The Center for Quantum Devices Facilities by    
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Electron Beam Lithography
Electron Beam Lithography
Lica Lion-LV1 electron beam lithography system capable or producing features smaller than 30 nm.
 
Laser Measurement Setup
Laser Measurement Setup
Bruker FRIR, laser drivers, thermostatic stage, and data acquisition equipment
 
Photodetector Measurment Setup
Photodetector Measurment Setup
Burker FTIR and Helium cryostat used to characterize Infrared materials and devices.
 
Lapping & Polishing
Lapping & Polishing
One of two Logitech lapping and polsihing systems used to mechanically thin laser diodes in preperatiion for cleaving, or to assist in back-thinning of hybridized focal plane arrays for higher performance.
 
Laser Bonder
Laser Bonder
SET FC-150 high-precision die-bonder used to bond lasers with excellent placement accuracy and planarity.
 
Atomic Force Microscope
Atomic Force Microscope
Digital Instruments, Nanoscope D3100 scanning probe microscope in a vibration isolation enclosure, configured for tapping more AFM.
 
IR Photoluminescence
IR Photoluminescence
Setup used to characterize IR material using an argon-ion laser, monochromator, lock-in amplifier, and various commercial IR detectors.
 
Scanning Electron Microscope
Scanning Electron Microscope
Hitachi 4500 cold field emission SEM used in the characterization of epitaxial films and the processing of semiconductor devices.
 
High-Resolution X-Ray Diffraction System
High-Resolution X-Ray Diffraction System
Philips HR-XRD with a 2 KW copper Kα source, 4-bounce germanium monochromator, precision goniometer, and scintillation detector.
 
Chemistry Room
Chemistry Room
Class 1000 chemistry room with four hoods, mask aligner, and yellow lighting to support lithography and semiconductor device processing.
 

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