Center for Quantum Devices - Most Downloaded Journal Articles

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68.	nBn extended short-wavelength infrared focal plane array ARASH DEHZANGI, ABBAS HADDADI, ROMAIN CHEVALLIER, YIYUN ZHANG, AND MANIJEH RAZEGHI Optics Letters Vol. 43, Issue 3, pp. 591-594-- February 1, 2018 ...[Visit Journal] An extended short-wavelength nBn InAs/GaSb/AlSb type-II superlattice-based infrared focal plane array imager was demonstrated. A newly developed InAs_0.10Sb_0.90∕GaSb superlattice design was used as the large-bandgap electron barrier in this photodetector. The large band gap electron-barrier design in this nBn photodetector architecture leads to the device having lower dark current densities. A new bi-layer etch-stop scheme using a combination of InAs_0.91Sb_0.09 bulk and AlAs_0.1Sb_0.9∕GaSb superlattice layers was introduced to allow complete substrate removal and a shorter wavelength cut-on. Test pixels exhibit 100% cutoff wavelengths of ∼2.30 and ∼2.48 μm at 150 and 300 K, respectively. The devices achieve saturated quantum efficiency values of 59.7% and 63.8% at 150 and 300 K, respectively, under backside illumination and without any antireflection coating.At 150 K, photodetectors exhibit dark current density of 8.75 × 10⁻⁸ A∕cm² under −400 mV applied bias, providing specific detectivity of 2.82 × 10¹² cm · Hz^1∕2∕W at 1.78 μm. At 300 K, the dark current density reaches 4.75 × 10⁻² A∕cm² under −200 mV bias, providing a specific detectivity of 8.55 × 10⁹ cm · Hz^1∕2∕W 1.78 μm. [reprint (PDF)]
45.	Band-structure-engineered high-gain LWIR photodetector based on a type-II superlattice Arash Dehzangi, Jiakai Li and Manijeh Razeghi Light: Science & Applications volume 10, Article number: 17 (2021) https://doi.org/10.1038/s41377-020-00453-x ...[Visit Journal] The LWIR and longer wavelength regions are of particular interest for new developments and new approaches to realizing long-wavelength infrared (LWIR) photodetectors with high detectivity and high responsivity. These photodetectors are highly desirable for applications such as infrared earth science and astronomy, remote sensing, optical communication, and thermal and medical imaging. Here, we report the design, growth, and characterization of a high-gain band-structure-engineered LWIR heterojunction phototransistor based on type-II superlattices. The 1/e cut-off wavelength of the device is 8.0 µm. At 77 K, unity optical gain occurs at a 90 mV applied bias with a dark current density of 3.2 × 10−7 A/cm2. The optical gain of the device at 77 K saturates at a value of 276 at an applied bias of 220 mV. This saturation corresponds to a responsivity of 1284 A/W and a specific detectivity of 2.34 × 1013 cm Hz1/2/W at a peak detection wavelength of ~6.8 µm. The type-II superlattice-based high-gain LWIR device shows the possibility of designing the high-performance gain-based LWIR photodetectors by implementing the band structure engineering approach. [reprint (PDF)]
36.	-- November 30, 1999
32.	Electro-thermal breakdown in p-NiO/n-Ga2O3 heterojunction power diodes: evidence for the role of heat extraction via sapphire S. Kubsky, Z. Berger, M. Chevrot, D. J. Rogers, V. E. Sandana, F. Hosseini Teherani, N. De France, M. Lesecq, Z. Bougrioua, M. Razeghi Proc. of SPIE Vol. PC13897, PC138970X · 2026 ...[Visit Journal] Gallium oxide (Ga₂O₃) is attracting strong interest for next-generation power electronics due to its ultra-wide bandgap and large critical breakdown field; however, device performance is frequently constrained by self-heating arising from its relatively low and anisotropic thermal conductivity. In this work, the electrical and thermal behaviour of p-NiO/n-Ga₂O₃ heterojunction diodes grown by pulsed laser deposition on r-plane sapphire substrates is investigated under high-bias operation. Identical ring-mesa devices were mounted either on a thermally insulating support or on a metal heat sink, enabling a direct comparison of electro-thermal behaviour. While both configurations exhibit rectifying I–V characteristics, heat-sunk devices show reduced surface temperature rise, suppressed reverse leakage, and a significantly higher breakdown voltage (~ +2150 V) compared with devices measured without effective heat extraction (~ +1600 V). The results demonstrate that electro-thermal runaway, rather than intrinsic junction limitations, governs breakdown in these thin-film Ga₂O₃ heterojunctions, highlighting thermal management and thermal boundary conditions as key design parameters for high-voltage Ga₂O₃ power devices. [reprint (PDF)]
30.	-- November 30, 1999
28.	Ga2O3/(Al)GaN Heterostructures for Next Generation Power Electronics Manijeh Razeghi, N. Shrestha, V. E. Sandana, D. J. Rogers, F. H. Teherani physica status solidi (b), 2026; 263:e70213 Gallium oxide (Ga2O3) is an emerging semiconductor for high-power electronics, but its low thermal conductivity, lack of viable p-type doping, and limited carrier mobility restrict device performance and prevent high-speed applications. This work presents a novel strategy to simultaneously mitigate the thermal and transport limitations of Ga2O3 through heterojunctions with III-nitride materials. Owing to their higher thermal conductivity and strong polarization fields, III-nitrides can enhance heat dissipation and enable high-density two-dimensional electron gases (2DEGs) at the heterointerface, improving switching speed. The role of spontaneous and piezoelectric polarization in 2DEG formation is systematically examined. It is shown that Al-polar AlN/β-Ga2O3 heterojunctions do not support 2DEG formation due to hole accumulation at the interface, whereas N-polar AlN/β-Ga2O3 heterostructures are identified as promising candidates for high 2DEG densities. The band alignment of the AlN/β-Ga2O3 interface is also investigated. Additionally, κ-Ga2O3, recently identified as ferroelectric with strong polarization, is explored in κ-Ga2O3/AlGaN heterostructures. Using epitaxial layer and strain engineering, electron mobilities up to 691 cm2 V−1 s −1 at 77 K were achieved in MOCVD-grown κ-Ga2O3/N-polar AlGaN/AlN heterostructures. These results highlight the potential of III-nitride/Ga2O3 heterostructures for high-power and radiofrequency device applications with enhanced performance and efficiency. [reprint (PDF)]
28.	Background–limited long wavelength infrared InAs/InAsSb type-II superlattice-based photodetectors operating at 110 K Abbas Haddadi, Arash Dehzangi, Sourav Adhikary, Romain Chevallier, and Manijeh Razeghi APL Materials 5, 035502 -- February 13, 2017 ...[Visit Journal] We report the demonstration of high-performance long-wavelength infrared (LWIR) nBn photodetectors based on InAs/InAsSb type-II superlattices. A new saw-tooth superlattice design was used to implement the electron barrier of the photodetectors. The device exhibited a cut-off wavelength of ∼10 μm at 77 K. The photodetector exhibited a peak responsivity of 2.65 A/W, corresponding to a quantum efficiency of 43%. With an R × A of 664 Ω·cm² and a dark current density of 8 × 10⁻⁵ A/cm², under −80 mV bias voltage at 77 K, the photodetector exhibited a specific detectivity of 4.72 × 10¹¹ Jones and a background–limited operating temperature of 110 K. [reprint (PDF)]
28.	Type–II superlattices base visible/extended short–wavelength infrared photodetectors with a bandstructure–engineered photo–generated carrier extractor Arash Dehzangi, Ryan McClintock, Abbas Haddadi, Donghai Wu, Romain Chevallier, Manijeh Razeghi Scientific Reports volume 9, Article number: 5003 -- March 21, 2019 ...[Visit Journal] Visible/extended short–wavelength infrared photodetectors with a bandstructure–engineered photo–generated carrier extractor based on type–II InAs/AlSb/GaSb superlattices have been demonstrated. The photodetectors are designed to have a 100% cut-off wavelength of ~2.4 μm at 300K, with sensitivity down to visible wavelengths. The photodetectors exhibit room–temperature (300K) peak responsivity of 0.6 A/W at ~1.7 μm, corresponding to a quantum efficiency of 43% at zero bias under front–side illumination, without any anti–reflection coating where the visible cut−on wavelength of the devices is <0.5 µm. With a dark current density of 5.3 × 10⁻⁴ A/cm² under −20 mV applied bias at 300K, the photodetectors exhibit a specific detectivity of 4.72 × 10¹⁰ cm·Hz^½W^-1. At 150K, the photodetectors exhibit a dark current density of 1.8 × 10⁻¹⁰ A/cm² and a quantum efficiency of 40%, resulting in a detectivity of 5.56 × 10¹³ cm·Hz^½/W [reprint (PDF)]
27.	High brightness ultraviolet light-emitting diodes grown on patterned silicon substrate Yoann Robin, Kai Ding, Ilkay Demir, Ryan McClintock, Sezai Elagoz, Manijeh Razeghi Materials Science in Semiconductor Processing 90, pp. 87–91-- November 5, 2018 ...[Visit Journal] We report on the fabrication of high brightness AlGaN-based ultraviolet light emitting diodes (UV-LED) on patterned silicon. Using the lateral epitaxial overgrowth approach, we demonstrate the growth of a 6 μm thick AlN layer of high crystalline quality. X-ray diffraction characterization showed a rocking curve with a full width at half maximum of 553 and 768″ for the (00.2) and (10.2) planes, respectively. The low dislocation density of the AlN template enabled the growth of bright AlGaN/ GaN quantum wells emitting at 336 nm. By appropriate flip-chip bonding and silicon substrate removal processing steps, the patterned AlN surface was exposed and efficient bottom-emission UV-LEDs were realized. Improvement of the AlN quality and the structure design allowed the optical output power to reach the milliwatt range under pulsed current, exceeding the previously reported maximum efficiency. Further investigations of the optical power at different pulsed currents and duty cycles show that thermal management in this device structure is still challenging, especially in continuous wave mode operation. The strategy presented here is of interest, since AlN crystalline quality improvement and optimization of the light extraction are the main issues inhibiting efficient UV emitter on silicon fabrication. [reprint (PDF)]
24.	High Power Quantum Cascade Lasers (QCLs) Grown by GasMBE M. Razeghi and S. Slivken SPIE Proceedings, International Conference on Solid State Crystals (ICSSC), Zakopane, Poland, -- October 14, 2002 ...[Visit Journal] This paper is a brief summary of the technological development and state-of-the-art performance of quantum cascade lasers produced at the Centre for Quantum Devices. Laser design will be discussed, as well as experimental details of device fabrication. Recent work has focused on the development of high peak and average power QCLs emitting at room temperature and above. Scaling of the output is demonstrated by increasing the number of emitting regions in the waveguide core. At λ = 9 µm, over 7 W of peak power has been demonstrated at room temperature for a single diode, with an average power of 300 mW at 6% duty cycle. At shorter wavelengths, laser development includes the use of highly strain-balanced heterostructures in order to maintain a high conduction band offset and minimize leakage current. At λ = 6 µm, utilizing a high reflective coating and epilayer-down mounting of the laser, we have demonstrated 225 mW of average power from a single facet at room temperature. Lastly, these results are put in perspective of other reported results and possible future directions are discussed. [reprint (PDF)]
24.	Demonstration of 256x256 Focal Plane Arrays Based on Al-free GaInAs/InP QWIP J. Jiang, K. Mi, R. McClintock, M. Razeghi, G.J. Brown, and C. Jelen IEEE Photonics Technology Letters 15 (9)-- September 1, 2003 ...[Visit Journal] We report the first demonstration of an infrared focal plane array based on aluminum-free GaInAs-InP quantum-well infrared photodetectors (QWIPs).A unique positive lithography method was developed to perform indium-bump liftoff. The noise equivalent differential temperature (NEΔT) of 29 mK was achieved at 70 K with f/2 optics. [reprint (PDF)]
23.	Active and passive infrared imager based on short-wave and mid-wave type-II superlattice dual-band detectors E.K. Huang, A. Haddadi, G. Chen, A.M. Hoang, and M. Razeghi Optics Letters, Vol. 38, no. 1, p. 22-24-- January 1, 2013 ...[Visit Journal] A versatile dual-band detector capable of active and passive use is demonstrated using short-wave (SW) and midwave(MW) IR type-II superlattice photodiodes. A bilayer etch-stop scheme is introduced for back-side-illuminated detectors, which enhanced the external quantum efficiency both in the SWIR and MWIR spectral regions. Temperature-dependent dark current measurements of pixel-sized 27 μm detectors found the dark current density to be ~1 × 10^-5 A/cm² for the ∼4.2 μm cutoff MWIR channel at 140 K. This corresponded to a reasonable imager noise equivalent difference in temperature of ∼49 mK using F∕2.3 optics and a 10 ms integration time (t_int), which lowered to ∼13 mK at 110 K using tint 30 ms, illustrating the potential for high-temperature operation. The SWIR channel was found to be limited by readout noise below 150 K. Excellent imagery from the dual-band imager exemplifying pixel coincidence is shown. [reprint (PDF)]
23.	High-power, high-wall-plug-efficiency quantum cascade lasers with high-brightness in continuous wave operation at 3–300μm Manijeh Razeghi, Yanbo Bai and Feihu Wang Razeghi et al. Light: Science & Applications (2025) 14:252 ...[Visit Journal] Quantum cascade lasers (QCLs) are unipolar quantum devices based on inter-sub-band transitions. They break the electron-hole recombination mechanism in traditional semiconductor lasers, overcome the long-lasting bottleneck which is that the emission wavelength of semiconductor laser is completely dependent on the bandgap of semiconductor materials. Therefore, their emission wavelength is able to cover the mid-infrared (mid-IR) range and the “Terahertz gap” that is previously inaccessible by any other semiconductor lasers. [reprint (PDF)]
23.	Kinetics of Quantum States in Quantum Cascade Lasers: Device Design Principles and fabrication M. Razeghi special issue of Microelectronics Journal 30 (10)-- October 1, 1999[reprint (PDF)]
22.	Dispersion compensated mid-infrared quantum cascade laser frequency comb with high power output Q. Y. Lu, S. Manna, S. Slivken, D. H. Wu, and M. Razeghi AIP Advances 7, 045313 -- April 26, 2017 ...[Visit Journal] Chromatic dispersion control plays an underlying role in optoelectronics and spectroscopy owing to its enhancement to nonlinear interactions by reducing the phase mismatching. This is particularly important to optical frequency combs based on quantum cascade lasers which require negligible dispersions for efficient mode locking of the dispersed modes into equally spaced comb modes. Here, we demonstrated a dispersion compensated mid-IR quantum cascade laser frequency comb with high power output at room temperature. A low-loss dispersive mirror has been engineered to compensate the device’s dispersion residue for frequency comb generation. Narrow intermode beating linewidths of 40 Hz in the comb-working currents were identified with a high power output of 460 mW and a broad spectral coverage of 80 cm^-1. This dispersion compensation technique will enable fast spectroscopy and high-resolution metrology based on QCL combs with controlled dispersion and suppressed noise. [reprint (PDF)]
22.	III-Nitride photon counting avalanche photodiodes R. McClintock, J.L. Pau, K. Minder, C. Bayram and M. Razeghi SPIE Conference, January 20-25, 2008, San Jose, CA Proceedings – Quantum Sensing and Nanophotonic Devices V, Vol. 6900, p. 69000N-1-11.-- February 1, 2008 ...[Visit Journal] In order for solar and visible blind III-Nitride based photodetectors to effectively compete with the detective performance of PMT there is a need to develop photodetectors that take advantage of low noise avalanche gain. Furthermore, in certain applications, it is desirable to obtain UV photon counting performance. In this paper, we review the characteristics of III-nitride visible-blind avalanche photodetectors (APDs), and present the state-of-the-art results on photon counting based on the Geiger mode operation of GaN APDs. The devices are fabricated on transparent AlN templates specifically for back-illumination in order to enhance hole-initiated multiplication. The spectral response and Geiger-mode photon counting performance are analyzed under low photon fluxes, with single photon detection capabilities being demonstrated in smaller devices. Other major technical issues associated with the realization of high-quality visible-blind APDs and Geiger mode APDs are also discussed in detail and solutions to the major problems are described where available. Finally, future prospects for improving upon the performance of these devices are outlined. [reprint (PDF)]
22.	Solar blind GaN p-i-n photodiodes D. Walker, A. Saxler, P. Kung, X. Zhang, M. Hamilton, J. Diaz and M. Razeghi Applied Physics Letters 72 (25)-- June 22, 1998 ...[Visit Journal] We present the growth and characterization of GaN p-i-n photodiodes with a very high degree of visible blindness. The thin films were grown by low-pressure metalorganic chemical vapor deposition. The room-temperature spectral response shows a high responsivity of 0.15 A/W up until 365 nm, above which the response decreases by six orders of magnitude. Current/voltage measurements supply us with a zero bias resistance of 10¹¹ Ω. Lastly, the temporal response shows a rise and fall time of 2.5 μs measured at zero bias. This response time is limited by the measurement circuit. [reprint (PDF)]
22.	Influence of Residual Impurity Background on the Non-radiative Recombination Processes in High Purity InAs/GaSb superlattice Photodiodes E.C.F. da Silva, D. Hoffman, A. Hood, B. Nguyen, P.Y. Delaunay and M. Razeghi Applied Physics Letters, 89 (24)-- December 11, 2006 ...[Visit Journal] The influence of the impurity background on the recombination processes in type-II InAs/GaSb superlattice photodiodes with a cutoff wavelength of approximately 4.8 μm was investigated by electroluminescence measurements. Using an iterative fitting procedure based on the dependence of the quantum efficiency of the electroluminescence on the injection current, the Auger and Shockley-Read-Hall lifetimes were determined [reprint (PDF)]
22.	High-performance short-wavelength infrared photodetectors based on type-II InAs/InAs_1-xSb_x/AlAs_1-xSb_x superlattices M. Razeghi, A. Haddadi, X. V. Suo, S. Adhikary, P. Dianat, R. Chevallier, A. M. Hoang, A. Dehzangi Proc. SPIE 9819, Infrared Technology and Applications XLII, 98190A -- May 20, 2016 ...[Visit Journal] We present a high-performance short-wavelength infrared n-i-p photodiode, whose structure is based on type-II superlattices with InAs/InAs_1-xSb_x/AlAs_1-xSb_x on GaSb substrate. At room temperature (300K) with front-side illumination, the device shows the peak responsivity of 0.47 A/W at 1.6mm, corresponding to 37% quantum efficiency at zero bias. At 300K, the device has a 50% cut-off wavelength of ~1.8mm. For −50mV applied bias at 300 K the photodetector has dark current density of 9.6x10^-5 A/cm² and RxA of 285 Ω•cm², and it revealed a detectivity of 6.45x10¹⁰ cm•Hz^½/W. Dark current density reached to 1.3x10^-8 A/cm² at 200 K, with 36% quantum efficiency which leads to the detectivity value of 5.66x10¹² cm•Hz^½/W. [reprint (PDF)]
22.	Polarity inversion of Type-II InAs/GaSb superlattice photodiodes B.M. Nguyen, D. Hoffman, P.Y. Delaunay, M. Razeghi and V. Nathan Applied Physics Letters, Vol. 91, No. 10, p. 103503-1-- September 3, 2007 ...[Visit Journal] The authors demonstrated the realization of p-on-n Type-II InAs/GaSb superlattice photodiodes. Growth condition for high quality InAsSb layer lattice matched to GaSb was established for the use of an effective n-contact layer. By studying the effect of various GaSb capping layer thicknesses on the optical and electrical performances, an optimized thickness of 160 nm was determined. In comparison to as grown n-on-p superlattice photodiodes, this inverted design of p on n has shown similar quality. Finally, by analyzing Fabry-Perot interference fringes in the front side illuminated spectral measurement, the refractive index of the superlattice was determined to be approximately 3.8. [reprint (PDF)]
22.	Self-Detecting Mid-Infrared Dual-Comb Spectroscopy Based on High-Speed Injection-Locked Quantum Cascade Lasers Yu Ma, Dapeng Wu, Ruixin Huang, Shichen Zhang, Binru Zhou, Zejun Ma, Yongqiang Sun, Junqi Liu, Ning Zhuo, Jinchuan Zhang, Shenqiang Zhai, Shuman Liu, Fengqi Liu, Manijeh Razeghi, and Quanyong Lu Adv. Photonics Res. 2500062 (2025) ...[Visit Journal] Dual-comb spectrometer based on quantum cascade lasers (QCLs) is gaining fast development and revolutionizing the precision measurement with high-frequency and temporal resolutions. In these measurements, high-bandwidth photodetectors are normally used for signal acquisition and processing, which complicates the measurement system. QCL is well-known for its picosecond gain-recovery time with an intrinsic bandwidth of tens of GHz. In this work, a compact self-detecting dual-comb spectroscopy (DCS) is demonstrated based on dispersion-engineered, high-speed packaged QCLs under coherent injection locking. The laser source is designed and fabricated into a hybrid-monolithic-integrated waveguide and epi-down packaged on a wideband-designed submount to fully explore the high-speed feature up to fourth-order harmonic state with a cutoff frequency of 40 GHz. The effective radio frequency (RF) injection locking diminishes the issue of optical feedback and enables high-bandwidth self-detection based on QCLs. Clear and stable multiheterodyne signal corresponding to a spectral range of 68 cm−1 and narrow comb tooth linewidth of ≈10 kHz is observed without using external detector or numerical process. The demonstrated broadband, high-power, self-detecting mid-infrared QCL DCS has a great potential for future applications of molecular sensing and spectroscopy. [reprint (PDF)]
22.	Ultrafast Pulse Generation from Quantum Cascade Lasers Feihu Wang, Xiaoqiong Qi, Zhichao Chen, Manijeh Razeghi, and Sukhdeep Dhillon Wang, F.; Qi, X.; Chen, Z.; Razeghi, M.; Dhillon, S. Ultrafast Pulse Generation from Quantum Cascade Lasers. Micromachines 2022, 13, 2063. https://doi.org/10.3390/ mi13122063 ...[Visit Journal] Quantum cascade lasers (QCLs) have broken the spectral barriers of semiconductor lasers and enabled a range of applications in the mid-infrared (MIR) and terahertz (THz) regimes. However, until recently, generating ultrashort and intense pulses from QCLs has been difficult. This would be useful to study ultrafast processes in MIR and THz using the targeted wavelength-by-design properties of QCLs. Since the first demonstration in 2009, mode-locking of QCLs has undergone considerable development in the past decade, which includes revealing the underlying mechanism of pulse formation, the development of an ultrafast THz detection technique, and the invention of novel pulse compression technology, etc. Here, we review the history and recent progress of ultrafast pulse generation from QCLs in both the THz and MIR regimes. [reprint (PDF)]
21.	Demonstration of long wavelength infrared Type-II InAs/InAs_1-xSb_x superlattices photodiodes on GaSb substrate grown by metalorganic chemical vapor deposition D. H. Wu, A. Dehzangi, Y. Y. Zhang, M. Razeghi Applied Physics Letters 112, 241103-- June 12, 2018 ...[Visit Journal] We report the growth and characterization of long wavelength infrared type-II InAs/InAs_1−xSb_x superlattices photodiodes with a 50% cut-off wavelength at 8.0 μm on GaSb substrate grown by metalorganic chemical vapor deposition. At 77 K, the photodiodes exhibited a differential resistance at zero bias (R₀A) 8.0 Ω·cm², peak responsivity of 1.26 A/W corresponding to a quantum efficiency of 21%. A specific detectivity of 5.4×10¹⁰ cm·Hz^1/2/W was achieved at 7.5 μm. [reprint (PDF)]
21.	Long Wavelength Type-II Photodiodes Operating at Room Temperature H. Mohseni and M. Razeghi IEEE Photonics Technology Letters 13 (5)-- May 1, 2001 ...[Visit Journal] The operation of uncooled InAs-GaSb superlattice photodiodes with a cutoff wavelength of λc=8 μm and a peak detectivity of 1.2 × 10⁸ cm·Hz^½/W at zero bias is demonstrated. The detectivity is similar to the best uncooled HgCdTe detectors and microbolometers. However, the R0A product is more than two orders of magnitude higher than HgCdTe and the device is more than four orders of magnitude faster than microbolometers. These features combined with their low 1/f noise and high uniformity make these type-II photodiodes an excellent choice for uncooled high-speed IR imaging arrays [reprint (PDF)]
21.	GalnAs AND GaInAsP MATERIALS GROWN BY LOW PRESSURE MOCVD FOR MICROWAVE AND OPTOELECTRONIC APPLICATIONS J.P. Duchemin, J.P. Hirtz, M. Razeghi, M. Bonnet , S.D. Hersee J.P. Duchemin, J.P. Hirtz, M. Razeghi, GaInAs and GaInAsP materials grown by low pressure MOCVD for microwave and optoelectronic applications, Journal of Crystal Growth, 55, 1, 1981, Pages 64-73,-- August 1, 1981 ...[Visit Journal] The low pressure MOCVD technique has been successfully used to grow GaInAsP, lattice-matched to InP, for the complete compositional range between InP (λ=0.91 μm) and the ternary compound Ga0.47In0.53As (λ=1.67 μm). By contrast to LPE growth it has been found that during the MOCVD growth of double heterostructures InP can be grown directly onto the ternary or quaternary with no disturbance of the active layer, i.e. there is no effect equivalent to “melt back”. The compositional grading on both sides of the active layer was measured by scanning Auger spectroscopy on bevelled samples. It was found that the graded regions were typically less than 100 Å wide for GaInAsP active layers and less than 50 Å wide for GaInAs active layers. Single layers of undoped GaInAs exhibited a typical mobility of 6700 cm2 V-1s-1 at 1.5×1017 cm-3. The compositional uniformity of the ternary layers was characterised by measurement of the photoluminescence wavelength at various points on a large sample. The wavelength varied by <3 nm over 95% of the area, which was approximately 8 cm2. Our early MOCVD grown GaInAsP/InP DH lasers exhibited high thresholds due to a poor interface between the p-InP and the active layer. However, recently fabricated broad area lasers emitting at 1.27 μm show an average threshold current density of 1.5 kA cm-2 with a T0 of between 70 to 80 K. Stripe geometry lasers have being fabricated from this material and CW operation has been obtained. [reprint (PDF)]

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