Deep Level Transient Spectroscopy System This is the CQD's DLTS system. It uses scanning capacitance measurement at various frequencies, DC biases, temperatures, and under illumination to paint a picture of the deep levels in a pn junction.
DeIonized Water Generator Ion-exchange resin mixed beds, particulate filters and antimicrobial UV steraluzer that are used to supply 18 M-Ohm high purity deionized water to the cleanroom
Rapid Thermal Annealing System This is an RTA that can be used for heat-treatment of samples, or in the processing of devices.
Channel
Address: Center for Quantum Devices; 2220 Campus Drive RM 4051; Evanston, IL 60208-0893
Phone: (847) 491-7251
Email: razeghi@northwestern.edu