2009 ...[Visit Journal] The wall plug efficiency of the mid-infrared quantum cascade laser in room temperature continuous wave operation is brought to 17%. Peak output power from a broad area (400 μm x 3 mm) device gives 120 W output power in pulsed mode operation at room temperature. Using a single-well-injector design, specifically made for low temperature operation, a record wall plug efficiency of 53% is demonstrated at 40 K. [reprint (PDF)]
2.	Avalanche multiplication in AlGaN based solar-blind photodetectors R. McClintock, A. Yasan, K. Minder, P. Kung, and M. Razeghi Applied Physics Letters, 87 (24)-- December 12, 2005 ...[Visit Journal] Avalanche multiplication has been observed in solar-blind AlGaN-based p-i-n photodiodes. Upon ultraviolet illumination, the optical gain shows a soft breakdown starting at relatively low electric fields, eventually saturating without showing a Geiger mode breakdown. The devices achieve a maximum optical gain of 700 at a reverse bias of 60 V. By modeling the device, it is found that this corresponds to an electric-field strength of 1.7 MV/cm. [reprint (PDF)]
2.	Al_xGa_1-xN (0 ≤ x ≤ 1) Ultraviolet Photodetectors Grown on Sapphire by Metal-organic Chemical-vapor Deposition D. Walker, X. Zhang, A. Saxler, P. Kung, J. Xu, and M. Razeghi Applied Physics Letters 70 (8)-- February 24, 1997 ...[Visit Journal] Al_xGa_1–xN (0 ≤ x ≤ 1) ultraviolet photoconductors with cutoff wavelengths from 365 to 200 nm have been fabricated and characterized. The maximum detectivity reached 5.5 × 10⁸ cm·Hz^1/2/W at a modulating frequency of 14 Hz. The effective majority carrier lifetime in Al_xGa_1–xN materials, derived from frequency-dependent photoconductivity measurements, has been estimated to be from 6 to 35 ms. The frequency-dependent noise spectrum shows that it is dominated by Johnson noise at high frequencies for low-Al-composition samples. [reprint (PDF)]
2.	AlN/GaN double-barrier resonant tunneling diodes grown by metal-organic chemical vapor deposition C. Bayram, Z. Vashaei and M. Razeghi Applied Physics Letters, Vol. 96, No. 4, p. 042103-1-- January 25, 2010 ...[Visit Journal] AlN/GaN double-barrier resonant tunneling diodes (RTDs) were grown by metal-organic chemical vapor deposition on sapphire. RTDs were fabricated via standard processing steps. RTDs demonstrate a clear negative differential resistance (NDR) at room temperature (RT). The NDR was observed around 4.7 V with a peak current density of 59 kA/cm² and a peak-to-valley ratio of 1.6 at RT. Dislocation-free material is shown to be the key for the performance of GaN RTDs. [reprint (PDF)]
2.	High-speed, low-noise metal-semiconductor-metal ultraviolet photodetectors based on GaN D. Walker, E. Monroy, P. Kung, J. Wu, M. Hamilton, F.J. Sanchez, J. Diaz, and M. Razeghi Applied Physics Letters 74 (5)-- February 1, 1999 ...[Visit Journal] We present the fabrication and characterization of nonintentionally doped GaN and GaN:Mg Schottky metal–semiconductor–metal (MSM) photodetectors, grown on sapphire by metalorganic chemical vapor deposition. Low-leakage, Schottky contacts were made with Pt/Au. The devices are visible blind, with an ultraviolet/green contrast of about five orders of magnitude. The response times of the MSM devices were <10 ns and about 200 ns for GaN and GaN:Mg, respectively. The noise power spectral density remains below the background level of the system (10−24 A²/Hz) up to 5 V, for the undoped GaN MSM detector. [reprint (PDF)]
2.	Broadband monolithically-tunable quantum cascade lasers Wenjia Zhou, Ryan McClintock, Donghai Wu, Steven Slivken, Manijeh Razeghi Proc. SPIE 10540, Quantum Sensing and Nano Electronics and Photonics XV, 105400A-- January 26, 2018 ...[Visit Journal] Mid-infrared lasers, emitting in the spectral region of 3-12 μm that contain strong characteristic vibrational transitions of many important molecules, are highly desirable for spectroscopy sensing applications. High efficiency quantum cascade lasers have been demonstrated with up to watt-level output power in the mid-infrared region. However, the wide wavelength tuning, which is critical for spectroscopy applications, is still largely relying on incorporating external gratings, which have stability issues. Here, we demonstrate the development a monolithic, widely tunable quantum cascade laser source emitting between 6.1 and 9.2 μm through an on-chip integration of a sampled grating distributed feedback tunable laser array with a beam combiner. A compact tunable laser system was built to drive the individual lasers within the array and coordinate the driving of the laser array to produce desired wavelength. A broadband spectral measurement (520cm^-1) of methane shows excellent agreement with Fourier transform infrared spectrometer measurement. Further optimizations have led to high performance monolithic tunable QCLs with up to 65 mW output while delivering fundamental mode outputs. [reprint (PDF)]
2.	Bias-selectable three-color short-, extended-short-, and mid-wavelength infrared photodetectors based on type-II InAs/GaSb/AlSb superlattices Abbas Haddadi, and Manijeh Razeghi Optics Letters Vol. 42, Iss. 21, pp. 4275-4278-- October 16, 2017 ...[Visit Journal] A bias-selectable, high operating temperature, three-color short-, extended-short-, and mid-wavelength infrared photodetector based on InAs/GaSb/AlSb type-II superlattices on GaSb substrate has been demonstrated. The short-, extended-short-, and mid-wavelength channels’ 50% cutoff wavelengths were 2.3, 2.9, and 4.4μm, respectively, at 150K. The mid-wavelength channel exhibited a saturated quantum efficiency of 34% at 4μm under +200 mV bias voltage in a front-side illumination configuration and without any antireflection coating. At 200mV, the device exhibited a dark current density of 8.7×10⁻⁵ A/cm² providing a specific detectivity of ∼2×10¹¹ cm·Hz^1/2/W at 150K. The short-wavelength channel achieved a saturated quantum efficiency of 20% at 1.8μm. At −10 mV, the device’s dark current density was 5.5×10⁻⁸ A/cm². At zero bias, its specific detectivity was 1×10¹¹ cm·Hz^1/2/W at 150K. The extended short-wavelength channel achieved a saturated quantum efficiency of 22% at 2.75 μm. Under −2 V bias voltage, the device exhibited a dark current density of 1.8×10⁻⁶ A/cm² providing a specific detectivity of 6.3×10¹¹ cm·Hz^1/2/W at 150K. [reprint (PDF)]
2.	Direct growth of thick AlN layers on nanopatterned Si substrates by cantilever epitaxy Ilkay Demir, Yoann Robin, Ryan McClintock, Sezai Elagoz, Konstantinos Zekentes, and Manijeh Razeghi Phys. Status Solidi A, pp. 1–6-- September 30, 2016 ...[Visit Journal] AlN layers have been grown on 200 nm period of nanopatterned Si (111) substrates by cantilever epitaxy and compared with AlN layers grown by maskless lateral epitaxial overgrowth (LEO) on micropatterned Si (111) substrates. The material quality of 5–10 µm thick AlN grown by LEO is comparable to that of much thinner layers (2 µm) grown by cantilever epitaxy on the nanopatterned substrates. Indeed, the latter exhibited root mean square (RMS) roughness of 0.65 nm and X-ray diffraction full width at half-maximum (FWHM) of 710 arcsec along the (0002) reflection and 930 arcsec along the (10̅15) reflection. The corresponding room temperature photoluminescence spectra was dominated by a sharp band edge peak. Back emission ultra violet light emitting diodes (UV LEDs) were fabricated by flip chip bonding to patterned AlN heat sinks followed by complete Si (111) substrate removal demonstrating a peak pulsed power of ∼0.7 mW at 344 nm peak emission wavelength. The demonstrated UV LEDs were fabricated on a cost effective epitaxial structure grown on the nanopatterned Si substrate with a total thickness of 3.3 µm [reprint (PDF)]
2.	Fabrication of Indium Bumps for Hybrid Infrared Focal Plane Array Applications J. Jiang, S. Tsao, T. O'Sullivan, M. Razeghi, and G.J. Brown Infrared Physics and Technology, 45 (2)-- March 1, 2004 ...[Visit Journal] Hybrid infrared focal plane arrays (FPAs) have found many applications. In hybrid IR FPAs, FPA and Si read out integrated circuits (ROICs) are bonded together with indium bumps by flip-chip bonding. Taller and higher uniformity indium bumps are always being pursued in FPA fabrication. In this paper, two indium bump fabrication processes based on evaporation and electroplating techniques are developed. Issues related to each fabrication technique are addressed in detail. The evaporation technique is based on a unique positive lithography process. The electroplating method achieves taller indium bumps with a high aspect ratio by a unique “multi-stack” technique. This technique could potentially benefit the fabrication of multi-color FPAs. Finally, a proposed low-cost indium bump fabrication technique, the “bump transfer”, is given as a future technology for hybrid IR FPA fabrication. [reprint (PDF)]
2.	III-Nitride photon counting avalanche photodiodes R. McClintock, J.L. Pau, K. Minder, C. Bayram and M. Razeghi SPIE Conference, January 20-25, 2008, San Jose, CA Proceedings – Quantum Sensing and Nanophotonic Devices V, Vol. 6900, p. 69000N-1-11.-- February 1, 2008 ...[Visit Journal] In order for solar and visible blind III-Nitride based photodetectors to effectively compete with the detective performance of PMT there is a need to develop photodetectors that take advantage of low noise avalanche gain. Furthermore, in certain applications, it is desirable to obtain UV photon counting performance. In this paper, we review the characteristics of III-nitride visible-blind avalanche photodetectors (APDs), and present the state-of-the-art results on photon counting based on the Geiger mode operation of GaN APDs. The devices are fabricated on transparent AlN templates specifically for back-illumination in order to enhance hole-initiated multiplication. The spectral response and Geiger-mode photon counting performance are analyzed under low photon fluxes, with single photon detection capabilities being demonstrated in smaller devices. Other major technical issues associated with the realization of high-quality visible-blind APDs and Geiger mode APDs are also discussed in detail and solutions to the major problems are described where available. Finally, future prospects for improving upon the performance of these devices are outlined. [reprint (PDF)]
2.	Gain and recombination dynamics of quantum-dot infrared photodetecto H. Lim, B. Movaghar, S. Tsao, M. Taguchi, W. Zhang, A.A. Quivy, and M. Razeghi Virtual Journal of Nanoscale Science & Technology-- December 4, 2006 ...[Visit Journal][reprint (PDF)]
2.	Very High Average Power at Room Temperature from λ ~ 5.9 μm Quantum Cascade Lasers J.S. Yu, S. Slivken, A. Evans, J. David and M. Razeghi Applied Physics Letters, 82 (20)-- May 19, 2003 ...[Visit Journal] We report a very high average output power at room temperature for quantum-cascade lasers emitting at λ ~ 5.9 µm. For high-reflectivity-coated 2-mm-long cavities, a low threshold current density of 1.7 kA/cm² was obtained at room temperature. From 300 to 400 K, the characteristic temperature (T0) was 198 K. A maximum average output power of 0.67 W was achieved. In addition, 0.56 W average output power was observed at a duty cycle of 56%. [reprint (PDF)]
2.	Aluminum gallium nitride short-period superlattices doped with magnesium A. Saxler, W.C. Mitchel, P. Kung and M. Razeghi Applied Physics Letters 74 (14)-- April 9, 1999 ...[Visit Journal] Short-period superlattices consisting of alternating layers of GaN:Mg and AlGaN:Mg were grown by low-pressure organometallic vapor phase epitaxy. The electrical properties of these superlattices were measured as a function of temperature and compared to conventional AlGaN:Mg layers. It is shown that the optical absorption edge can be shifted to shorter wavelengths while lowering the acceptor ionization energy by using short-period superlattice structures instead of bulk-like AlGaN:Mg. [reprint (PDF)]
2.	Interface-induced Suppression of the Auger Recombination in Type-II InAs/GaSb Superlattices H. Mohseni, V.I. Litvinov and M. Razeghi Physical Review B 58 (23)-- December 15, 1998 ...[Visit Journal] The temperature dependence of the nonequilibrium carriers lifetime has been deduced from the measurement of the photocurrent response in InAs/GaSb superlattices. Based on the temperature dependence of the responsivity and modeling of the transport parameters we have found that the carrier lifetime weakly depends on temperature in the high-temperature region. This indicates the temperature dependence of the Auger recombination rate with no threshold that differs it from that in the bulk material and can be attributed to the interface-induced suppression of the Auger recombination in thin quantum wells. [reprint (PDF)]
2.	Effects of well width and growth temperature on optical and structural characteristics of AlN/GaN superlattices grown by metal-organic chemical vapor deposition C. Bayram, N. Pere-Laperne, and M. Razeghi Applied Physics Letters, Vol. 95, No. 20, p. 201906-1-- November 16, 2009 ...[Visit Journal] AlN/GaN superlattices (SLs) employing various well widths (from 1.5 to 7.0 nm) are grown by metal-organic chemical vapor deposition technique at various growth temperatures (Ts) (from 900 to 1035 °C). The photoluminescence (PL), x-ray diffraction, and intersubband (ISB) absorption characteristics of these SLs and their dependency on well width and growth temperature are investigated. Superlattices with thinner wells (grown at the same Ts) or grown at lower Ts (employing the same well width) are shown to demonstrate higher strain effects leading to a higher PL energy and ISB absorption energy. Simulations are employed to explain the experimental observations. ISB absorptions from 1.04 to 2.15 µm are demonstrated via controlling well width and growth temperature. [reprint (PDF)]
2.	Superlattice sees colder objects in two colors and high resolution M. Razeghi SPIE Newsroom-- February 10, 2012 ...[Visit Journal] A special class of semiconductor material can now detect two wavebands of light with energies less than a tenth of an electron volt in high resolution using the same IR camera. [reprint (PDF)]
2.	Investigation of surface leakage reduction for small pitch shortwave infrared photodetectors Arash Dehzangi, Quentin Durlin, Donghai Wu, Ryan McClintock, Manijeh Razeghi Semiconductor Science and Technology, 34(6), 06LT01-- May 25, 2019 ...[Visit Journal] Different passivation techniques are investigated for reducing leakage current in small pixel (down to 9 μm) heterostructure photodetectors designed for the short-wavelength infrared range. Process evaluation test chips were fabricated using the same process as for focal plane arrays. Arrays of small photodetectors were electrically characterized under dark conditions from 150 K to room temperature. In order to evaluate the leakage current, we studied the relation between the inverse of dynamic resistance at −20 mV and zero bias and perimeter over area P/A ratio as the pixel size is scaled down. At 150 K, leakage current arising from the perimeter dominates while bulk leakage dominates at room temperature. We find that in shortwave devices directly underfilling hybridized devices with a thermoset epoxy resin without first doing any additional passivation/protection after etching gives the lowest leakage with a surface resistance of 4.2 × 10⁹ and 8.9 × 10³ Ω· cm⁻¹ at 150 and 300 K, for −20 mV of bias voltage, respectively. [reprint (PDF)]
2.	Spatial Noise and Correctability of Type-II InAs/GaSb Focal Plane Arrays P.Y. Delaunay and M. Razeghi IEEE Journal of Quanutm Electronics, April 2010, Vol. 46, No. 4, p. 584-588-- April 1, 2010 ...[Visit Journal] A long wavelength infrared focal plane array based on Type-II InAs/GaSb superlattices was fabricated and characterized at 80 K. The noise equivalent temperature difference of the array was measured as low as 23 mK (f# = 2), for an integration time of 0.129 ms. The spatial noise of the array was dominated by the nonuniformity of the illumination through the circular aperture. A standard two-point nonuniformity correction improved the inhomogeneity equivalent temperature difference to 16 mK. The correctability just after calibration was 0.6. The long-term stability time was superior to 25 hours. [reprint (PDF)]
2.	320x256 Solar-Blind Focal Plane Arrays based on Al_xGa_1-xN R. McClintock, K. Mayes, A. Yasan, D. Shiell, P. Kung, and M. Razeghi Applied Physics Letters, 86 (1)-- January 3, 2005 ...[Visit Journal] We report AlGaN-based back-illuminated solar-blind ultraviolet focal plane arrays operating at a wavelength of 280 nm. The electrical characteristics of the individual pixels are discussed, and the uniformity of the array is presented. The p–i–n photodiode array was hybridized to a 320×256 read-out integrated circuit entirely within our university research lab, and a working 320×256 camera was demonstrated. Several example solar-blind images from the camera are also provided. [reprint (PDF)]
2.	Mid‑wavelength infrared avalanche photodetector with AlAsSb/GaSb superlattice Jiakai Li, Arash Dehzangi, Gail Brown, Manijeh Razeghi Scientifc Reports \| (2021) 11:7104 \| https://doi.org/10.1038/s41598-021-86566-8 ...[Visit Journal] In this work, a mid-wavelength infrared separate absorption and multiplication avalanche photodiode (SAM-APD) with 100% cut-of wavelength of ~ 5.0 µm at 200 K grown by molecular beam epitaxy was demonstrated. The InAsSb-based SAM-APD device was designed to have electron dominated avalanche mechanism via the band structure engineered multi-quantum well structure based on AlAsSb/GaSb H-structure superlattice and InAsSb material in the multiplication region. The device exhibits a maximum multiplication gain of 29 at 200 K under -14.7 bias voltage. The maximum multiplication gain value for the MWIR SAM-APD increases from 29 at 200 K to 121 at 150 K. The electron and hole impact ionization coefficients were derived and the large difference between their value was observed. The carrier ionization ratio for the MWIR SAM-APD device was calculated to be ~ 0.097 at 200 K. [reprint (PDF)]
2.	Multiple-band, Single-mode, High-power, Phase-locked, Mid-infrared Quantum Cascade Laser Arrays Manijeh Razeghi, Wenjia Zhou, Quanyong Lu, Donghai Wu, and Steven Slivken Imaging and Applied Optics 2018, JTh1A.2-- September 15, 2018 ...[Visit Journal] Single-mode, 16-channel, phase-locked laser arrays based on quantum cascade laser technology are demonstrated at multiple spectral bands across the mid-infrared spectrum region. High peak output power of 50W is achieved around the long-wavelength band of 7.7µm, while a side mode suppression ratio over 25dB is obtained. Far field distribution measurement result indicates a uniform phase distribution across the array output. [reprint (PDF)]
2.	RT-CW: widely tunable semiconductor THz QCL sources M. Razeghi; Q. Y. Lu Proceedings Volume 9934, Terahertz Emitters, Receivers, and Applications -- September 26, 2016 ...[Visit Journal] Distinctive position of Terahertz (THz) frequencies (ν~0.3 -10 THz) in the electromagnetic spectrum with their lower quantum energy compared to IR and higher frequency compared to microwave range allows for many potential applications unique to them. Especially in the security side of the THz sensing applications, the distinct absorption spectra of explosives and related compounds in the range of 0.1–5 THz makes THz technology a competitive technique for detecting hidden explosives. A compact, high power, room temperature continuous wave terahertz source emitting in a wide frequency range will greatly boost the THz applications for the diagnosis and detection of explosives. Here we present a new strong-coupled strain-balanced quantum cascade laser design for efficient THz generation based intracavity DFG. Room temperature continuous wave operation with electrical frequency tuning range of 2.06-4.35 THz is demonstrated [reprint (PDF)]
2.	Tight-binding theory for the thermal evolution of optical band gaps in semiconductors and superlattices S. Abdollahi Pour, B. Movaghar, and M. Razeghi American Physical Review, Vol. 83, No. 11, p. 115331-1-- March 15, 2011 ...[Visit Journal] A method to handle the variation of the band gap with temperature in direct band-gap III–V semiconductors and superlattices using an empirical tight-binding method has been developed. The approach follows closely established procedures and allows parameter variations which give rise to perfect fits to the experimental data. We also apply the tight-binding method to the far more complex problem of band structures in Type-II infrared superlattices for which we have access to original experimental data recently acquired by our group. Given the close packing of bands in small band-gap Type-II designs, k·p methods become difficult to handle, and it turns out that the sp3s* tight-binding scheme is a practical and powerful asset. Other approaches to band-gap shrinkage explored in the past are discussed, scrutinized, and compared. This includes the lattice expansion term, the phonon softening mechanism, and the electron-phonon polaronic shifts calculated in perturbation theory. [reprint (PDF)]

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