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| 423. |
-- November 30, 1999 |
| 101. | nBn extended short-wavelength infrared focal plane array ARASH DEHZANGI, ABBAS HADDADI, ROMAIN CHEVALLIER, YIYUN ZHANG, AND MANIJEH RAZEGHI Optics Letters Vol. 43, Issue 3, pp. 591-594-- February 1, 2018 ...[Visit Journal] An extended short-wavelength nBn InAs/GaSb/AlSb type-II superlattice-based infrared focal plane array imager was demonstrated. A newly developed InAs0.10Sb0.90∕GaSb superlattice design was used as the large-bandgap electron barrier in this photodetector. The large band gap electron-barrier design in this nBn photodetector architecture leads to the device having lower dark current densities. A new bi-layer etch-stop scheme using a combination of InAs0.91Sb0.09 bulk
and AlAs0.1Sb0.9∕GaSb superlattice layers was introduced to allow complete substrate removal and a shorter wavelength cut-on. Test pixels exhibit 100% cutoff wavelengths of ∼2.30 and ∼2.48 μm at 150 and 300 K, respectively. The devices achieve saturated quantum efficiency values of 59.7% and 63.8% at 150 and 300 K, respectively, under backside illumination and without any antireflection coating.At 150 K, photodetectors exhibit dark current density of 8.75 × 10−8 A∕cm² under −400 mV applied bias, providing
specific detectivity of 2.82 × 1012 cm · Hz1∕2∕W at 1.78 μm. At 300 K, the dark current density reaches 4.75 × 10−2 A∕cm² under −200 mV bias, providing a specific detectivity of 8.55 × 109 cm · Hz1∕2∕W 1.78 μm. [reprint (PDF)] |
| 77. | Band-structure-engineered high-gain LWIR photodetector based on a type-II superlattice Arash Dehzangi, Jiakai Li and Manijeh Razeghi Light: Science & Applications volume 10, Article number: 17 (2021) https://doi.org/10.1038/s41377-020-00453-x ...[Visit Journal] The LWIR and longer wavelength regions are of particular interest for new developments and new approaches to realizing long-wavelength infrared (LWIR) photodetectors with high detectivity and high responsivity. These photodetectors are highly desirable for applications such as infrared earth science and astronomy, remote sensing, optical communication, and thermal and medical imaging. Here, we report the design, growth, and characterization of a high-gain band-structure-engineered LWIR heterojunction phototransistor based on type-II superlattices. The 1/e cut-off wavelength of the device is 8.0 µm. At 77 K, unity optical gain occurs at a 90 mV applied bias with a dark current density of 3.2 × 10−7 A/cm2. The optical gain of the device at 77 K saturates at a value of 276 at an applied bias of 220 mV. This saturation corresponds to a responsivity of 1284 A/W and a specific detectivity of 2.34 × 1013 cm Hz1/2/W at a peak detection wavelength of ~6.8 µm. The type-II superlattice-based high-gain LWIR device shows the possibility of designing the high-performance gain-based LWIR photodetectors by implementing the band structure engineering approach. [reprint (PDF)] |
| 53. | High-power, high-wall-plug-efficiency quantum cascade lasers with high-brightness in continuous wave operation at 3–300μm Manijeh Razeghi, Yanbo Bai and Feihu Wang Razeghi et al. Light: Science & Applications (2025) 14:252 ...[Visit Journal] Quantum cascade lasers (QCLs) are unipolar quantum devices based on inter-sub-band transitions. They break the electron-hole recombination mechanism in traditional semiconductor lasers, overcome the long-lasting bottleneck which is that the emission wavelength of semiconductor laser is completely dependent on the bandgap of semiconductor materials. Therefore, their emission wavelength is able to cover the mid-infrared (mid-IR) range and the “Terahertz gap” that is previously inaccessible by any other semiconductor lasers. [reprint (PDF)] |
| 52. | Self-Detecting Mid-Infrared Dual-Comb Spectroscopy Based on High-Speed Injection-Locked Quantum Cascade Lasers Yu Ma, Dapeng Wu, Ruixin Huang, Shichen Zhang, Binru Zhou, Zejun Ma, Yongqiang Sun, Junqi Liu, Ning Zhuo, Jinchuan Zhang, Shenqiang Zhai, Shuman Liu, Fengqi Liu, Manijeh Razeghi, and Quanyong Lu Ma, Y., Wu, D., Huang, R., Zhang, S., Zhou, B., Ma, Z., Sun, Y., Liu, J., Zhuo, N., Zhang, J., Zhai, S., Liu, S., Liu, F., Razeghi, M. and Lu, Q. (2025), Self-Detecting Mid-Infrared Dual-Comb Spectroscopy Based on High-Speed Injection-Locked Quantum Cascade Lasers. Adv. Photonics Res. 2500062. https://doi.org/10.1002/adpr.202500062 ...[Visit Journal] Dual-comb spectrometer based on quantum cascade lasers (QCLs) is gaining fast development and revolutionizing the precision measurement with high-frequency and temporal resolutions. In these measurements, high-bandwidth photodetectors are normally used for signal acquisition and processing, which complicates the measurement system. QCL is well-known for its picosecond gain-recovery time with an intrinsic bandwidth of tens of GHz. In this work, a compact self-detecting dual-comb spectroscopy (DCS) is demonstrated based on dispersion-engineered, high-speed packaged QCLs under coherent injection locking. The laser source is designed and fabricated into a hybrid-monolithic-integrated waveguide and epi-down packaged on a wideband-designed submount to fully explore the high-speed feature up to fourth-order harmonic state with a cutoff frequency of 40 GHz. The effective radio frequency (RF) injection locking diminishes the issue of optical feedback and enables high-bandwidth self-detection based on QCLs. Clear and stable multiheterodyne signal corresponding to a spectral range of 68 cm−1 and narrow comb tooth linewidth of ≈10 kHz is observed without using external detector or numerical process. The demonstrated broadband, high-power, self-detecting mid-infrared QCL DCS has a great potential for future applications of molecular sensing and spectroscopy. [reprint (PDF)] |
| 51. |
-- November 30, 1999 |
| 40. | Room temperature operation of Ge/SixGe1−x−ySny terahertz quantum cascade lasers predicted using extended combined resonant tunneling and rate equation model Zhou Li,, Zhichao Chen, Baiqi Zhang, Qiyun Lai, Zhanfeng Jiang, Yaoyao Liang Yulong Fan, Haoxiang Li, Qi Qin, Manijeh Razeghi∗, and Feihu Wang∗ Room temperature operation of Ge/SixGe1−x−ySny terahertz quantum cascade lasers predicted using extended combined resonant tunneling and rate equation model ...[Visit Journal] Raising operation temperature of terahertz (THz) quantum cascade lasers (QCLs) to room temperature remains a key challenge in QCL community. Group-IV semiconductors are believed to be a promising solution to this problem since the polar phonon–electron scattering is negligible at elevated temperature. Here, we develop a theoretical model for
THz QCL development. This model is established on the combined resonant tunneling and rate equation framework and is extended to be applicable for group-IV QCL design through introducing new scattering mechanisms and continuum states carrier leakage. A two-well
THz QCL based on a direct phonon extraction strategy is designed and predicted to be capable of working above 300 K. This result lays the foundation for future room temperature THz QCL devices development using group-IV semiconductors. [reprint (PDF)] |
| 21. | Toward realization of small-size dual-band long-wavelength infrared photodetectors based on InAs/GaSb/AlSb type-II superlattices Romain Chevallier, Abbas Haddadi, Manijeh Razeghi Solid-State Electronics 136, pp. 51-54-- June 20, 2017 ...[Visit Journal] In this study, we demonstrate 12 × 12 µm² high-performance, dual-band, long-wavelength infrared (LWIR) photodetectors based on InAs/GaSb/AlSb type-II superlattices. The structure consists of two back-to-back heterojunction photodiodes with 2 µm-thick p-doped absorption regions. High quality dry etching combined with SiO2 passivation results in a surface resistivity value of 7.9 × 105 Ω·cm for the longer (red) channel and little degradation of the electrical performance. The device reaches dark current density values of 4.5 × 10−4 A/cm² for the longer (red) and 1.3 × 10−4 A/cm² for the shorter (blue) LWIR channels at quantum efficiency saturation. It has 50% cut-off wavelengths of 8.3 and 11.2 µm for the blue and red channel, respectively, at 77 K in back-side illumination configuration and exhibits quantum efficiencies of 37% and 29%, respectively. This results in specific detectivity values of 2.5 × 1011 cm·Hz½/W and 1.3 × 1011 cm·Hz½/W at 77 K. [reprint (PDF)] |
| 20. | Ultraviolet Detectors for AstroPhysics Present and Future M. Ulmer, M. Razeghi, and E. Bigan Optoelectronic Integrated Circuit Materials, Physics and Devices, SPIE Conference, San Jose, CA; Proceedings, Vol. 239-- February 6, 1995 ...[Visit Journal] Astronomical instruments for the study of UV astronomy have been developed for NASA missions such as the Hubble Space Telescope. The systems that are `blind to the visible' (`solar-blind') yet sensitive to the UV that have been flown in satellites have detective efficiencies of about 10 to 20%, although typically electron bombardment charge coupled devices are higher at 30 - 40% and ordinary CCDs achieve 1 - 5%. Therefore, there is a large payoff still to be gained by further improvements in the performance of solar blind UV detectors. We provide a brief review of some aspects of UV astronomy, UV detector development, and possible technologies for the future. We suggest that a particularly promising future technology is one based on the ability of investigators to produce high quality films made of wide bandgap III-V semiconductors. [reprint (PDF)] |
| 19. | Low irradiance background limited type-II superlattice MWIR M-barrier imager E.K. Huang, S. Abdollahi Pour, M.A. Hoang, A. Haddadi, M. Razeghi and M.Z. Tidrow OSA Optics Letters (OL), Vol. 37, No. 11, p. 2025-2027-- June 1, 2012 ...[Visit Journal] We report a type-II superlattice mid-wave infrared 320 × 256 imager at 81 K with the M-barrier design that achieved background limited performance (BLIP) and ∼99%operability. The 280 K blackbody’s photon irradiance was limited by an aperture and a band-pass filter from 3.6 μm to 3.8 μm resulting in a total flux of ∼5 × 1012 ph·cm−2·s−1. Under
these low-light conditions, and consequently the use of a 13.5 ms integration time, the imager was observed to be BLIP thanks to a ∼5 pA dark current from the 27 μm wide pixels. The total noise was dominated by the photon flux and read-out circuit which gave the imager a noise equivalent input of ∼5 × 1010 ph·cm−2·s−1 and temperature sensitivity of 9 mK with F∕2.3 optics. Excellent imagery obtained using a 1-point correction alludes to the array’s uniform responsivity. [reprint (PDF)] |
| 18. | Geiger-mode operation of ultraviolet avalanche photodiodes grown on sapphire and free-standing GaN substrates E. Cicek, Z. Vashaei, R. McClintock, C. Bayram, and M. Razeghi Applied Physics Letters, Vol. 96, No. 26, p. 261107 (2010);-- June 28, 2010 ...[Visit Journal] GaN avalanche photodiodes (APDs) were grown on both conventional sapphire and low dislocation density free-standing (FS) c-plane GaN substrates. Leakage current, gain, and single photon detection efficiency (SPDE) of these APDs were compared. At a reverse-bias of 70 V, APDs grown on sapphire substrates exhibited a dark current density of 2.7×10−4 A/cm² whereas APDs grown on FS-GaN substrates had a significantly lower dark current density of 2.1×10−6 A/cm². Under linear-mode operation, APDs grown on FS-GaN achieved avalanche gain as high as 14 000. Geiger-mode operation conditions were studied for enhanced SPDE. Under front-illumination the 625 μm² area APD yielded a SPDE of 13% when grown on sapphire substrates compared to more than 24% when grown on FS-GaN. The SPDE of the same APD on sapphire substrate increased to 30% under back-illumination—the FS-GaN APDs were only tested under front illumination due to the thick absorbing GaN substrate. [reprint (PDF)] |
| 18. | Very high wall plug efficiency of quantum cascade lasers Y. Bai, S. Slivken, S.R. Darvish, and M. Razeghi SPIE Proceedings, San Francisco, CA (January 22-28, 2010), Vol. 7608, p. 76080F-1-- January 22, 2010 ...[Visit Journal] We demonstrate very high wall plug efficiency (WPE) of mid-infrared quantum cascade lasers (QCLs) in low temperature pulsed mode operation (53%), room temperature pulsed mode operation (23%), and room temperature continuous wave operation (18%). All of these values are the highest to date for any QCLs. The optimization of WPE takes the route of understanding the limiting factors of each sub-efficiency, exploring new designs to overcome the limiting factor, and constantly improving the material quality. [reprint (PDF)] |
| 17. | High Carrier Lifetime InSb Grown on GaAs Substrates E. Michel, H. Mohseni, J.D. Kim, J. Wojkowski, J. Sandven, J. Xu, M. Razeghi, R. Bredthauer, P. Vu, W. Mitchel, and M. Ahoujja Applied Physics Letters 71 (8-- August 25, 1997 ...[Visit Journal] We report on the growth of near bulklike InSb on GaAs substrates by molecular beam epitaxy despite the 14% lattice mismatch between the epilayer and the substrate. Structural, electrical, and optical properties were measured to assess material quality. X-ray full widths at half-maximum were as low as 55 arcsec for a 10 µm epilayer, peak mobilities as high as ~ 125 000 cm2/V s, and carrier lifetimes up to 240 ns at 80 K. [reprint (PDF)] |
| 17. | Thin-Film Antimonide-Based Photodetectors Integrated on Si Yiyun Zhang , Member, IEEE, Abbas Haddadi, Member, IEEE, Romain Chevallier, Arash Dehzangi, Member, IEEE, and Manijeh Razeghi , Life Fellow, IEEE IEEE JOURNAL OF QUANTUM ELECTRONICS, VOL. 54, NO. 2-- April 1, 2018 ...[Visit Journal] Monolithic integration of antimonide (Sb)-based
compound semiconductors on Si is in high demand to enrich silicon photonics by extending the detection range to longer infrared wavelengths. In this paper, we have demonstrated the damage-free transfer of large-area (1×1 cm² ) narrow-bandgap Sb-based type-II superlattice (T2SL)-based thin-film materials onto a Si substrate using a combination of wafer-bonding and chemical epilayer release techniques. An array of Sb-based T2SL-based long-wavelength infrared (LWIR) photodetectors with diameters from 100 to 400 μm has been successfully fabricated using standard "top–down" processing technique. The transferred LWIR photodetectors exhibit a cut-off wavelength of λ 8.6 μm at 77 K. The dark current density of the transferred photodetectors under 200 mV applied bias at 77 K is as low as
5.7×10−4 A/cm² and the R×A reaches 66.3 Ω·cm², exhibiting no electrical degradation compared with reference samples on GaSb native substrate. The quantum efficiency and peak responsivity at 6.75 μm (@77 K, 200 mV) are 46.2% and 2.44 A/W, respectively. The specific detectivity (D*) at 6.75 μm reaches as
high as 1.6×1011 cm·Hz1/2/W under 200 mV bias at 77 K. Our method opens a reliable pathway to realize high performance
and practical Sb-based optoelectronic devices on a Si platform.
[reprint (PDF)] |
| 17. | Growth and Characterization of Type-II Non-Equilibrium Photovoltaic Detectors for Long Wavelength Infrared Range H. Mohseni, J. Wojkowski, A. Tahraoui, M. Razeghi, G. Brown and W. Mitche SPIE Conference, San Jose, CA, -- January 26, 2000 ...[Visit Journal] Growth and characterization of type-II detectors for mid-IR wavelength range is presented. The device has a p-i-n structure is designed to operate in the non-equilibrium mode with low tunneling current. The active layer is a short period InAs/GaSb superlattice. Wider bandgap p-type AlSb and n-type InAs layers are used to facilitate the extraction of both electronics and holes from the active layer for the first time. The performance of these devices were compared to the performance of devices grown at the same condition, but without the AlSb barrier layers. The processed devices with the AlSb barrier show a peak responsivity of about 1.2 A/W with Johnson noise limited detectivity of 1.1 X 1011 cm·Hz½/W at 8 μm at 80 K at zero bias. The details of the modeling, growth, and characterizations will be presented. [reprint (PDF)] |
| 17. | High-Power (~9 μm) Quantum Cascade Lasers S. Slivken, Z. Huang, A. Evans, and M. Razeghi Virtual Journal of Nanoscale Science and Technology 5 (22)-- June 3, 2002 ...[Visit Journal][reprint (PDF)] |
| 16. | Room temperature continuous wave operation of λ ~ 3-3.2 μm quantum cascade lasers N. Bandyopadhyay, Y. Bai, S. Tsao, S. Nida, S. Slivken and M. Razeghi Applied Physics Letters, Vol. 101, No. 24, p. 241110-1-- December 10, 2012 ...[Visit Journal] We demonstrate quantum cascade lasers emitting at wavelengths of 3–3.2 μm in the InP-based material system. The laser core consists of GaInAs/AlInAs using strain balancing technique. In room temperature pulsed mode operation, threshold current densities of 1.66 kA∕cm² and 1.97 kA∕cm², and characteristic temperatures (T0) of 108 K and 102 K, are obtained for the devices emitting at 3.2 μm and 3 μm, respectively. Room temperature continuous wave operation is achieved at both wavelengths. [reprint (PDF)] |
| 16. | Transport and photodetection in self-assembled semiconductor quantum dots M Razeghi, H Lim, S Tsao, J Szafraniec, W Zhang, K Mi and B Movaghar Nanotechnology 16 219-- January 7, 2005 ...[Visit Journal] A great step forward in science and technology was made when it was
discovered that lattice mismatch can be used to grow highly ordered,
artificial atom-like structures called self-assembled quantum dots. Several
groups have in the meantime successfully demonstrated useful infrared
photodetection devices which are based on this technology. The new
physics is fascinating, and there is no doubt that many new applications will
be found when we have developed a better understanding of the underlying
physical processes, and in particular when we have learned how to integrate
the exciting new developments made in nanoscopic addressing and
molecular self-assembly methods with semiconducting dots. In this paper
we examine the scientific and technical questions encountered in current
state of the art infrared detector technology and suggest ways of overcoming
these difficulties. Promoting simple physical pictures, we focus in particular
on the problem of high temperature detector operation and discuss the origin
of dark current, noise, and photoresponse. [reprint (PDF)] |
| 16. | Solar-Blind Deep UV Avalanche Photodetectors Using Reduced Area Epitaxy Lakshay Gautam , Junhee Lee, Michael Richards, and Manijeh Razeghi , Lakshay Gautam, Manijeh Razeghi, IEEE JOURNAL OF QUANTUM ELECTRONICS, VOL. 59, NO. 6, 10.1109/JQE.2023.3325254 ...[Visit Journal] We report high gain avalanche photodetectors operating in the deep UV wavelength regime. The high gain was
leveraged through reduced area epitaxy by patterning AlN on
Sapphire substrate. This helps in a substantial reduction of crack
formation due to overgrowth on individually isolated AlN mesas.
Reproducible gain on the order of 105 was reported for multiple
diodes in different areas of 320 × 256 focal plane array. [reprint (PDF)] |
| 16. | High brightness angled cavity quantum cascade lasers D. Heydari, Y. Bai, N. Bandyopadhyay, S. Slivken, and M. Razeghi Applied Physics Letters 106, 091105-- March 6, 2015 ...[Visit Journal] A quantum cascade laser (QCL) with an output power of 203 W is demonstrated in pulsed mode at
283 K with an angled cavity. The device has a ridge width of 300 μm, a cavity length of 5.8 mm, and a tilt angle of 12°. The back facet is high reflection coated, and the front facet is anti-reflection coated. The emitting wavelength is around 4.8 μm. In distinct contrast to a straight cavity broad area QCL, the lateral far field is single lobed with a divergence angle of only 3°. An ultrahigh brightness value of 156 MW cm²·sr-1 is obtained, which marks the brightest QCL to date. [reprint (PDF)] |
| 15. | Suppression of surface leakage in gate controlled type-II InAs/GaSb mid-infrared photodetectors G. Chen; B.-M. Nguyen; A.M. Hoang; E.K. Huang; S.R. Darvish; M. Razeghi Proc. SPIE 8268, Quantum Sensing and Nanophotonic Devices IX, 826811 (January 20, 2012)-- January 20, 2012 ...[Visit Journal] One of the biggest challenges of improving the electrical performance in Type II InAs/GaSb superlattice photodetector is suppressing the surface leakage. Surface leakage screens important bulk dark current mechanisms, and brings difficulty and uncertainty to the material optimization and bulk intrinsic parameters extraction such as carrier lifetime and mobility. Most of surface treatments were attempted beyond the mid-infrared (MWIR) regime because compared to the bulk performance, surface leakage in MWIR was generally considered to be a minor factor. In this work, we show that below 150K, surface leakage still strongly affects the electrical performance of the very high bulk performance p-π-M-n MWIR photon detectors. With gating technique, we can effectively eliminate the surface leakage in a controllable manner. At 110K, the dark current density of a 4.7 μm cut-off gated photon diode is more than 2 orders of magnitude lower than the current density in SiO2 passivated ungated diode. With a quantum efficiency of 48%, the specific detecivity of gated diodes attains 2.5 x 1014 cm·Hz1/2/W, which is 3.6 times higher than that of ungated diodes. [reprint (PDF)] |
| 15. | Photovoltaic effects in GaN structures with p-n junction X. Zhang, P. Kung, D. Walker, J. Piotrowski, A. Rogalski, A. Saxler, and M. Razeghi Applied Physics Letters 67 (14)-- October 2, 1995 ...[Visit Journal] Large-area GaN photovoltaic structures with p-n junctions have been fabricated using atmospheric pressure metalorganic chemical vapor deposition. The photovoltaic devices typically exhibit selective spectral characteristics with two narrow peaks of opposite polarity. This can be related to p-n junction connected back‐to‐back with a Schottky barrier. The shape of the spectral characteristic is dependent on the thickness of the n- and p-type regions. The diffusion length of holes in the n-type GaN region, estimated by theoretical modeling of the spectral response shape, was about 0.1 μm. [reprint (PDF)] |
| 15. | Back-illuminated solar-blind photodetectors for imaging applications R. McClintock, A. Yasan, K. Mayes, P. Kung, and M. Razeghi SPIE Conference, Jose, CA, Vol. 5732, pp.175-- January 22, 2005 ...[Visit Journal] Back-illuminated solar-blind ultraviolet p-i-n photodetectors and focal plane arrays are investigated. We initially study single-pixel devices and then discuss the hybridization to a read-out integrated circuit to form focal plane arrays for solar-blind UV imaging. [reprint (PDF)] |
| 15. | High Quality Aluminum Nitride Epitaxial Layers Grown on Sapphire Substrates A. Saxler, P. Kung, C.J. Sun, E. Bigan and M. Razeghi Applied Physics Letters 64 (3)-- January 17, 1994 ...[Visit Journal] In this letter we report the growth of high quality AlN epitaxial layers on sapphire substrates. The AlN grown on (00·1) sapphire exhibited a better crystalline quality than that grown on (01·2) sapphire. An x-ray rocking curve of AlN on (00·1) Al2O3 yielded a full width at half-maximum of 97.2 arcsec, which is the narrowest value reported to our knowledge. The AlN peak on (01·2) Al2O3 was about 30 times wider. The absorption edge measured by ultraviolet transmission spectroscopy for AlN grown on (00·1) Al2O3 was about 197 nm. [reprint (PDF)] |
| 15. | High power operation of λ ∼ 5.2–11 μm strain balanced quantum cascade lasers based on the same material composition N. Bandyopadhyay, Y. Bai, S. Slivken, and M. Razeghi Appl. Phys. Lett. 105, 071106 (2014)-- August 20, 2014 ...[Visit Journal] A technique based on composite quantum wells for design and growth of strain balanced Al0.63In0.37As/Ga0.35In0.65As/Ga0.47In0.53As quantum cascade lasers (QCLs) by molecular beam epitaxy (MBE), emitting in 5.2–11 μm wavelength range, is reported. The strained Al0.63In0.37As provides good electron confinement at all wavelengths, and strain balancing can be achieved through composite wells of Ga0.35In0.65As/Ga0.47In0.53As for different wavelength. The use of these fixed composition materials can avoid the need for frequent calibration of a MBE reactor to grow active regions with different strain levels for different wavelengths. Experimental results for QCLs emitting at 5.2, 6.7, 8.2, 9.1, and 11 μm exhibit good wall plug efficiencies and power across the whole wavelength range. It is shown that the emission wavelength can be predictably changed using the same design template. These lasers are also compatible with a heterogeneous broadband active region, consisting of multiple QCL cores, which can be produced in a single growth run. [reprint (PDF)] |
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